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Unit Series AC20D to 40D Dimensions AC20D A F N E P K C G G IN OUT Q F.R.L.

ZP

H H B5 M5 x 0.8 B01 Rc1/8 N01 NPT1/8 T01 NPTF1/8 F Width across flats J K A Model A B C D2 E F G H J K Vacuum inlet direction q Pad dia.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

, (H): 10-SY3220(-F2) G H C4, N3 C6, N7 10-SY3220-M5(-F2) G H (A, B port) M5 x 0.8 2 x M3 x 0.5, thread depth 4 (For mounting bracket) 9.5 4 23.5 25 16.9 28.5 [35.5] 88.8 [93.2] G: Approx. 300 H: Approx. 600 (Lead wire length) 44.4 8.6 B A One-touch fitting 10.2 Manual override (For manifold mounting) 2 x 2.2 A, B port Applicable tubing O.D.: 4, 5/32" : 6, 1/4" 21.4 (35) (For mounting) 2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM133-M5-35 (R, B, G, Y) A VM153-M5-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

SYJ3000/5000/7000

S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.

AC

AWD ITV VBA VE VY G AL Model Port size B J A F G H I C D E 100 100 60 60 73 73 230 230 431(481) 437(487) 59 63 166 162 117 117 3-M5 X 0.8 X 6 3-M5 X 0.8 X 6 AL800-12 to 14-1 AL900-20-1 11/4 / 11/2 2 ( ) With float switch 1.17-10

Air Slide Table

B E C A P F Single rubber stopper M M G D A A MXQA-A27 Model Adjuster part no.

ZP

Flat/Flat with Ribs Applicable Tubing G: M5 x 0.8 Y G: M6 x 1 G: M8 x 1.25 G: M4 x 0.7 G: M5 x 0.8 D ZPY02U 2 4 6 8 Applicable tube O.

ZP

H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 12 12 15 5 6 1.7 21 29.9 46 3 ZPR13UT 13 14 ZPR13 13 1.8 1.5 ZPR16UT 16 17 ZPR16 16 18 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.

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x 0.8 Rc 1/8 URJ 1/4 TSJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316L Material PSE56-: Oil proof 3-wire heavy-duty vinyl cable with air tube (0.2 mm2) Sensor cable PSE56--28: Oil proof 2-wire heavy-duty vinyl cable with air tube (0.2 mm2) 193 g 200 g 194 g 201 g 187 g 203 g 193 g Weight With sensor cable 101 g 108 g 102 g 109

KQ2

Effective area (2) (mm2) <M5, M6> (1) Mass (g) A D1 D2 L1 L2 L3 M tubing O.D.

5-Port Solenoid Valve

FREE LOCK B A B A B A B A B A A 14 14 A 14 A 14 A 14 A 115 8.8 B 12 B 12 B 12 B 12 12 B 5.5 External pilot 4 x M5 Mounting hole (Recommended tightening torque: 2.9 Nm) (138.1) (For 5 stations) P, E port entry: D (20) 40.1 (Station n) (Station 1) 85.8 (Slide locking manual override) 56.6 2 PE FREE LOCK 3/5E B A B A 82.7 14 A 14 A 8.7 1P (74.2) B 12 12 B 9.1 (12) (14.5) (23.5) X (23.9) (A,

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(mm) A B C D E F G H J L Port size Bracket part no.

Mechanically Jointed Rodless Cylinder Series MY1

plug) G G GB Cushion needle M5 x 0.8 (Hexagon socket head plug) N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 2 x 2 x J depth K (Hexagon socket head plug) (WW) (WW) M5 x 0.8 XX XX (Hexagon socket head plug) M5 x 0.8 (Port) VV VV 2 x M5 x 0.8 2 x M5 x 0.8 MY1MG MY1MG (Hexagon socket head plug) (Hexagon socket head plug) (mm) A B C G GA GB H K J LD L LH LL LW MM N Model M NH NC NE NW PA 80 6 3.5

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

L1 (Non-locking) Manual override A A 20 15 B B 5 48.5 [55] 2 (Pitch) P=10.5 12 2n-One-touch fitting 36.1 29.5 (A, B port) A A 20 15 B B Applicable tube: T0425 5 2 (Pitch) P=10.5 12 2n-M5 X 0.8 (A, B port) Other dimensions are the same as the M5.

VM

(mm) Connection thread R H 1(P) 2(A) B S (Width across flats) Weight (g) L3 L4 L5 L6 M1 Q L1 L2 Model C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-04F-M5 18 2.0 3.4 1.2 19 49 11 21 51 13 4 29.1 31.6 55.4 52.9 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-04F-01S VHK-06F-M5 3.5 11 41 23.8 16.5 15.8 1 8 53.9 29.6 56.9 24.3 32.6 16.5 3.5 16.8 11 7.2 21 50 11 23 53 13 M5 2.0 VHK-B1A 44.5 14.5 1 27 22

5 Port Solenoid Valve Series VQZ1000/2000/3000

Grommet (G) 0.54 0.71 (A) 4 1 (P) 5 (R) VQZ2000 N.C.

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06