Bag Filter

E (When the valve is opened.) E (When the cover is lifted.)

MHZ2/MHZJ2

Cylinder bore MHZ2 D E X 7 Cylinder bore MHZ2 D E X46 Not available when equipped with dust cover/MHZJ2.

NAAMS Standards Compliant

Nh9 RW L LA0.1 LB PD0.05 PB0.02 E PC0.05 PA0.02 GB GA C 2 x 2 x P H7 depth D 2 x 2 x MM depth J 2 x 2 x NPT 1/4 G Rc Hexagon socket head plug RD B [mm] Bore size B C D E GA GB J L LA LB MM N P Rubber cover Metal cover 50 92 48 12 13.7 95 166 12 376.6 155.5 78.4 78.4 M8 x 1.25 19 8 63 110 54 15 16.6 99 171.5 12 391.6 161 78 78.4 M10 x 1.5 22 10 Bore size PA PB PC PD R RA RB RC RD RR W XB XC

REA/REB

0 e w #1 #3 !1 @0 i !7 @3 @1 @7 @2 @6 @5 #0 REAL10 Parts list Parts list Note No. Description No.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

PFxx-OMK0003CN

PF-OMK0003CN-E / 1 1.5 *3) 1 1 [] -3No. PF-OMK0003CN-E () () -4No. PF-OMK0003CN-E () * ,UL UL1310 2 UL15852 30[Vrms] (42.4[V ])(2 ) UL JIS B 8392-1 1.1.21.6.2 -5No. PF-OMK0003CN-E * (1 /) FG 49N ) 1 () -6No. PF-OMK0003CN-E *() 6 33 2 () () 10m DC(-)() () -7No. PF-OMK0003CN-E * ( ) () CE 050 -8No. PF-OMK0003CN-E * 523 * -9No. PF-OMK0003CN-E (11 ) -10No.

JXCx-OMU0004

P.50 6 * 8 e PLC PLC 9.

JXCx-OMT0061CN

<> <> ON(SVON ON) 1-193 E <>ON SVON ON <> 1-194 E <> <> 1-195 E <> <> 1-196 E <> 75 - <>EEPROM 1-197 E <> EEPROM 10 <>CPU CPU CPU 1-198 CPU E <> <>CC-Link WDT CC-Link (01-206) CC-Link WDT E <> *1 (RWr)code"01-***""*** 10.1.2 (RWr RWw)(P.38) 76 - 17.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

MXQ

2 e !3 !5 MX MTS t !6 r u y w !

ZR

Example) ZR100-K15MZ-E . 1 ZR1-RV3 . 1 13-3-37 37 Series ZR Valve Unit: ZR1-V Specifications ZR1-V Valve unit part no.

NCRBIBwserbs

P(D Appendix e/How to caculate a rnomenl of ineriia .e@ Difilensions ..,,.,.,.,,.,.,,.,.,., C6 with Auto switch.-. e@ Auto Swilch DiagramgRolatron Into. ..

0.4

Note 2) A combination of Function N (Negative common) and E is unavailable. Since E has no polarity, it can also be used as a negative common.

XLAQ/XLDQ

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17

MVGQ

CC MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions RB A A E E Symbol Symbol DB DB Bore size (mm) Bore size (mm) Stroke Stroke J Up to 50 st Over 50 st 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st 12 12 39 0 8 43 4 16 6 55 D16 16 43 0 10 49 6 22 8 65 20 20 0 14.5 12 10 57 47 61.5 27 10 74 -X 20Data 10-16-7 8 Valve Mounted

MB

6. 6-6-19 19 Series MBW With Mounting Bracket Basic: (B) 2-P G MM MM G VW Cushion valve Port E D D e A K F N MA MB Effective thread Effective thread 2 x 4-J C 13 B N F A K f 9 l S + Stroke H H + Stroke h ZZ + 2 Stroke 2-RcP G G MM MM With rod boot D e e Effective thread Effective thread Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Thermo-con/Rack Mount Type

A C B Applicable model Dimensions [mm] A B C HECR002-A5-E 14 230 35 HECR004-A5-E 45 HECR006-A5-E HECR008-A5-E 44 HECR010-A2-E HECR008-W5-E 46 HECR012-W2-E 310 13 400 15 Option symbol F With Flow Switch F HECR Applicable model HECR002-A5-F HECR004-A5-F HECR006-A5-F HECR008-A5-F HECR010-A2-F HECR008-W5-F HECR012-W2-F With flow switch This is an ON/OFF switch detecting low levels of the circulating

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 1.5 2 x M4 DIN rail clamp screw 9 e d i s U e d i s D n 8 7 6 5 4 3 2 Stations 1 9 60 37 26 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 8 For top ported 4 4 4 4 4 4 4 4 3 R 7.5 13.1 29.6 (49.4) P 1 2 2 2 2 2 2 2 2 81.5 66.9 P=11.5 One-touch fitting, thread piping

Series AK1000

Refer to gauge guide (P.94,95). 2P 3P t r t Sample Order Number Port t AK1510S e q 4 4 4 4 w 4 4 4 4 r w w q q 2P 3P 4PL 5PC MPA MPA MPA 1 1 1 0 0 40 e e 4PL 5PC qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) Specifications AK1502 1 to 30 psig (0.007 to 0.2 MPa) AK1515 5 to 150 psig (0.034 to 1.0 MPa) Select compatible materials of construction for the gas AK1506

JXCx-OMT0001CN

<> <> ON(SVON ON) Unable to find motor phase in set time. (1-193) E <> ON SVON ON <> Output current limit exceeded E <> set value (1-194) <> Current sensor abnormality has occurred. (1-195) E <> <> Position error overflowed (1-196) E <> <> EEPROM Memory abnormality has occurred (1-197) E <> EEPROM 10 <> CPU CPU CPU error (1-198) E <> -93No.JXC-OMT0001CN-C 14. / A () 50mm