SMC Corporation of America
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Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Tie-rod base SS5V W 1 A1W D 05 U 10S Cassette base U SS5V W D 05 16S 1 A1W Enclosure IP67 Series DIN rail length specified 1 2 SV1000 SV2000 Standard length Nil 3 SI unit specification Specify a rail longer than the standard length.

Dimensions (mm) Electrical entry Z J E H C G A B D Model Grommet Conduit DIN terminal Conduit terminal Y N X W V U T S R Q VV2CL2 56 34.5 4.5 17.3 24.5 38 49 20 28 77 66 99 41.5 58 46 43.5 44 45.5 22 VV2CL3 66 38.5 5.5 19.3 28.5 42 57 25.5 30 86.5 68 101 51 60 48 53 45.5 55 24 VV2CL4 74 41.5 5.5 20.8 28.5 42 57 25.5 30 94 70 103 58.5 62 50 60.5 47.5 62.5 26 17-2-37

2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E -9No.PS-OMU0008CN-D / A ZS-46-A1 38L(2 ) C ZS-46-E 310L(2 ) ZS-46-B ZS-35-B ZS-46-D + ZS-35-E ZS-46-5F 5 2 m ZS-27-01 ZS-35-01 -10No.PS-OMU0008CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -11No.PS-OMU0008CN-D digit

W L In case the product is installed on the ceiling, regard the mounting bolt pitch as L. W L Mounting hole W Intermediate support mounting hole L L Distance between Load and Supports Mounting hole 140 130 25 120 110 100 90 4. When a 25 mm adjustment bolt is selected, the mounting holes will be hidden behind it. Adjust the adjustment bolt after the cylinder is installed. According to 2.

16 20 25 32 36 46 60 70 16 20 25 32 36 46 16 20 25 32 36 46 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 6.4 120 155 4 x M12 x 1.75 28 0 219 62

W L In case the product is installed on the ceiling, regard the mounting bolt pitch as L. W L Mounting hole W Intermediate support mounting hole L L Distance between Load and Supports Mounting hole 140 130 25 120 CY3B CY3R 110 100 CY1S 90 4. When a 25 mm adjustment bolt is selected, the mounting holes will be hidden behind it. Adjust the adjustment bolt after the cylinder is installed.

If there is vibration, impact, etc. at long stroke, we recommend adoption of side support even if it is within the allowable value shown in the graph. (1500) 400 W L Load W ML2B32 ML2B32 W (1200) 300 ML2B25 ML2B25 L L 200 100 0 1000 2000 Support spacing L (mm) 718 ML2B Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at Stroke End) Operating Range (mm) Auto switch

Refer to p.0-44 to 0-46 for common precautions of auto switch.

(41) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2

M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2 LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OMU0005CN-C digit() 1digit=1kPa 1,2,3,,99,100 1kPa F.S.() -0.100 1.000[MPa]F.S.=1.000(-0.100)=1.100

Standard Products IDFAE Series Air flow capacity (m3/h [ANR]) Outlet air pressure dew point Rated inlet condition Page Model Refrigerant Port size 3C 7C 10C IDFA3E 12 15 17 Rc 3/8 IDFA4E 24 31 34 Rc 1/2 IDFA6E 36 46 50 P. 92 to 94 R134a (HFC) IDFA8E 65 83 91 Rc 3/4 IDFA11E 80 101 112 35C 0.7 MPa IDFA15E1 120 152 168 Rc 1 IDFA22E 182 231 254 R 1 IDFA37E R 11/2 273 347 382 P. 95 to 97 R407C

Easy manual unlocking Locking direction can be selected Extension locking Retraction locking W Flat head screw driver W Compact type Extension of the overall length dimension is minimized by the compact lock unit. Body length is the same as the compact cylinder with lock series MGP.

Operation . 44 11.1 Return to origin position . 44 11.2 Positioning operation . 46 11.3.

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

.4 How to Order . 4-5 Technical Specifications . 6, 13 Dimensions (Cylinders). 9-12, 15-17 (Mounting Accessories) .18 Auto Switches .19-22 Guide Units.23-25 Safety Instructions.30-34 Main Index.35 1.8-3 Series CP95 ISO/VDMA Air Cylinders Specifications Type Model Bore Stroke end Rod specifications cushioning Upon receipt of order as standard Standard type 32 40 50 63 80 100 hard chromed W

Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Component Parts Material ADC NBR PBT Stainless steel PBT PBT No. q w e r t y Description Attachment Seal Spacer Mesh Body Sensor Flow direction Operating Unit Descriptions Connectors Connectors shown below are applicable (female contact).