High Vacuum Angle Valve Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-
diameter 5.1 19 6.5 W 32 0.05 46 0.5 0.05 8 B D Piping port 2-M5 x 0.8 47 13 J Mounting base side B D 16.5 14.5 Across AA MXP16-30 Without magnet and switch rail 2-M3 x 0.5, depth 3.5 For rail mounting 8 2-M2 x 0.4, depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8, depth 7 20 20 L (mm) Model G M W H S Z J V K L MXP16-20 18 40 65 58 20 102 93 82 40 36 MXP16-30 28 56 75 70 30 128 119 108 50
Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance
How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.
Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.
dr to the current leakage llowing throuth the C-R element.
Model/Series SYA540 (Base mounted) Valve model Port size Flow characteristics Note 1) Type of actuation Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Mass Note 2) (g) Cv b Cv C [dm3/(sbar)] C [dm3/(sbar)] 105 (42) 110 (47) Single Double Closed center 2 position 2.4 0.41 0.64 2.8 0.29 0.66 SYA540-02 M5 x 0.8 1 4 0.55 0.47 0.44 0.50 3.0 [1.2] 1.8 0.33 [0.48] 0.40 0.72 [0.37] 0.47
N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore depth 6.3 2-6.9 through CXS32
AC200230V AC100120V 40 6 AC100120V AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 M5 3.24[Nm] U U CNP3 V CNP3 V W W 11 3 11 11.2 (1) Mini Delta Ribbon(MDR)(3M()) (a) [mm] E D A C Log 39.0 23.8 B 12.7 A B C D E 10126-3000PE 10326-52F0-008 25.8 37.2 14.0 10.0 12.0 AWG2430 (b) M2.6 [mm] E D A C F Log
C3 C4 C6 M5 Function With One-touch fitting for 3.2 With One-touch fitting for 4 With One-touch fitting for 6 M5 threads 0 1 Metal seal Rubber seal C Note) Inch sizes use the following symbols.
mounting screw M5 x 0.8 x 16 l 1.
mounting screw M5 x 0.8 x 16 l 1.
mounting screw M5 x 0.8 x 16 l 1.
dr to the current leakage llowing throuth the C-R element.
P PL M ML C H D L XT661-4C-X321 M5 x 0.8 5 M4 x 0.7 8 32 6 39 XT661-6C-X321 M5 x 0.8 6 M4 x 0.7 6 47 11 59 XT661-8C-X321 M5 x 0.8 6 M4 x 0.7 6 47 17 79 XT661-10C-X321 Rc 1/8 M4 x 0.7 6 47 23 99 XT661-120E-X322 Rc 1/8 M5 x 0.8 7 72 30.5 120 XT661-150E-X322 Rc 1/8 M5 x 0.8 7 72 37.5 150 744 Non-contact Gripper XT661 Series Dimensions [Bernoulli Type] With guide assembly Size: 120 Size
Model/Series SYA540 (Base mounted) Valve model Type of actuation Port size Flow characteristics Note 1) Pilot port size (Nominal size) b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Weight Note 2) (g) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv 105 (42) 110 (47) Single Double Closed center 2 position 0.66 2.4 0.41 0.64 2.8 0.29 SYA540-02 M5 x 0.8 1 4 0.72 [0.37] 0.47 0.55 0.47 0.44 0.50 3.0 [1.2] 1.8
B2 G F K A REB F AL NA 2 x NN Plugged (M5 x 0.8) Width across flats B1 H2 H1 I REC CY D C B 4 x LD LH CX MM N N 2 x 4 Width across flats KA 3.2 MQ S + Stroke Y X LZ LX Y X Z ZZ + Stroke LS + Stroke RHC (mm) RZQ A AL B B2 F G H H1 H2 I K KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5
B2 G F K A REB F AL NA 2 x NN Plugged (M5 x 0.8) Width across flats B1 H2 H1 I REC CY D C B 4 x LD LH CX MM N N 2 x 4 Width across flats KA 3.2 MQ S + Stroke Y X LZ LX Y X Z ZZ + Stroke LS + Stroke RHC (mm) RZQ A AL B B2 F G H H1 H2 I K KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5
Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34 33 Lock-up Cylinder Double Acting, Single Rod Series CL1 40, 50, 63, 80
X, Y, Z directions, 3 times each Impact resistance 350 g or less Weight 1) 90 phase difference input Multi-counter/Dimensions A phase I 24 x M3 x 0.5 B phase J B C D A t A COM COM COM B 12 VDC GND F.G.