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Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.

/Single Unit Body material Brass 2 x 3.4 Mounting hole W Y Grommet X U 300 Q F D Full wave rectifier (AC type) C R [mm] 1 E G Mounting method Model Port size P B B1 C D E F J K M 2 x P Port size B B1 VDW1 M5 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 22 11 51.7 20 8 13.5 M3 5 15 Mounting bracket dimensions (XD) Electrical entry M Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

C J G5-S G-(0 to 10) CV (mm) (mm) H G F F E D D C C B B A A G Model MK32-N MK40-N MK50-N MK63-N Model MK32-M MK40-M MK50-M MK63-M MVGQ M8 x 1.25 25 9 35.5 18 45 36 20 53.5 67 14 18 6 6.2 M8 x 1.25 25 9 43 18 45 36 20 61 67 14 18 6 6.2 CC M10 x 1.5 40 11.5 53 23 65 46 22 77 88 18 22 8 8.2 M10 x 1.5 40 11.5 52.5 23 65 46 22 76.5 88 18 22 8 8.2 RB J Mounting arms for width across flats D-X

Speed exhaust controller Option None P The effective area is two times larger With spatter cover C Body size than that of speed controller. Hexagonal lock nut K M3 M5 1/8 1/4 3/8 1 2 3 4 5 Note) Option should be indicated in order of C and K. Only available for ASV310F,410F and 510F.

There is a raised part on the controller side. (2) Dimensions Actuator side Controller side Protruding part 86 - 15.4 Controller setting cable (1) How to Order L E C W 2 A C Communication cable L E C W 2 U USB cable PC Communication cable (LEC-W2A-C) USB cable (LEC-W2-U) Controller configuration software USB driver Download from SMCs website https://www.smcworld.com (2) Operating environment

NBR FKM C S A Note 2) T N V Symbol Number of arranged elements Note 1) Not used with fiber elements.

NBR FKM C S A Note 2) T N V Symbol Number of arranged elements Note 1) Not used with fiber elements.

(mm) Stroke range A Bore size (mm) P AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM S ZZ NA 20 1/8 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 83 124 29 to 200 25 1/8 22 19.5 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 83 129 29 to 300 32 1/8 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 85 131 35.5 to 300 40 1/8 30

400 200 VXB215 B E(H) 100 300 400 500 600 200 VXB215 C F(H) 100 300 400 500 600 700 800 200 Flow rate Q [kg/h] How to read the graph The sonic range pressure to generate a flow rate of 300 kg/h is P1 0.3 MPa for the VXB215C F(H).

to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by E.O.

4524, JIS C 4525, IEC 947-5-2, NECA 0402 Conformed standard 300 m/s2 Impact resistance IP67 (IEC60529 standard) Enclosure 100 M or more at 500 VDC measured via megohmmeter Insulation resistance 1500 VAC 1 minute (between contacts), Leak current 1 mA or less Withstand voltage M8-4 pin Dimensions Connector model 10 Sensor section M8-3 pin 4 pin 31.4 M12-4 pin 14 Sensor section M12-4 pin 44

1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200

Please change the parameter in the initial setting. *3 The minimum unit of the travel distance of the actuator should be 1 [m]. -27- Recommended Parameter Values [LEY] LEY25/LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

Note 1) The same bracket is used for VCS3 and VCS4 (port size 1/2). 17-2-44 7 Series VCS Direct Operated 2 Port Solenoid Valve For Steam Dimensions Grommet:G Conduit: C Q 300 F D 280 D Q F VC C G1/2 C R R VDW VQ E E B A H 2-P Port size VX2 A B H 2-P 2-M Thread depth N 2-M Thread depth N VX Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

l t :r' 'i., L Type Plug Connector: NVJ3120C-OLOO-M3 M Type Plug Connector : NVJ3120O-OMOO-M3 2 52 i64) @ Body Ported Tgpe: Double Solenoid inch(mm) Grommet (c) : NVJ3220O-OGO-M3 (H) : NVJ3220O-OHO-M3 L Type Plug Connec{or (L) : IWJ3220O-OLOO-M3 M Type Plug Con nector (M) : NVJ3220O-OMOO-M3 11.81 (300) | @ inch (mm) BodU Ported Tgpe: 3 Position Grommet (G) : NVJ3320O-OGO-M3, NVJ3420O-OGO

l t :r' 'i., L Type Plug Connector: NVJ3120C-OLOO-M3 M Type Plug Connector : NVJ3120O-OMOO-M3 2 52 i64) @ Body Ported Tgpe: Double Solenoid inch(mm) Grommet (c) : NVJ3220O-OGO-M3 (H) : NVJ3220O-OHO-M3 L Type Plug Connec{or (L) : IWJ3220O-OLOO-M3 M Type Plug Con nector (M) : NVJ3220O-OMOO-M3 11.81 (300) | @ inch (mm) BodU Ported Tgpe: 3 Position Grommet (G) : NVJ3320O-OGO-M3, NVJ3420O-OGO-

l t :r' 'i., L Type Plug Connector: NVJ3120C-OLOO-M3 M Type Plug Connector : NVJ3120O-OMOO-M3 2 52 i64) @ Body Ported Tgpe: Double Solenoid inch(mm) Grommet (c) : NVJ3220O-OGO-M3 (H) : NVJ3220O-OHO-M3 L Type Plug Connec{or (L) : IWJ3220O-OLOO-M3 M Type Plug Con nector (M) : NVJ3220O-OMOO-M3 11.81 (300) | @ inch (mm) BodU Ported Tgpe: 3 Position Grommet (G) : NVJ3320O-OGO-M3, NVJ3420O-OGO-

Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.