Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Applicable solenoid valves: Type 10-SYJ312M Type 10-SYJ322M (10-SYJ300 3 port valve) (10-SYJ300 3 port valve) w 10-SS5YJ3-31/-S31, 10-SS5YJ3-32/-S32, 10-SS5YJ3-46/-S46, 10-SS5YJ3-32P The 3 port valve can be used without modification. The A port of the valve will flow out of the B port of the manifold.

Environment

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 14 Lead B Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A 8 Lead A 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 700 800 Speed: V [mm/s] Speed: V [mm/s] LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead B 25 15 Work load: W [kg] Work load: W [kg] Lead B 20 10 15 Lead A Lead A 10 5 Lead H Lead H 5 0 0 0 100 200

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 0 2 W 1 10 VQ2000 2 Series CE compliant Circular connector kit with cable (3 m) CE compliant Nil Q Function 10-VV5Q21-09C6M2-W 10-VQ2100-51 10-VQ2200-51 10-VQ2300-51 VVQ2000-10A-1 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 3 setsValve part no. (Stations 4 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 0 2 W 1 10 VQ2000 2 Series CE compliant Circular connector kit with cable (3 m) CE compliant Nil Q Function 10-VV5Q21-09C6M2-W 10-VQ2100-51 10-VQ2200-51 10-VQ2300-51 VVQ2000-10A-1 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 3 setsValve part no. (Stations 4 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Hydraulic

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C D d F G GA GB J K M MA MM NA NB P Q R S T V W E 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 17 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 13 20 M14 x 1.5 30 22 1/4 5 37 106

Aluminum High Vacuum Angle Valve

) 1.3 x 10-8 Nil A B C None w, e w e DSeal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

5

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

SQ1000/2000

1 Port plugs> CP VVQZ3000 w e r t

CRQ2

shaft Reversed shaft W W W W 10, 15 20, 30, 40 10, 15 W W W W W W 10, 15, 20, 30, 40 10, 15, 20, 30, 40 10, 15 Stepped round shaft with double-sided chamfer W W 10, 15 Stepped round shaft with double-sided chamfer Right-angle chamfer Double key 20, 30, 40 Combination Chart of Made to Order Chart 2.

ZP3

to 16 w q ZP3 B N 10 9 Model A B C q Pad dia.

MY1

W MY1H32 MY1H32 MY1H32 20 (500) MY1H25 MY1H25 MY1H25 l l MY1H16 MY1H16 MY1H16 MY1H20 (450) 10 (100) MY1H10 MY1H10 0 500 1000 1500 Support spacing (l ) (mm) 8-11-84 81 Series MY1H Mechanically Jointed Rodless Cylinder High Precision Guide Type Construction: 10 Centralized piping type @9 @5 !8 o i !6 !1 r @2 y u !7 t !4 !9 w MX MTS !

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Best Pneumatics Vol. 14

Model Description AC10B G27-10-R1 G27-10-R1 (3) AD17 Y100 AC25B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC30B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC40B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC40B-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC50B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC55B G46-10-02 GC3-10AS G46-2-02 GC3-2AS

Fluoropolymer Piping Equipment

Connection threads R/NPT A A E E H L L M W N Min. port size W LVA M N LQ3H11-M 4 1/8" 29.5 28.5 10 9 11 33.5 32.5 14 10 4 2.5 LQ3H12-M 3 2 LQ3H21-M 6 1/8" 39.5 38.5 17 16 16 43.5 42.5 20 14 4 4 LQ3H22-M 1/4" 37.5 36.5 6 LQ3H31-M 10 1/8" 51 48 LVH (E, E) Port size R (NPT) LVD LVQ 4.4 4.4 LQ3H32-M 8 LQ3H33-M 10 1/4" 49 46 6.4 6.4 LQ3H34-M 8 LQ3H35-M 10 3/8" 48.5 45.5 10 7.5 LQ3H36-M 8 10 6.4

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

In the case of w/ One-touch fitting, the 5 mm stroke with 32 bore is the same external dimensions as 10 mm stroke.

MY1

(max. 38) W 58 58 70 88 104 128 152 h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 FC 14 14 13 17 17 26 31 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8 5.8 6.5 8.5 10 14 14 EB 30 32 38 50 57 66 77 EA 7 10 12 14 17 20 26 E 14.6 20 24 29 35 40 52 Model MY1C16 MY1C20 MY1C25 MY1C32 MY1C40 MY1C50 MY1C63 Low load shock absorber + Adjusting bolt MY1C Bore size Stroke L TT h h h E F EA EB W F For MY1C16, 20 Stroke adjusting

42

2 Valve + Restrictor spacer (VVQ5000-20A-1 5) q AXT632-25-5 (M4 x 82) 4 q w w AXT632-25-10 (M4 x 34) 2 Not necessary when mounting the sub-plate.