Integrated Controller

Lead 20: EQY25H 100 Min. 25% Max. 50% 10 20 30 40 50 90 70 80 60 0 Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 Pushing force set value [%] Ambient temperature Pushing force set value [%] Duty ratio [%] Continuous pushing time [min] 40C or less 50 or less 100 Pushing force 45% 50% 70% 42 Battery-less Absolute (Step Motor 24 VDC) Easy to

RZQ

J C A B DFull stroke -X 20Data eEntire stroke extension by pressurizing A, B and C ports. 10-10-1 2 3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A M9N Mounting style Number of auto switches A B L F G D Nil Both ends tapped 2 pcs.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Vacuum Pad

Stroke (M) Buffer specification Symbol Stroke 20, 25 35, 50 10 10 mm V V 20 20 mm V V J Rotating K Non-rotating Specifications Pad diameter Buffer specification Stroke [mm] Tightening torque [Nm] Mounting Spring reactive force [N] At 0 stroke At full stroke 20, 25 J/K 10, 20 2.5 to 3.5 M10 x 1 1.0 3.0 35, 50 J/K 10, 20 6.5 to 7.5 M14 x 1 2.0 5.0 Precautions Be sure to read this before handling

240

Dimensions [mm] Model L1 L2 A B C D E F G J K LEPS10-25 138 152.5 61.8 20 22 30 29 20 29 39 88.2 LEPS10-50 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10L-25 124 138.5 47.8 20 22 30 29 20 29 39 88.2 LEPS10L-50 149 163.5 24 43 34 50 24 50 60 113.2 394 LEPY/LEPS Series Specific Product Precautions 1 Be sure to read this before handling the products.

•

GTa disassemble, hold the spanner flats of the tube COver in a vice 40 20 9,43 37,7 47.2 56,6 IN 28,3 and by holding the rod cover spanner flats with a spanner, 98,2 OUT 19,63 58,9 78.5 117.8 20 SEt IN 16,49 49,5 66.0 82.5 99.0 unscrew anti-clockwise to remove the cover.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

16 47 125 15 340 1/2 77 140 12 20 16 55 160 20 375 3/4 94 159 12 24 20 60 109 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Front flange type: CHAWF Width across flats G 4-FD 4-J 2-Rc P T T V V Cushion adjustment screw MM Width across flats G GA Air release GA M MM R (max.) d d W W D E E D FY B C MA a a FT MA B F NA NA F K A A K H + Stroke S + Stroke

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

144 32 20 to 110 97.5 13 115 to 190 116.5 195 to 300 134 [mm] LEYGlM, LEYGlL Common Size Stroke range [mm] A B C DA EA EB EH EV FA FB FC G GA H J K M NA NB NC 15 to 35 141.5 116 50 20 46 85 103 52.3 11 14.5 12.5 5.4 40.3 98.8 30.8 29 34 M5 x 0.8 8 6.5 40 to 100 67.5 105 to 120 166.5 141 125 to 200 84.5 205 to 300 102 25 20 to 35 160.5 130 55 25 60 101 123 63.8 12 18.5 16.5 5.4 50.3 125.3

CXS

Kit components CXSL 6PS CXSL 10 B PS CXSL 15 A PS CXSL 20 A PS CXSL 25 A PS CXSL 32 A PS Chromium steel Nickel plated 6 10 15 20 25 32 15 Nickel plated Special steel Synthetic resin 16 17 Items 22 through 24 from the chart above Note 1) Anodized aluminum alloy for CXSL6.

energy saving effect

Applicable model -A -W HRSH100--20-S HRSH150--20-S HRSH200--20-S HRSH250--20-S HRSH300-A-20-S HEB HED HEA IDH 179 HRSH Series Optional Accessories q Piping Conversion Fitting This is a fitting to change the port from Rc to G or NPT.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7

CHKD/CHKG

8 x L counter bore J J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6

Thermo-chiller

Filter Rc3/8 20 m V V 5 Flow meter Rc1 V Prepare a flow meter with an appropriate flow range.

MY1

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 16 20 20 16 20 Mounting position Mounting position 16 A 70 90 93 73 94 A A 74 B 90 110 107 87 106 B B 86 Operating range Note) 11 7.5 6.5 8.5 6.5 Operating range

Thermo-chiller

x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20 A> 4.

MY1

.20) 88 104 4.5 6 -X 35 57 10 83 12 17 67.3 9 (Max.25) 4.5 6 RB2015 40 66 14 106 128 152 15 20 73.2 13 (Max.33) 6 5.5 Technical Data RB2015 52 77 14 129 15 26 73.2 13 (Max.38) 6 5.5 1357 MY1W Series Side Support Side support A MY-SA 2 x G 2 x H E E F A B C D Side support B MY-SB 2 x J 2 x H C D A B A B C D E F G H J Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model

Rotary Table/

, 30, 50, 70, 100, 200 How to Order Size 10 20 30 50 High Precision Type A F9B MSQ A 10 MSQ B 10 A F9B Basic Type Number of auto switch 2 pcs. 1 pc. n pcs.

Magnetically Coupled Rodless Cylinder

Note 2) Use series CY1B if the stroke exceeds 1500 mm with a tube inside diameter of 20 mm.

HRS100/150

HRS 100/150 HRS 100/150 Applicable model Dimension [mm] A B C HRS100/150-A-20/40-A 830 302 1552 HRS100/150-W-20/40-A 570 401 1353 C HRSH 090 HRSH 118 HRSE A B Option symbol With Earth Leakage Breaker B HRZ HRZD HRS 20 B With earth leakage breaker HRW A leakage breaker is built in to automatically stop the supply power when it has short-circuit, over current or electrical leakage.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

2 x M5 x 0.8 (Vacuum port) 6.5 12 12 11 10 10 1 24 14 S O 20 46 24 30 K 15 (70) 10 24 24 12.5 4 12.5 4 10 30 When open F 17 17 54 4 x M6 x 1 through (Thread for mounting attachment) When open G (mm) J 32 68 88 H 176 276 316 G 138 238 278 F 98 158 178 E 38 80 100 D 87 129 149 B C 58 100 120 A MHL2-20D MHL2-20D1 MHL2-20D2 112211221122136 211 251 54 96 116 MHL2-25D 1122D A B C 12.5 +0.030 4H9