-- NCM seies

D -With Built in Magnet (Not available as std. on single acting models, XB6 & XB7) I XBg -Low Friction I XCO -Stainless Steel Rod LNumber of Auto-swircnes -2 pcs. S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

70pvpump

(1) 5 to 55 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 VC Outlet air atmospheric pressure dew point (C) 20 VDW Inlet air flow rate l/min (ANR) (2) 625 62 125 250 375 VQ Outlet air flow rate l/min (ANR) 50 100 200 300 500 VX2 Purge air flow rate l/min (ANR) (3) 12 25 50 75 125 VX Inlet air pressure (MPa) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

EX510-GDN1.eng

COM C COM C is receiving data: Lights up COM C is having no data to receive: Goes off COM D COM D is receiving data: Lights up COM D is having no data to receive: Goes off : It is lit when input unit is connected and communicating normally. 19 18 Display/ Switch Setting (continued) Switch setting Make sure that switch setting is performed with power supply turned off.

EX510-GPR1.eng

COM C COM C is receiving data: Lights up 2 COM C is having no data to receive: Goes off A. For separate power supply use B. For single power supply use COM D COM D is receiving data: Lights up 2 COM D is having no data to receive: Goes off 1: Refer to "Operation Manual" for the extension diagnosis information. 2: It is lit when input unit is connected and communicating normally.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VT VP How to Order Manifold Assembly (Example) VG VP D side U side 1 3 4 5 Stations VQ VQZ215-5L 4set VQZ 2 VV3QZ25-05C6C 1 set (C kit 5 stations manifold base) VVQZ200-10A-5 1 set (Blank plate assembly) VQZ215-5L 4 sets (Single solenoid) VZ VS Prefix "" mark to valves etc.to be assembled on the manifold. Write sequentially from the 1st station on the D side.

MHS

O O MHS2MHS4 MHS3 15 MHSJ3 C J O O J J J 16 MHSH3 C A O O O A A 17 / / C S (P) P O O S O P P C / ; ; ; ; C 18 4-3 3 MHS2 MHS3 MHS4 1 C C 4 2 5 mm Nm 16 M30.5 2.5 0.6 20 M30.5 2.5 0.6 25 M40.7 3 1.4 32 M50.8 4 5.1 40 M50.8 4 5.1 50 M61 5 8.6 63 M81.25 6 21.6 80 M101.5 8 24 100 M121.75 10 42.2 125 M142 12 67.7 19 MHSJ3 4 1J J 5 2 C C 6 3 mm Nm 16 M2.50.45 2 0.3

EX500-GPR1A.eng

Application 8 7 6 5 4 3 2 Communication connector 1 9 Ground terminal Used for grounding EX500 Part Names Station number switch protective cover Set address and bus terminator by using the switches under this cover. ( Note2 ) Display Communication port D ( COM D ) Communication port C ( COM C ) Communication port B ( COM B ) Communication port A ( COM A ) Power supply connector Display the

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

/N.O. 1 2 3 Station D side U side 4 position dual 3 port valve: N.C./N.O. Manual override Pilot specifications Non-locking push type Nil Internal pilot Nil R External pilot Slotted locking type D Note) 4 position dual 3 port valves are not available with external pilot specification.

This is a legacy product, and replaced byCY1SG15-210BZ-M9NL, CYL, RODLESS, SLIDER, SW CAP, ACTUATOR, CY1S GUIDED CYLINDER, GM, 15MM CY1S SLIDE BEARING, 3.41844 lb

Motor: 2-Phase Stepping Motor, Thread Lead: 5mm, Stroke: 150mm, Origin Switch: Yes (Cable Length 0.3m), Brake: No, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.

Motor: 2-Phase Stepping Motor, Thread Lead: 5mm, Stroke: 150mm, Origin Switch: No, Brake: No, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Thread Lead: 2mm, Stroke: 175mm, Origin Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.

Motor: 2-Phase Stepping Motor, Thread Lead: 2mm, Stroke: 200mm, Origin Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 12mm, Stroke: 200mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 3 pcs.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 200mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: None, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 50mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: None, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.

Motor: 5-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 150mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.

Motor: 5-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 50mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.