Fieldbus System Seal type 0 1 Metal seal Rubber seal 46 Series VQC4000 Dimensions (mm) Power supply with M12 connector L2 L1 5.5 47 m + 86 Output connector Digital Input Unit Digital Output Unit (n 1) x 25 6.5 65.5 Communication connector Input connector Indicator light 25 SI Unit Power connector Manual override FE terminal 9 (163) 143 163 106 90 78.5 8 9 Marker groove R4.5 26 47 m 47 10 Valve Plate 2 x
27 27 86 27 27 Width across flats 24 3 3 2 2 4 4 Terminal no.
11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Stations 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Stations Dimensions n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31 50 42 61 53 72 64 83 75 94 86
concentration [particles/m3] Suction flow rate: 50 L/min 10 ISO Class 4 upper limit Suction flow rate: 80 L/min 1000 Suction flow rate: 100 L/min 100 10 1 0 0.1 0.6 0.5 0.4 0.3 0.2 Particle diameter [m] 512 A Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo Motor Electric Actuator/Slider Type Support Guide/(11-)LEFG Series Clean Room Specification Model Selection LEFG SeriessPages 86
Installation 30 Wiring 30 Specification 32 Specifications 32 Dimensions 33 IO-Link Master Unit Model Indication and How to Order 40 Summary of Product parts 40 Mounting and Installation 41 Wiring 41 LED Display 42 Specification 44 Specifications 44 Dimensions 45 Maintenance 46 Troubleshooting 47 Parameter Setting 58 Parameter definition and setting 58 -1No.EX-OMX1011 I/O Map 80 Diagnosis 86
Assembly 5 Warning Assembling the unit as a manifold 'RF1R -3 (;7):(1 86 ,1 $ Do not disassemble, modify (including changing the printed circuit board) or repair. An injury or failure can result. (1) Connect the unit to the end plate. Digital and analogue units can be connected in any order. Tighten the bracket of the joint using tightening torque 1.5 to 1.6 Nm.
'RF1R -3 (;7):(1 86 ,1 $ (1) Connect the unit to the end plate. Digital and analogue units can be connected in any order. Tighten the bracket of the joint using tightening torque 1.5 to 1.6 Nm. Do not operate or set with wet hands. This may lead to an electric shock.
OFF (OFF) 1. 2. 60 21 - 10. 22 - 23 - B 24 - A RS2H-OM0044PRS2H-OM0045P 12 B 17,24 9 C C +86-10-67885566 : 08:0017:00() SMC() URL http://www.smc.com.cn 2 100176 +86-20-28396516 : 08:4517:30() SMC() URL http://www.smcgz.com.cn 3 2 510660 +81-3-5207-8249 Fax: 81-3-5298-5362 : 09:0017:00() SMC URL http://www.smcworld.com /101-0021 4-14-1 2017 SMC Corporation All Rights Reserved
LEYG 16 [mm] 1) 30,50,100,150,200 30,50,100,150,200,250,300 (3000[mm/s 2]) 3 6 12 7 15 30 [kg] 2) (3000[mm/s 2]) 1.5 3.5 7.5 2 5 11 [N] 3) 4) 1630 3058 57111 1835 3772 66130 [mm/s] 15500 8250 4125 18500 9250 5125 [mm/s 2] 3,000 [mm/s] 5) 50 35 [mm] 0.02 [mm] 10 5 2.5 12 6 3 [m/s 2] 6) 50/20 + LEYGM,LEYGL [] 540 [%] 90 RH ) 28 42 (DC24V) A/B 800 //Z [V] DC2410% [W] 7) 40 86
ALM Log 1 Log entry 1 SET 2.Over speed 3.Stroke limit 86 - (7-3-2-2) ALM Log First alarm keykey Secomd alarm 8th alarm (7-3-3) TB TB 4 4 AX IS. TB ALM 1 1.Connect error 8 2. 3. TB YESSET ESCMENU TB 8. AX IS. TB ALM 1 ALM reset Yes YESSET 87 - (8) 4 1 TB Ver2.** TB Ver1.** TB Ver.511 (8-1) SET AX IS.
(7) . 57 14.3 . 58 15 . 59 15.1 [5m ]. 59 2 - 15.2 [820m] . 59 15.3 [5m ] . 60 15.4 ()[820m] . 60 15.5 . 62 15.6 . 62 15.7 . 62 15.8 DeviceNet . 62 15.9 . 63 16 . 64 16.1 . 64 16.2 . 65 17/ . 70 18/ . 71 18.1 . 71 18.2 . 72 18. 3 . 73 18.4 . 74 18.5 . 75 18.6 . 75 19 . 76 19.1 / . 76 19.2 . 77 19.3 . 78 19.4 . 78 19.5 . 79 19.6 . 79 19.7 . 79 20 . 80 21. . 85 22 . 86
positioning (Mounting thread) 14 5 19 42 4H9 + 0.030 depth 4 0 4 x M4 x 0.7 through (Thread for mounting attachment) 8 4 x M5 x 0.8 thread depth 10 10 0.005 0.025 (Mounting thread) 5 9 2 x 5.5 through (Mounting hole) 2 x M5 x 0.8 thread depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25 21H9 + 0.052 depth 1.5 0 Positioning pin hole 50 MHZ 16 4 69 26 MHF 86
Pin hole positioning 14 5 19 MHZ 42 4H9 + 0.030 depth 4 0 MHF 4-M4 x 0.7 MHL 8 4-M5 x 0.8, thread depth 10 (Thread for mounting attachment) 10 0.005 0.025 (Mounting hole) 5 9 MHR 25.5 2-M5 x 0.8 thread depth 10 (Mounting thread) 18 MHK (Mounting hole) (Limted area for mounting attachment) MHS MHC 38 48 36 36 37 MHT 25 MHY 21H9 + 0.052 depth 1.5 0 Positioning pin hole 50 MHW 16 69 26 MRHQ 86
4 15 8 12 12 14 M4 X 0.7 4 13.5 5 9.5 20 28 23 16 8 4.5, 8Depth of counter bore: 5 15 10 18 16 20 M5 X 0.8 5 13.5 5 9.5 20 28 26 20 8 Dimensions by stroke/Spring return Symbol Z S 5 to15 Stroke 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 Bore 10 16 53.5 61 73 85 81 93 105 73.5 53.5 62 74 86
Unit: N Theoretical Output Weight Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without auto switch 0.3 0.5 0.7 Bore size (mm) Cylinder stroke (mm) IN 25 42 59 12 5 10 100 40 45 50 75 15 20 25 30 35 OUT 34 57 79 12 44 52 60 69 77 86 IN 45 75 106 16 16 56 67 77 87 97 108 OUT 60 101 141 20 183 198 213 227 92 107 122 137 152 167 IN 71 118 165 20 25 234 252 270 288
Theoretical Force Unit: N Action Bore size (mm) Operation Piston area (mm 2) Beginning Ending Rod diameter (mm) Operating press (MPa) 0.3 0.5 0.7 Precautions IN 6 12 20 43 65 14 4 CU OUT 113 IN Spring return Spring extend CQS 8 16 45 86 126 15 6 Be sure to read before handling. Refer to p.0-39 through 0-46 for Safety Instructions and common precautions.
Q+Stroke (NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 X 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 X 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 X 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54
Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3
Refer to page 100 for part numbers. 85 86 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 86 87 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Model MHL2-25D MHL2-25D1 MHL2-25D2 70 124 142 88 142 160 48 102 120 100 182 200 150 282 320 196 328 366 38 86 104 12-4-11 12 Series MHL2 Dimensions MHL2-32D Closed J 2-M8 x 1.25 thread depth 11 (Mounting thread) A cross view (Fingers closed) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-