freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes in response to flow rate), and other error indicator12 to 24 VDC p10%

freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes in response to flow rate), and other error indicator12 to 24 VDC p10%

freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes in response to flow rate), and other error indicator12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%

PFxx-OMO0004CN

62No.PF-OMO0004CN-E IN (58 ) 1 () GND 30msec. 2 1 1 2 -63No.PF-OMO0004CN-E -5% OUT1 (OUT1)80 mA , OUT2 (OUT2)80 mA OFF () () (( 1 )(57 ) () () -64No.PF-OMO0004CN-E PFMB7201 N2 (JISB8392-1 1.1.21.6.2 1) ISO8573-1 1.1.21.6.2 050 2200 L/min 2210 L/min 0999,999,999 L 1 L/min 1 L (50 msec.) 1 L/pulse 2 2 5 00.75 MPa 1.0 MPa 3 5F.S.(00.75 MPa0.35 MPa ) DC1224 V10 P-P10

PFxx-OMP0001CN

OUT1)80 mA OFF, OUT1 (OUT2)80 mA OUT2 OFF () () (( 1 )(54 ) () () -61No.PF-OMP0001CN-F PFMB7501 PFMB7102 PFMB7202 N2 (JISB8392-1 1.1.21.6.2 1) ISO8573-1 1.1.21.6.2 050 5500 L/mim 101000 L/mim 202000 L/mim 5525 L/mim 101050 L/mim 202100 L/mim 0999,999,990 L 1 L/min 10 L (50 msec.) 1 L/pulse 10 L/pulse 2 2 5 00.8MPa 1.2MPa 3 5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10

PFxx-OMS0001CN

-5% (OUT1)80 mA OFF, OUT1 (OUT2)80 mA OUT2 OFF () (( 1)(58) () () () -65No.PF-OMS0001CN-A PFMC7501 PFMC7102 PFMC7202 N2 (JISB8392-1 1.1.21.6.2 ISO8573-1 1.1.21.6.2) 050 5500 L/min 101000 L/min 202000 L/min 5525 L/min 101050 L/min 202100 L/min 0999,999,990 L 1 L/min 10 L (50 msec.) 1 L/pulse 10 L/pulse 1 2 5 00.8MPa 1.2MPa 2 5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10

LV20-OMY0005

No.LV20***-OMY0005 / / / / / / / / LVA/LVC 1 P2 2 P34 3LVC P56 4LVC () P7 5LVA P89 6LVA () P10 7 P11 8 P12 9 P13 1 2 3 4 5 6 7 8 9 10 11 12 13 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020

High Vacuum L Type Valve

Valve size Valve size Material 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 (3) Standard B2401-P8V B2401-P10V Special B2401-P8 B2401-P10 Note 1) Add the seal material symbol shown on page 8 at the end of the model number (in place of ).

XL-OMY0003

A6063SUS316LSUS304 FKM 245250Hz 30m/s /H4 H5 , 510% 4 XL-OMY0003 O 0.1mm0.2mm O 5 P9 O 6 P10 P13 5 XL-OMY0003 2.2 16 25 40 50 (5150) XLH16-30-1 XLH25-30-1 XLH40-30-1 XLH50-30-1 1FKM:No.1349-80 XLH16-30-1-XN1 / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15