VEX1

cap screw (with spring washer) M5 x 0.8 x 10 (2 pcs.)

KQ2

(mm) Model 3 x applicable tubing Nylon Urethane D 4.3 4.3 2.2 2.2 10 KQ2D04-M5 24 M5 x 0.8 M6 x 1.0 25.5 KQ2D04-M6 24.5 11 16 8.7 4 10.4 18.5 1 8 KQ2D04-01S 25.6 27.5 6.0 6.0 12 L1 1 4 KQ2D04-02S 30 29.5 21 14 D L2 KQ2D06-M5 26 M5 x 0.8 M6 x 1.0 28.5 4.3 4.3 12 KQ2D06-M6 13 26.5 K 17 9.9 1 8 KQ2D06-01S 31.5 28.1 12.8 14 20.5 6 D Connection thread 1 4 KQ2D06-02S 32 33 17 14 11.0 13.9 21

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.062 0 +0.062 0 +0.074 0 +0.074 0 +0.087 0 MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D 34H9 42H9 52H9 65H9 Rc 1/8 (G 1/8, NPT 1/8) 82H9 569 Parallel Style Air Gripper

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

19 1.5 4-M5 x 0.8 Prepared hole dia. 4.2 4-M4 x 0.7 depth 4.5 Piping port 2-M5 x 0.8 (Plug: M-5P) 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting reference planes B D 12 9.5 Section AA MXP12-25B Without magnet and switch rail 2-M2 x 0.4 depth 3 For magnet mounting 8 2-M3 x 0.5 depth 3.5 For rail mounting 5.7 3.5 6-M4 x 0.7 depth 4.5 20 20 L (mm) L K MA V J S Z H M W Model

CXWM/CXWL

For dimensions of 25 stroke, refer to page 8-26-20. 8-26-19 18 Series CXWM 16 With End Lock: CXWM1625 stroke R 2 x 2-M5 x 0.8 thread depth 10 2-M5 x 0.8 2 x 2-5H7 depth 6 +0.012 0 Cylinder port M8 x 10 Adjusting bolt 2-M5 x 0.8 Hexagon socket head cap plug 4-4.3 through 4-8 counterbore depth 4.5 M8 x 1.0 2-RB0805 shock absorber (Single housing installed) 2-M5 x 0.8 plug (M-5P) (Cylinder port

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

closed center / exhaust center / pressure center [M12 waterproof connector type] 10-SV200(R)-W-02 18 19 9.5 85.9 17 17 2 x 4.3 (For mounting) 73.7 15.5 15.5 M5 x 0.8 (Pilot EXH port) 48 21.9 4 A B SMC 35 A B A B PE X EA P EB Manual override 56 17.9 A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (External pilot port) (L = 300 to 5000) 121.1

CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

MGP

M5 X 0.8 4.3 5.6 5.6 M5 X 0.8 Rc1/8 Rc1/8 40 16 18 26 8 10 12 64 83 93 8 9.5 9.5 10 8 10 10 M4 M5 M5 4.5 5.5 5.5 19 5 6 6 15 18 21 30 36 42 15 18 21 22 24 30 16 20 25 78 62 10.5 M5 X 0.8 M5 X 0.8 37.5 10.5 25 25, 50, 75, 100, 125, 150, 175, 200 78.5 62.5 11.5 M6 X 1.0 M6 X 1.0 37.5 13.5 28.5 WA WB Bore (mm) Standard stroke (mm) R S T U VA VB X XA XB YY YL Z 100 to 175st 100 to 175st 75st

MY1

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Basic style 49.5 47 11 2 x cushion needle Width across flats 8 8.5 4.5 4.5 Rod cross section 6 4.5 2 x M5 x 0.8 (Port size) 4 x M5 x 0.8, effective length 8 4 x 4.5 through 2 x 4 x 7.5, counterbore depth 4.5 (Opposite side also) 5.5H7 +0.012 0 10h7 0 -0.015 16 24 14 15 4 38 36 28 28 26 53.5 102.5 + Stroke 18 25 M5 x 0.8 120.5 + Stroke 16 4 x M5 x 0.8, effective length 8 22 24 Width across

Rotary Table/

1.25 12 M5 x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5

Series SV

: Series SV3000 1in = 25.4mm 2 position single/double [M12 waterproof connector type] SV300(R)-W-02, 03 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 2-4.3 (Mounting hole) M5 x 0.8 (Pilot EXH port) 21 21.5 A B PE 38 46 SMC A B A B B A X Manual override (non-locking) A side: Orange B side: Green EA EB P 21.5 21 61 69 6.4 (Light/Surge voltage suppressor

CJ2X/CUX/CQSX/CQ2X/CM2X

1.25 M14 x 1.5 20 M10 x 1.5 M18 x 1.5 16 20 M8 x 1.25 M14 x 1.5 M10 x 1.5 M18 x 1.5 +1.0 0 mm Female thread Male thread M5 x 0.8 M5 x 0.8 Rod end thread JIS Class 2 Rod end thread tolerance Stroke tolerance Port size Vacuum port, Relief port Bore size (mm) 11(Vacuum type) +1.0 0 mm 12 16 20 25 M5 x 0.8, RC 1/8 Note) M5 x 0.8, RC 1/8 Note) Rc1/4 Rc1/4 Air 1.5 MPa 1.0 MPa Fluid Proof pressure

SZ3000

SZ3B60 [N.C. valve x 2 pcs.] 4(A) 2(B) r t !0 !1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

SZ3000

SZ3B60 [N.C. valve x 2 pcs.] 4(A) 2(B) r t !0 !1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

: M5 x 0.8 (EA)5 1 (P) 3(EB) 3 position pressure center A 4 2(B) (A)4 5 2 B (EA)5 1 (P) 3(EB) For switch operation, refer to page 412.

MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

3 Port Solenoid Valve Rubber Seal Series SY100

Flow Characteristics Manifold Port size Effective area (mm2) 2(A) port 1(P), 3(R) port SY13 SY13(A) SY13 SY13(A) SY14 SY14(A) SY14 SY14(A) 0.14 0.21 0.14 0.21 0.14 0.21 0.14 0.21 M3 x 0.5 M5 x 0.8 SS3Y1-30 M5 x 0.8 M3 x 0.5 SS3Y1-31 M3 x 0.5 M5 x 0.8 SS3Y1-S41 M5 x 0.8 M5 x 0.8 Note) Value at manifold base mounted How to Order Valve Manifold Assembly Example Stations3 2 1 Valve (N.C.)

MGP

, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 15 10 19 53 37 10.5 M5 x 0.8 M5 x 0.8 Rc 1/8 12.5 10.5 25 53.5 37.5 11.5 M6 x 1.0 M6 x 1.0 Rc 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30st or less Over 30st to 100st Over 300st 30st or less Over 30st to 100st 23 24 28 34 Over 100st to 200st 200

3 Port Solenoid Valve Rubber Seal Series SY100 1

x 0.5 SS3Y1-31 M5 x 0.8 M3 x 0.5 SS3Y1-S41 M5 x 0.8 M5 x 0.8 Note) Value at manifold base mounted How to Order Valve Manifold Assembly Example Stations3 2 1 Valve (N.C.)