Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MI-A0802-8 MI-A1202-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MI-A0803-8 MI-A1203-12 MI-A2003-20 MI-A2503-25 MI-A3203-32 MIW-A0804 MIW-A1204 MIW-A2004 MIW-A2504 MIW-A3204 MIW8-PS MIW12-PS MIW20-PS MIW25-PS MIW32-PS MH-G01 (contents quantity 30 g) !4, !5, !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

412 241 161 OUT 563 482 402 322 804 32 12 CE2 207 138 IN 484 415 346 276 691 Weight Standard Stroke ML2B Unit: g Double finger type: MIW C J G5-S (mm) Increase by stroke adjuster Stroke (mm) Weight (g) Increase by scraper Bore size Stroke Model Model CV 8 12 20 25 32 8 mm 3 6 110 8 MIW8-8D 12 mm MVGQ 20 mm 5 10 240 12 MIW12-12D 25 mm 10 30 650 20 MIW20-20D MIW CC 32 mm 20 30 1550 25 MIS25

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Series MXQ 13226, 8, 12, 16, 20, 25 Air Slide Table RoHS How to Order Port thread type Bore size Symbol Type 6 to 16 M thread Nil Clean series 20, 25 Rc 13 Vacuum suction type (Special treatment on guide) TN 20, 25 NPT TF 20, 25 G MXQ 12 13 50 M9N MXQ 12 22 50 M9N Number of auto switches Copper, fluorine and silicone-free + Low particle generation Nil 2 pcs.

Series VQ Metal Seal/Rubber Seal Body Ported

) 12 or less 15 or less Single Rubber seal VQ1141 6.3 (0.35) 15 or less 20 or less Metal seal VQ1240 4.5 (0.25) 12 or less 15 or less Double (latching) Rubber seal VQ1241 6.3 (0.35) 15 or less 20 or less Metal seal VQ1340 4.5 (0.25) 20 or less 26 or less Closed center 57 VQ1000 Rubber seal VQ1341 6.3 (0.35) 25 or less 33 or less Metal seal VQ1440 4.5 (0.25) 20 or less 26 or less Exhaust center

1

NCM Series CG1 Series CQ2 CQS NCA Bore size (mm) With rubber bumper With air cushion Standard type Bore size (mm) G G Th9 Th9 Rod side Head side Rod side Head side D0 0.043 0 0.043 1.5 12 1.5 15 15 20 (2.1) 5 4 3 3 0 0.052 0 0.052 16 1.5 1.5 20 20 25 (2.5) 5 4.5 3.5 3.5 -X 0 0.043 0 0.043 20 2 2 13 13 32 (3.3) 6 5 6 5 0 0.043 0 0.052 0 0.043 25 2 2 15 15 40 (3.9) 7 5 7 5 2032 2 21 50 (4.5

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

144 32 20 to 110 97.5 13 115 to 190 116.5 195 to 300 134 [mm] LEYGlM, LEYGlL Common Size Stroke range [mm] A B C DA EA EB EH EV FA FB FC G GA H J K M NA NB NC 15 to 35 141.5 116 50 20 46 85 103 52.3 11 14.5 12.5 5.4 40.3 98.8 30.8 29 34 M5 x 0.8 8 6.5 40 to 100 67.5 105 to 120 166.5 141 125 to 200 84.5 205 to 300 102 25 20 to 35 160.5 130 55 25 60 101 123 63.8 12 18.5 16.5 5.4 50.3 125.3

0.5

to 65C Ambient humidity Operating, Stored: 5 to 95%RH (No condensation) Weight 375 g (including AC cord, connector) IZF21 IZF31 Body 430 g 605 g Bracket 146 g 220 g Automatic cleaning unit 96 g 127 g Louver 33 g 58 g Filter 15 g 26 g Applicable standard/directive CE/cUL Functions and Indications No.

IDG

10 0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point ( C) 14-19-10 7 Membrane Air Dryer Series IDG Calculation of inlet air flow rate Q1, and confirmation of compressed air supply capacity.

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

SZ3000

D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V The above is the

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

---M5 SYJ522M---M5 A port M5 x 0.8 Type 20 SS3YJ5--20-05 -Stations Bracket P, R port thread type + + + + Nil Nil 02 : 20 Rc G NPT NPTF 2 stations : 20 stations Without bracket Applicable blanking plate assembly SYJ500-10-1A R P 00F 00N 00T With bracket F P port 1/8 R port 1/8 Note) For more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Electromagnetic Digital Flow Switch

(with no condensation) Standards and regulations CE marking, RoHS Fluid contact materials PPS, FKM, Brass Port size 3/8 (10A) 1/2 (15A) 3/4 (20A) 1 (25A) Weight (Body)*4 Approx. 335 g Approx. 395 g Approx. 515 g Approx. 675 g *1 Refer to the Applicable Fluids List on p. 20. *2 When fluids with high temperature are used, the available pressure range will be reduced.

1

(CM2) 32 350 g 188 g 46% 40 720 g 378 g 48% Refer to page 15 for details. 2 Air Cylinder Double Acting, Single Rod JCM Series 20, 25, 32, 40 RoHS How to Order BZ 20 100 JCM Without auto switch BZ 20 100 M9BW JCDM With auto switch With auto switch (Built-in magnet) Number of auto switches Nil 2 S 1 n n Mounting Basic (Female thread on rod cover) Auto switch Bore size BZ Nil Without auto switch

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

87 g (G1/4: 132 g) Flow adjustment valve +34 g Lead wire +35 g Bracket +20 g Panel mount adapter +15 g DIN rail mounting bracket +65 g Weight 11 2-Color Display Digital Flow Switch PF2M7(-L) Series *1 Refer to the Recommended pneumatic circuit examples on page 2. *2 When using the accumulated value hold function, use the operating conditions to calculate the product life, and do not exceed

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

D G 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ G D 0V 24V G D 0V 24V G D 0V 24V G D 0V 24V Transmission line Transmission line Black White Brown Blue Crimped connector SL-J1A Main transmission line Transmission line 24V 0V Power supply{ 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ Special

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

20 37.4 66.5 20 16 20 (38) VQ4 The broken line indicate DIN rail mounted style [-D].

MVGQ

solenoid with grommet (G).

CJ5-S

5.5 M18 x 1.5 55 1/4 109 176 63 Up to 600 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 176 80 RS Q G Up to 750 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 210 100 Up to 750 110 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 131 212 Flange bracket and plug bolt are installed when shipped

CJ5-S

x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 130 201 100 Up to 1500 110 40 37 41 19 M12 x 1.75 24 60 30 38 3 29 20 71 16 M12 x 1.75 depth 23 10 26 8 M26 x 1.5 100 1/2 131 202 RS H A