PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

REC

8 1 1 Cylinder tube Aluminum alloy Piston seal NBR Hard anodized e !

7

BMA3-050S (A set of a, b, c, e) BMA3-063S (A set of a, b, c, e) Auto switch Switch bracket (Resin) Transparent (Nylon)Note 1) d e White (PBT) c Switch holder b Auto switch mounting screw a * Band (a) is mounted so that the projected part is on the internal side (contact side with the tube).

Compact Manifold Regulator

0 50 100 150 200 250 300 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200

Series CE1

J F L X C B + Stroke Z M E A + Stroke T 2-P Q I (Port size) Metal connector Made by TAJIMI R04-J8M7.3 15.5 M14 X 1 38 (mm) A B C D E F G H I J K Bore size (mm) Standard stroke 50, 75, 100, 125, 150, 175, 200, 250, 300 100, 125, 150, 175, 200, 250, 300, 400, 500 32 131 90 27 16 45 49.5 64 M14 X 1.5 14 4.5 14 40 177 136 27 16 52 57 71.5 M14 X 1.5 24 5 14 50 63 200, 300, 500 193 144 32 20 64

NAAMS Standards Compliant

250 300 0 50 100 150 200 250 300 Arm length [mm] Arm length [mm] Bore size: 63, Arm length: 200 mm, Operating pressure: 0.5 MPa With an arm length of 200 mm and an operating pressure of 0.5 MPa, according to the graph, the maximum clamping force is 2000 N.

3 Port Solenoid Valve Metal Seal Series VZ200 1

(Values at the initial period) VFN Base mounted JIS Symbol Solenoid Specifications Option Grommet (G), Plug connector (L), Plug connector (M), DIN terminal (D) 100, 200, 24 , 48 , 110 , 220 Electrical entry DC AC 50/60 Hz Coil rated voltage (V) 24, 6 , 12 , 48 Allowable voltage fluctuation (%) 15 to +10% of rated voltage Caution Coil insulation type Class E or equivalent (120C) (2) Temperature

LEF-OM006xx

0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200

T

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

CE

J F C X B + Stroke L Z M A + Stroke E T 2-P (port size) I Q Metal connector Made by TAJIMI R04-J8M7.3 15.5 M14 x 1 38 (mm) G A C D E F H J K B I Bore size (mm) 32 40 50 63 Standard stroke 64 131 27 16 45 49.5 M14 x 1.5 4.5 14 90 14 50, 75, 100, 125, 150, 175, 200, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Assembly 1) Terminal box e connected with housing r should be reinstated.

RZQ

) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Sine Cylinder Series REC

Basic mass 0.90 (Foot style 32) Additional mass 0.09/50 st Cylinder stroke 200 (st) 0.90 + 0.09 x 200/50 = 1.26 kg CX MQ RHC Mounting Bracket Part No.

Sine Cylinder Series REC

Basic mass 0.90 (Foot style 32) Additional mass 0.09/50 st Cylinder stroke 200 (st) 0.90 + 0.09 x 200/50 = 1.26 kg CX MQ RHC Mounting Bracket Part No.

MGQ

20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E 30 st or less Over 30 st A A Symbol Symbol

SL5200

No gauge port psig/bar unit MPa unit No code Porting Configuration No pressure gauge (Connections: 1/4 inch face seal male) 0 r r e V3 L 1 2 4 10 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa Sample Order Number Port w q w q w q SL5406S e q FV4 FV4

Stroke Reading Cylinder and Counter

J F C X B + Stroke L Z M A + Stroke E T 2 x P (Port size) Q I Metal connector 15.5 M14 x 1 (mm) A B C D E F G H I J K Standard stroke Bore size (mm) 32 40 50 63 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 50, 75, 100, 125, 150, 175, 200, 250, 300 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18

ARM10/11

Material Description Description q w e r t y u i o !0 !

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

ARM10/11

Material Description Description q w e r t y u i o !0 !