7

VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 98.5 (106.5) 192.5 (200.5)

REC

15.5 34 13 26 8 13 4 60 75 10 41 20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NA NN P S Z ZZ H1 H2 I K MM N RZQ Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

are vertical upward mounting with a speed of 500 mm/s, use graph (2).

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.

OMU0023

Step Data setting Note 2, 3) 06h / 10h Setting of a single or all Step Data parameter(s) Direct Operation Step Data reading 03h Reading of Direct Operation Step Data parameters. Direct Operation Step Data setting 06h / 10h Setting of a single or all Direct Operation Step Data parameter(s).

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M RHC Boss-cut MK(2) RS Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

(800) 258-9200-www.stevenengineering.com 20 25 32 40 0.02 RHC 50 63 80 100 0.01 MK(2) 0 0 10 20 30 40 60 50 70 80 90 100 RS Q G Bore size mm RS H A (Measurement based on JIS B8377) RZQ MI W S CEP1 Stable operation possible even at a low speed of 5 mm/s (Measurement based on JIS B 8377) Sliding resistance Bi-directional low-friction operation possible.

Digital Flow Switch

(Default setting: 0 s) 0.00 s 0.05 to 0.1 s (increment of 0.01 s) 0.1 to 1.0 s (increment of 0.1 s) 1 to 10 s (increment of 1 s) 20 s 30 s 40 s 50 s 60 s Setting of security code The user can select whether a security code must be entered to release the key lock. At a time of shipment from the factory, it is set such that a security code is not required.

o

,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03 (51.5) Stations 7 8 10 ']l 12 't3 14 15 16 17 1a 't9 20 L1 1.40 1.41 (46) (56.512.64 (67) 3.O5 3.46 (77.5) (88) 3.84 (e8.5) 4.29 (109) 4.70 (119.5) 5.12 h30) 5.53 (140.s) 5.94 6.36 (15r) (161.s) \

o

,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03 (51.5) Stations 7 8 10 ']l 12 't3 14 15 16 17 1a 't9 20 L1 1.40 1.41 (46) (56.512.64 (67) 3.O5 3.46 (77.5) (88) 3.84 (e8.5) 4.29 (109) 4.70 (119.5) 5.12 h30) 5.53 (140.s) 5.94 6.36 (15r) (161.s) \

MNB

B2 H + Stroke A K AL A S + Stroke H Width across flats B1 ?? ??

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03 (51.5) Stations 7 8 10 ']l 12 't3 14 15 16 17 1a 't9 20 L1 1.40 1.41 (46) (56.512.64 (67) 3.O5 3.46 (77.5) (88) 3.84 (e8.5) 4.29 (109) 4.70 (119.5) 5.12 h30) 5.53 (140.s) 5.94 6.36 (15r) (161.s) \

Support Guide/11-LEFG Series

58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25-S-450 580 457 560 10 4 480 35 11-LEFG25-S-500 630 507 610 11-LEFG25-S-550 680 557 660 12 5 600 11-LEFG25-S-600 730 607 710 11-LEFG25-S-150 280 157 260 11-LEFG25-S-200 330 207

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

CE-compliant Valve mounting direction Stations R port Nil Pilot valve is opposite the A port side. 02 2 stations A A M5 x 0.8 Nil R port P R Q CE-compliant : : A A M5 x 0.8 A port M3 x 0.5 P port M5 x 0.8 Pilot valve is on the A port side. 20 S 20 stations P port M5 x 0.8 A port M3 x 0.5 Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of

5 Port Solenoid Valve, Series VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

Cylinder with Lock Series CNG

Cylinder with Lock Series CNG 20, 25, 32, 40 Dual Directional Mechanical Lock Piston Speed Up to 39in/s Compact, Space Saving Series CNG Cylinder with Lock 20, 25, 32, 40 Double Acting: Single Rod A locking cylinder ideal emergency stops and Simple construction Cylinder with Lock Series CNG A force magnifying mechanism is employed based on the wedge effect of a taper ring and steel balls

Thermo-chiller

Filter Rc3/8 20 m V V 5 Flow meter Rc1 V Prepare a flow meter with an appropriate flow range.

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

•

K A h +, S + Stroke h + t+ Stroke C B U+ 211t+ 2xst/Okes C/l Bore size Stroke range 0 G AL A. El F B Ie (mm) (mm) (mm) 3 o o J I v K KA M N P W MM 5 :7 M1 6 x 1.5 17 34 30.5 M36 x l .S 3/4 C. 78.5 1 42 18 15 20 34.5 106 0160 Up to 1200 53 177 144 38 56 o 15 27 27 15 M14 x 1.5 15 M30 x 1.5 30.5 112 98 Up to 1000 47 143 115 32 17 0 125 50 7t ' 43 ':5.

CQS

steel Rod end nut For details about the rod end nut and accessory brackets, refer to page 7-6-20. 7-4-11 12 Compact Cylinder: Standard Type Single Acting, Single Rod, Spring Return/Extend Series CQS 12, 16, 20, 25 How to Order B 20 10 S CQS Without auto switch F9BWV S B 20 10 S CDQS With auto switch Number of auto switches Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco