ARM10/11

Material Description Description q w e r t y u i o !0 !

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

ARM10/11

Material Description Description q w e r t y u i o !0 !

air-filter-e

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.

Air Preparation Equipment

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.

HRX-OM-W002

Heating capacity [W] 600 600 Heating capacity [W] 40 40 32 32 25 25 400 400 5 5 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-12 Heating capacity (HRR012-A/W-20,HRR018-A/W-20) 9.5.3 HRR024-A/W-20,HRR030-A/W-20 Ambient temp. 800 800 or Ambient temp.

Ejector Valve Unit Series ZYY/ZYX 1

degrees 3 turns 200 degrees 3 turns 200 degrees 200 degrees 17 mA or less (When 24 VDC is ON) 25 mA or less (When 24 VDC is ON) 17 mA or less (When 24 VDC is ON) Current consumption 0.2 MPa Max. operating pressure Note 1) When using an ejector, there is no problem if pressure of 0.5 MPa is applied for 1 second or less.

LEKF-OMZ0035

C2 LECSC2-T 200 to 230 2 2 S2 LECSS2-T 200 to 240 5 5 N2 LECSN2-T 200 to 240 A 10 E2 LECSN2-T-E 200 to 240 92 LECSN2-T-9 200 to 240 I/O cable length P2 LECSN2-T-P 200 to 240 Nil Without cable H Without cable Connector only 1 1.5 [m] Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -9- AC servo motor LECY* series L E K F S

3 Position Cylinder Series RZQ

) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Rotary Table

On size 70, 100 and 200 the bearing cannot be removed as the bearing is press-fitted.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1

0.5

400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm

Electric Actuator / Slider Type 《 AC Servo Motor 》

(>1000 stroke) Stopper type home position return stopper time (msec) PT10 100 200 Stopper type home position return torque limit value (%) PT11 15 24 Regenerative option PA02 0 0 (Non)/0002 (LEC-MR-RB-032) Rotation direction selection *4 PA14 0 1 (+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 *1.

Electric Slide Table / High Precision Type 《 AC servo motor 》

to 230 200 to 240 200 to 230 200 to 240 200 to 240 200 to 240 200 to 240 200 to 240 A1 LECSA1-S A 10 A2 LECSA2-S * The length of the encoder, motor and lock B2 LECSB2T cables are the same.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

ZP

D E ZPY02U 2 4 6 8 Applicable tube O.D.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

No. 0..8 0 4..7 Parameter type 1 EX600-DX#D: 05 (Hex) EX600-DX#E: 14 (Hex) EX600-DX#F: 16 (Hex) 1 0..7 Unit ID Unit parameter 0 Monitor short circuit (power) 0: disable, 1: enable 1 Reserved 0 2 Inrush current filter 0: disable, 1: enable 2 3 Reserved 0 4..5 Input filtering time 0: 0.1 ms, 1: 1 ms, 2: 10 ms, 3: 20 ms 6..7 Input extension time 0: 1 ms, 1: 15 ms, 2: 100 ms, 3: 200 ms Channel

JXCx-OMT0028CN

200 mm/s mm/s USB 100 500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C