Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

48

Plug Part Number Bore size Part number Port thread type Quantity1 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 *1 1 set includes 8 pieces.

CJ2

D-H7LF 1 25 Precautions 2 10 D-A7/A8 D-A73C/A80C 1 5 2 5 D-F7V D-J79C Refer to p.1.3-3 before handling. 1 5 Rail mounting 2 15 D-A79W D-F7WV 1 10 D-F7, J79, D-F79F, D-A7H, A80H D-F7W, J79W D-F7BAL 2 15 1 15 2 25 D-F7LF 1 25 Accessory/Refer to p.1.3-12 for details.

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

MY2

Load weight kg Load weight kg 16 12 25 15 MY2C40 MY2HT40 Horizontal impact: P = 0.5MPa 40 24 Horizontal impact: P = 0.5MPa Stroke adjusting unit holding bolt tightening torque Unit: Nm 2000 1500 2000 1500 H unit H unit Impact speed mm/s Impact speed mm/s L unit 1000 1000 Bore size (mm) Tightening torque 16 0.6 L unit 500 400 300 500 400 300 25 1.5 Air cushion Air cushion 40 5.0 Calculation

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

center/pressure center 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 4 (A) 5 (EA) 1 (P) 3 (EB) 2 (B) 5 (EA) 1 (P) 3 (EB) Parts list 2 position single with back pressure check valve Material Note Description No.

SZ3000

P-73 (JT)

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

Integrated Controller

p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53 Solid State Auto Switch, Normally Closed Solid State Auto Switch, 2-Color Indicator Solid State Auto Switch p. 30, 54 e-Actuator Electric Specifications p. 59 Wiring Examples p. 60 Operation Data Setting p. 61 Options p. 62 Slider Type Specific Product Precautions p. 33 Rod Type Specific Product Precautions

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

LEH_C

NO. 1 / 1) /P.39 6. 2) /P.10 2.1.1 /LEHZ /code1-193 /P.13 2.2.1 /LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS 3) /P.42 7.3 4)() /P.10 2.1.1 /LEHZ /P.13 2.2.1 /LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS /P.52 8.3 /code1-048 / 12 RESET (40%) OFF SVON ON OFF DRV /code1-098 RESET SVRE ON SETUP ON SETOFF DRV /code1-099 RESET SETON ON /P.38 25 - No. 2 / 1)() /P.10 2.1.1 /LEHZ /P.13 2.2.1

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

CNG

P-86.5 (JT)

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

MXS

25 25 35 50 54 107 155 195 KA M 83 83 83 93 108 147 200 254 306 Refer to "Dimensions" of MXS20 on p.3.11-21 for one with shock absorber as symmetric.

Cylinder with Lock Series CNG

200 201 to 350 44.5 8 201 to 350 6.5 9 20 to 300 22 19.5 17 45 103 1/8 16.5 10 14 2 97 10 (12) 25 7 6 31 to 300 301 to 400 51.5 10 301 to 400 6.5 9 20 to 300 22 19.5 17 45 104 1/8 20 12 18 2 97 10 (12) 25 7 6 38 to 300 301 to 450 51.5 10 301 to 450 7 11 20 to 300 30 27 19 52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J

Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.

MNB

P-76 (M)

Cylinder with Lock

18 Construction p. 20 Dimensions p. 21 Auto Switch Mounting p. 24 MWB-UT Series/Lock Unit How to Order/Specifications p. 32 Construction p. 33 Dimensions p. 34 Made to Order Individual Specifications p. 35 Dimensionally Compatible with the MNB Series (-X3000) Simple Specials p. 36 Change of Rod End Shape (-XA0 to XA30) Made to Order Common Specifications p. 38 With Coil Scraper