Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Spring return Model C Mounting bolt D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 Model C Mounting bolt D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 CDQ2B12-5S -10S CDQ2B16-5S -10S CDQ2B20-5S -10S CDQ2B25-5S -10S CDQ2B32-5S -10S CDQ2B40-5S -10S CDQ2B50-10S -20S CDQ2B12-5T -10T CDQ2B16-5T -10T CDQ2B20-5T -10T CDQ2B25-5T -10T CDQ2B32-5T -10T CDQ2B40-5T -10T CDQ2B50-10T -20T M3 x 35l x 40l M3 x

LJ1H

K-F-X60 LJ1H202NAStroke K-F-X60 Without motor Specifications Combinations other than the above cannot be manufactured.

Possible to transfer a workpiece at low-speed.

Change of double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination

XL

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

High Vacuum Angle Valve, XL Series

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

MXQ

-10 MXQ8-20 MXQ8-30 0.03 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 MXQ8-50 MXQ8-40 MXQ8-50 MXQ8-50 MXQ8-40 MXQ8-40 MXQ8-20 MXQ8-20 MXQ8-20 0.010 MXQ8-30 MXQ8-30 MXQ8-40 MXQ8-40 MXQ8-30 MXQ8-40 MXQ8-75 MXQ8-75 MXQ8-75 0.02 MXQ8-75 MXQ8-75 MXQ8-75 0.04 MXQ8-20 MXQ8-40 MXQ8-20 MXQ8-20 MXQ8-40 MXQ8-40 MXQ8-10 MXQ8-10 MXQ8-10 MXQ8-30 0.005

Air Cylinder

(mm) Bore size Stroke range A AL B1 C D E F GA H H1 I J K KA Standard Long stroke 20 Up to 200 201 to 1500 18 15.5 13 14 8 12 2 12 35 5 26 M4 x 0.7 depth 7 5 6 25 Up to 300 301 to 1500 22 19.5 17 16.5 10 14 2 12.5 40 6 31 M5 x 0.8 depth 7.5 5.5 8 32 Up to 300 301 to 1500 22 19.5 17 20 12 18 2 12 40 6 38 M5 x 0.8 depth 8 5.5 10 40 Up to 300 301 to 1500 30 27 19 26 16 25 2 13 50 8 47 M6 x 1

TABLE OF CONTENTS

(G or L) LW53KK8XGB (G or L) 215 215 135 70 55 120 120 10 55 85 70 55 50 50 35 135 120 50 35 30 70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564

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40 50 50 55 55 65 85 , Misc.

Modular Type Filter Regulator Series AW

(K) to 40(K) AW30(K), 40(K) AW20(K) AW30(K), 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) Symbol 1 Note 4) 2 6 8 C J Note 5) N R W Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40), and the exhaust port for auto drain comes with 3/8" One-touch fitting (applicable to AW30 to 40).

CQ2

Spring return Spring extend C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Mounting bolt M3 X 35 l X 40 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 60 l Mounting bolt M3 X 40 l X 45 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 65 l Model

CV/MVGQ

CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11 11 13 16 14 18 18 22 26 19.4 16.4 18.4 21.4 21.4

CV/MVGQ

AL Z TD TT H1 TX H MM TY B2 D HX A B1 Eh8 F I K NA NN TZ N 8 10 32 41 32 8 18 13 5 52 15.5 13 26 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 36 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 9 10 40 45 40 10 22 13 5.5 60 19.5 17 32 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 40 9 10 40 45 40 12 22 13 5.5 60 19.5 17 32 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 40 10 11 53 50 53 14 24 16 7 77 21 22 41 8 76 46.5

AC

Model Port size M B B A B C D P E F G H J K L 8, 1 4 1 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 AFD2000 AFD3000 AFD4000 AFD4000-06 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFD2000 AFD3000 SAC2000, #1 SAC2503, #1 AFD4000 AFD4000-06 SAC4000, #1 SAC4006,

MXS

ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 KA NA 2 2 2 2 2 4 4 4 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16

MHZ

(4 locations) (Except 10) E D1 B D2 Model A End boss assembly 0.016 0.043 MHZJ2-10S C K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

MHZ

(4 locations) (Except 10) E D1 B D2 Model A End boss assembly 0.016 0.043 MHZJ2-10S C K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

Table of Contents

1 k Load OUT1 (Black) OUT2 (White) 12 to 24 VDC 12 to 24 VDC Load Load DC () (Blue) DC () (Blue) ZSE40(F) ISE40--30(L)-(M) With auto shift input ZSE40(F) ISE40--70(L)-(M) With auto shift input DC (+) (Brown) Auto shift input (Gray) OUT1 (Black) OUT2 (White) DC (+) (Brown) Auto shift input (Gray) 1.2 k 1.2 k Load 6.8 k 6.8 k Main circuit Main circuit Load OUT1 (Black) OUT2 (White) 12 to 24

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or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.