HRX-OM-W038

Selected for contact output 1 AL.01 Contact output 2 function RMT Contact output 2 operation A Selected for contact output 2.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

2) A(2) AQ Weight (g) (g) Model Min.

REA/REB

B FB EB H 4-counterbore depth C 4-J depth JK HI S + Stroke HO TT T HP HG MM thread depth M PA H 2-P Hollow shaft for piping HP HG 2-P d D LD A 5.5 NN GP PW PW QW GP PB W HT HT (11) RW HB HS HB HA L G G View A REAL15 HS Z + Stroke Q + Stroke A N N (mm) HP HO HI HG HB HA H GP G FB FA EB EA d D C B Model A REAL15 REAL20 REAL25 REAL32 REAL40 39 38 14 16 4 6.5 40 65 6.5 6 3 13 6 12 16.6 5 9.5

REA/REB

This can cause a loss of holding force and malfunction. AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

VT307

common exhaust and individual exhaust model. 05 2 01 VV307 01 F V100 Mounting bracket Thread type SY VT307 manifold Nil F N T Rc G NPT NPTF SYJ Manifold valve can be easily converted from N.C.

0.4

D side Stations U side 8 7 6 5 4 3 2 1 n SQ C10: 10 One-touch fitting C10 [3(R) EXH port] VFS 4 x G 1/2 Conduit port C10 [3(R) EXH port] (C12 in case of branch type) VFR 90.7 2.6 C10: 10 One-touch fitting (C12: 12 One-touch fitting) VQ7 DIN rail clamp screw R R 3 X 3 X 12 10 55.5 49.5 B B B B B B B B 12 P12 P 30 25 1 1 A A A A A A A A 13.5 33.5 (7.5) 25 P = 16 45 C10: 10 One-touch fitting

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): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

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(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

PSxx-OMS0006CN

A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -64No.PS-OMS0006CN-G A B -65No.PS-OMS0006CN-G 0.5~7 + 0.5~7 -66No.PS-OMS0006CN-G 2 (n ) <> <> (n -1) (n -1) -67No.PS-OMS0006CN-G Revision history A B [2016 9 ] C [2018 6 ] D [2020 2 ] E [2021 2 ] F [2022 1 ] G [2022 10 ]

Shock Absorbers and Rate Controls

(SMAII BORE} UFM10 x t ) UF r/220 uF s/16 18 + UF I-72 [ ' Dtr_ C l' I j rIl l l T F I r H o .L 8 a.22 & _l -! g.3t g 1 R r I -1 .2( 20 F G (otolog llo.

VQ4000

SMC SMC SMC SMC B A 2 4 L2 L1 A B A B 4 B A Indicator light 2 4 A B A B 3 B A 2 4 B A A 2 A 44 P = 25 P = 25 50.5 2 4 B A A 1 A 4 2 D side Stations 38 26.5 2-Rc 1/8 (External pilot port) R4.5 91 12 140 (Single) 16.5 149 (Double) 43.5 50.5 163 (3 position) 59 96.5 Note) In the case of EX124 for SI unit, conduit port (G 1/2) will be 4 locations.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Manual override 3 position closed center (A) 4 (B) 2 Non-locking push style (Flush) : B: Locking style (Slotted) 3 5 (R1) 1 (P) 3 (R2) 3 position exhaust center (A) 4 (B) 2 4 1 (P) 3 (R2) 5 (R1) Electrical entry 3 position pressure center (A) 4 (B) 2 G: Grommet (DC spec.)

Vacuum Pad: Ball Joint Type

flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke: 20 to 50 mm Dimensions: 10 mm Stroke (mm) B A C D F H I J Y Model ZPT40F10-01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30 +20 +15.5 +40 50 +25 +60.5 716 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry: With Buffer ZPT

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Note 2) Brass parts of AS2201FE-01 are electroless nickel plated. Note 3) Only for AS21FE-01. 660 ASFE Series Speed Controller with Residual Pressure Release Valve with One-touch Fitting Dimensions Elbow type Applicable tubing O.D. d Model Weight (g) T H1 H2 D1 D2 L1 L2 L3 L4 (1) A (2) M1 Max. Min. Max. Min.

HRX-OM-S004

Installation at indoor site 1 In case of facility having a large installation area (that can vent the air naturally) Make an air outlet on a wall at a high level and air inlet on a wall at a low level, to allow for adequate airflow. 2 In case of facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.