Magnet: Built-in, Model: Stainless Steel, 14MPa, Mounting: FY [Front Rectangular Flange (for 14MPa)], Bore Size: 40mm, Rod Dimension: Series C Rod Size, Stroke: 100mm, Rod End Nut: None, Rod Boot: None, Cushion: w/Double Side Cushion, Port Location: Port: Top/Cushion Valve: Right, Auto Switch: F59--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire or Prewired Connector: 0.5m Cord Length, M12

Magnet: Built-in, Model: Stainless Steel, 14MPa, Mounting: FY [Front Rectangular Flange (for 14MPa)], Bore Size: 40mm, Rod Dimension: Series C Rod Size, Stroke: 200mm, Rod End Nut: w/Rod End Nut, Rod Boot: None, Cushion: w/Double Side Cushion, Port Location: Port: Top/Cushion Valve: Right, Auto Switch: J59--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewired Connector: 3m, Number: -

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15～14, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 25, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～60, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard:

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15～14, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 100, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～60, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard

Magnet: D (Built-in), Model: H (Stainless Steel, 14MPa), Mounting: FY [Front Rectangular Flange (for 14MPa)], Bore Size: 40mm, Rod Dimension: C (Series C Rod Size), Stroke: 250mm, Rod End Nut: A (w/Rod End Nut), Rod Boot: None, Cushion: w/Double Side Cushion, Port Location: A (Port: Right/Cushion Valve: Bottom)

Magnet: D (Built-in), Model: H (Stainless Steel, 14MPa), Mounting: FY [Front Rectangular Flange (for 14MPa)], Bore Size: 40mm, Rod Dimension: C (Series C Rod Size), Stroke: 100mm, Rod End Nut: None, Rod Boot: None, Cushion: w/Double Side Cushion, Port Location: Port: Top/Cushion Valve: Right, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector:

Magnet: D (Built-in), Model: H (Stainless Steel, 14MPa), Mounting: FY [Front Rectangular Flange (for 14MPa)], Bore Size: 40mm, Rod Dimension: C (Series C Rod Size), Stroke: 25mm, Rod End Nut: None, Rod Boot: None, Cushion: w/Double Side Cushion, Port Location: Port: Top/Cushion Valve: Right, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector:

AZ1000

Reference: Bureau of Industry and Security (USA) http://www.bis.doc.gov/ 1) 2B350.g.2 (1) Product name : Regulator, Diaphragm valve (2) Body material : Hastelloy (3) Connection size : 1/2 inch or more 2) 2B999.g (1) Product name : Regulator, Back pressure regulator, Diaphragm valve, Check valve, Vacuum generator module (integrated with valve

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S F S + m g S F S m g S Absorbed energy E E1 + E2 E1 + E2 E1 + E2 E1 + E2 Note 2) E 2 2 E 2 2 E 2 2 E 2 2 Equivalent mass Me Note 1) This is the momentary speed at which an object is impacting against a shock absorber.

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 0 5 g e n a 2 0 Note 1) r 7 +4 0 0 n Note 1) +4 0 o g n e 0 a ti r 1 0 Note 1) 8 n a 9 0 o 1 +4 0 t ti e o a e g Note 1) t R +4 0 n o g a R r n n ra 0 o 9 ti n a e t io o g R at n a ot r R n (90) (90) o ti a t o R Chamfer Chamfer (45) Chamfer (45) B port Chamfer Note 2) A port B port A port B port (40) B port A port A port * For size 40 actuators

CC

Rc 1/8 Pilot air port port (Stip valve side) RS H A Manual push button RZQ MI W S CEP1 CE1 CE2 Oil port size Rc Oil draining hole Rc 1/4 Throttle valve locking screw ML2B C J G5-S CV MVGQ (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL EA EB EL F H GA GB GL KA KB KL M CC CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G 186 64 86 88 53 121.8 98 151.5 35 18 35 104 45 86 45 83 60 3/8 1

3 Port Solenoid Valve Metal Seal Series VZ200 1

) 76 68.5 2-M5 x 0.8 (Pilot EXH) Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 22 2 43 54 3 59 70 4 75 86 5 91 102 6 107 118 7 123 134 8 139 150 9 155 166 10 171 182 Symbol L1 L2 4-15-8 9 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ200 Dimensions: Common Exhaust Individual: VV3Z2-50 (G) (L) (M) (D) With light/surge voltage suppressor With light/surge voltage

Shock Absorbers and Rate Controls

OEM 4.0Mxa and 4.OI\4X1ON4, Z dimension is 62 omm I @g,lc. Adjustable Hydraulic Series Accessories lmperial (UD UNIVERSAL RETAINING FI.ANGE . (SMAII BORE} UFM10 x t ) UF r/220 uF s/16 18 + UF I-72 [ ' Dtr_ C l' I j rIl l l T F I r H o .L 8 a.22 & _l -! g.3t g 1 R r I -1 .2( 20 F G (otolog llo.

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D-G

CLS

+ 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80 D-Y59/Y7P D-Y7W 115 115 110 105 15 RLQ 1, 2 MLU D-Y69/Y7PV D-Y7WV 100

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) (1) Rear flange Note1) Integral clevis Note1) Single clevis Note1) Note 3) Double clevis (1)Note2) Front trunnion (1)Note2) Rear trunnion (1) Boss-cut basic (1) Boss-cut flange (1) Boss-cut trunnion Note 1) Mounting nuts are not attached to the integral clevis, single clevis and double clevis types.

Bag Filter

T2 T1 I 8 x D FGD FGE H G FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

LEF-OM002xx

Weight Model LEFS16 Stroke(mm) 50 100 150 200 250 300 350 400 450 500 Weight(kg) 0.83 0.90 0.98 1.05 1.13 1.20 1.28 1.35 1.43 1.50 0.12 Additional weight for lock(kg) Model LEFS25 Stroke(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Weight(kg) 1.70 1.84 1.98 2.12 2.26 2.40 2.54 2.68 2.82 2.96 3.10 3.24 3.38 3.52 3.66 3.80 0.26 Additional weight for lock(kg) Model LEFS32

Table of Contents

Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

Mechanically Jointed Rodless Cylinder Series MY1

X Z Y m x g x X x m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) m is a mass movable by thrust.