LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

10

S F S + m g S F S m g S Absorbed energy E E1 + E2 E1 + E2 E1 + E2 E1 + E2 Note 2) E 2 2 E 2 2 E 2 2 E 2 2 Equivalent mass Me Note 1) This is the momentary speed at which an object is impacting against a shock absorber.

Drain Separator for Vacuum Series AMJ 1

3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

DC: DL (With indicator light) Option Grommet G D DIN terminal 5 Base mounted 0 Manifold 4 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 5 9 24 VDC Construction Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body ported De-energized Base mounted

MLGC

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com BP Lock port for pressure lock (Plug with breathing hole for spring lock) Y + Stroke Z + Stroke AB AP V CNA CNS CLS CLQ MLGP WH (Max.)

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(800) 526-7661

Vacuum Equipment

When the atmospheric pressure is used as a reference, the pressure is presented by kPa (G), and when the absolute pressure is used as a reference, the pressure is represented by kPa.When referencing a piece of vacuum equipment such as an ejector, the pressure is generally represented by kPa.

AMR3000 to 6000

Rc NPT G Nil N F Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Construction Working principle The compressed air from the air source passes from the IN side through the top of element y and flows inward.

SFOD-OMT0009CN

600 700 800 600 700 800 [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] 10 5 20 12 6 () [mm/s] 17 9 33 20 10 () LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] 24 16 8 () [mm/s] 39 26 13 () 108 No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm

MXU

Maximum Load Weight (g) Weight (g) Cylinder stroke (mm) 5 Maximum load weight Model Model 10 15 20 25 30 MXU6 MXU10 MXU16 MXU6 MXU10 MXU16 100 66 72 81 88 97 103 200 115 124 138 147 166 174 400 216 215 251 250 285 300 8-3-3 4 Series MXU Allowable Moment Precautions Allowable moment (Nm) Correction value of moment center position distance (mm) Model Stroke Be sure to read before handling.

ZMA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc.

LX Series Compact Electric Actuators

l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

VHS20/30/40/50

G H F SMC P . U S Can be locked with a padlock in the exhaust condition. E C Padlock mounting position C D D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SUP SUP . A OUT IN A OUT IN 1 2 B 3 B EXH. EXH.

TM

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Model Applicable tubing size Applicable tubing material Color Weight Nylon, Soft nylon Polyurethane TG-1 Metric size 4, 6 1/8", 1/4" Blue 33 g TG-2 Inch size Red How to Use Caution Process 1.Tool edge should be pushed

AZ1000

Reference: Bureau of Industry and Security (USA) http://www.bis.doc.gov/ 1) 2B350.g.2 (1) Product name : Regulator, Diaphragm valve (2) Body material : Hastelloy (3) Connection size : 1/2 inch or more 2) 2B999.g (1) Product name : Regulator, Back pressure regulator, Diaphragm valve, Check valve, Vacuum generator module (integrated with valve

AMH

Nil Rc Thread type F G N NPT Accessory/Option Combinations Available Not available Depends on model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Option specifications C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable model Accessory (Option)

3 Port Air Operated Valve Series SYJA300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Port size Type of actuation Nil Without sub-plate VH Normally open Normally closed 2 1 M5 port with sub-plate M5 VHS How to Order Manifold Base Same manifolds as Series SYJ300 are prepared. SS3YJA3 Fill the same as SS3YJ3.

VPA4

Local Area: (800) 258-9200-www.stevenengineering.com VPA4270-14 Port size VR VPA4150-04 Port size Applicable valve model Note) 3 position is not available on Series VPA470.

Cylinder with Lock Series CLS

0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 125 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Gragh 7 Gragh 4 0.5MPaP 0.5MPaP 3000 3000 2000 2000 160 140 125 1000 1000 700 800 900 700 800 900 Load weight:

CNG

G Rear flange type U Front trunnion type Locking direction T Rear trunnion type D Both directions D Clevis type Brackets are packed together (not attached) when shipped.