Magnet: None, Mounting: D (Clevis), Type: A (Air Cushion), Bore: 100mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 150mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: V (Single Knuckle Joint)

Magnet: None, Mounting: Double Clevis, Style: Non-lube Air Cushion, Bore Size: 100mm, Thread: NPT, [ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion, Piping: Screw-in Piping, Stroke: 125mm, Stroke Adjust Symbol: None, Rod Boot: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option

Magnet: None, Mounting: Clevis, Type: Air Cushion, Bore: 100mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewire Connection: -, Number: -, X Option: -

Magnet: None, Mounting: Clevis, Type: Air Cushion, Bore: 100mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 400mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewire Connection: -, Number: -, X Option: -

Magnet: None, Mounting: Clevis, Type: Air Cushion, Bore: 100mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 450mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewire Connection: -, Number: -, X Option: -

Magnet: None, Mounting: Clevis, Type: Air Cushion, Bore: 100mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 700mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: Single Knuckle Joint, Auto Switch: -, Lead Wire or Prewire Connection: -, Number: -, X Option: -

Magnet: None, Mounting: Clevis, Type: Air Cushion, Bore: 100mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 150mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: Single Knuckle Joint, Auto Switch: -, Lead Wire or Prewire Connection: -, Number: -, X Option: -

Cylinder with Lock

100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Ordering Example of Cylinder Assembly Cylinder model: CP96NDD50-100C-NW-M9BW

XLAQ/XLDQ

Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

LEC-OM07605CN

(1) LECSS2-TAC200V240V (4) (4) RA1 ON OFF RA1 MC MC SK MCCB CNP1 MC (7) MC (6) (11) (10) L1 CNP3 (6) AC 200 V 240 V U U L2 AC200240V V V L3 M W NW P3 (1) (10) (1) (9) PE P4 CNP2 P+ (2) C (2) (11) (3) (10) (3) D CN2 L11 L21 (7) (8) CN3 CN3 DC 24 V ( 12) DC24V (11) (5) 2 EM2 DOCOM (5)2 (5) (5) (4) RA1 ALM (4) DICOM DC 24 V ( 12) DC24V (11) (8) CN8 (9) () () 1. P3P4() 2.

17

O-ring MY1B25-PS MY1B32-PS MY1B40-PS Note) For the replacement procedure of replacement parts/seals, refer to the Operation Manual. 1192 MY1B Series Mechanically Jointed Rodless Cylinder Basic Type Standard/Centralized Piping Type 25, 32, 40 MY1B25 /32 /40 Z Stroke (LL) L 2 x 2 x B counterbore depth C LD through-hole 4 x MM depth M P(MY1BG) (Hexagon socket head taper plug) PA YW PP QQ RR QW NW

Series SV

SV1000 SV2000 SV3000 0 NW QW 1 2 3 P, E port position Input block Supply/Exhaust block assembly specification Input block type Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3 pins) A, B port size For mixed mounting, indicate the port size, such as C3 or C4, instead of a "" in the a section of the station table.

Valve Type: XYC (In-line Type, Double Acting, Bellows Seal), Flange Size: 80, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: 1, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: Z (5m), Number: A [2 pcs (Valve Open/Closed)]

Flange Size: 40, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: F (w/Indicator, Left Flange Surface), Version: 2 (Refresh), Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: S (w/

Valve Type: XYA (In-line Type, Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: A (w/Indicator, Flange Side; w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A [2 pcs (Valve Open/Closed)]

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: NW (Mounting Type W), Lead Screw: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 150mm

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: B (1pc, Valve Open)