Series 10/11-C(D)A2, available for clean environment, prevent particle generation in a clean room. 21/22-C(D)A2 series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The CDA2 clean series is auto switch capable.

3 Port Air Operated Valve

(Values at the initial period) Flow Rate Characteristics/Weight C [dm 3/(sbar)] b Cv 1 2 (P A) 2 3 (A R) Weight (g) Note) Port size Model C [dm 3/(sbar)] b Cv 3.6 3.9 7.5 8.8 12.9 14.7 1/8 1/4 1/4 3/8 3/8 1/2 0.22 0.22 0.16 0.07 0.10 0.05 0.8 0.9 1.7 2.0 2.9 3.3 3.5 3.8 7.3 8.8 13.3 15.0 0.24 0.14 0.20 0.13 0.24 0.17 0.8 0.9 1.7 2.0 3.1 3.4 185 (118) 180 (118) 358 (233) 350 (233) 693

Precision Cylinder Series MTS

freezing) Bearing type Ball spline Rubber bumper Cushion Air cushion Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Non-lube Reed switch: D-A9 Solid state switch: D-F9 D-F8 Reed switch: D-A9 Solid state switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size

Precision Regulator

The air pressure that flows in acts on diaphragm C. While opposing the force generated by diaphragm B it also acts on diaphragm A, opposing the compression force of the setting spring and becomes the set pressure.

IR1000/2000/3000

Combination Catalog CAT.E5G-C for types of attachments.)

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rate tlin\~ 330 750 350 C ,oP/rolled flow . (A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 056 (9/16"), Stroke: 350 (3 1/2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 075 (3/4"), Stroke: 350 (3 1/2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 200 (2"), Stroke: 350 (3 1/2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 250 (2 1/2"), Stroke: 350 (3 1/2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 150 (1 1/2"), Stroke: 350 (3 1/2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 106 (1 1/16"), Stroke: 350 (3 1/2"), Body Option: C (Rubber Bumper), Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Z (Super Compact), Bore Size: 200 (2"), Stroke: 350 (3 1/2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 106 (1 1/16"), Stroke: 350 (3 1/2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 075 (3/4"), Stroke: 350 (3 1/2"), Body Option: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Z (Super Compact), Bore Size: 075 (3/4"), Stroke: 350 (3 1/2"), Body Option: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 200 (2"), Stroke: 350 (3 1/2"), Body Option: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Z (Super Compact), Bore Size: 075 (3/4"), Stroke: 350 (3 1/2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC4 (Scraper)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 250 (2 1/2"), Stroke: 350 (3 1/2"), Body Option: Standard (Rod End Female Thread), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 200 (2"), Stroke: 350 (3 1/2")