Pressure Range: 0 to 5 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: Bracket A, Interchangeable with ISE75[H], Operation Manual/Calibration Certificate: Operation Manual + Calibration Certificate

Pressure Range: 0 to 5 MPa, Piping: Rc 1/4, Orifice: Orifice shipped with the Product, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: Bracket B, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 5 MPa, Piping: G 1/4, ISO 1179-1 Compliant, Orifice: Orifice shipped with the Product, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: Bracket A, Interchangeable with ISE75[H], Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 5 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: SI Unit Only, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 5 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: Bracket B, Operation Manual/Calibration Certificate: None

Pressure Range: 0 to 5 MPa, Piping: NPT 1/4, Orifice: Orifice shipped with the Product, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 5 MPa, Piping: NPT 1/4, Orifice: Orifice shipped with the Product, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: None, Operation Manual/Calibration Certificate: None

Pressure Range: 0 to 5 MPa, Piping: NPT 1/4, Orifice: Orifice shipped with the Product, Unit Specification: SI Unit Only, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 5 MPa, Piping: NPT 1/4, Orifice: Orifice shipped with the Product, Unit Specification: SI Unit Only, Lead Wire: -, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 5 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: Bracket B, Operation Manual/Calibration Certificate: Operation Manual + Calibration Certificate

Pressure Range: 0 to 5 MPa, Piping: G 1/4, ISO 1179-1 Compliant, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 5 MPa, Piping: G 1/4, ISO 1179-1 Compliant, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: Bracket B, Operation Manual/Calibration Certificate: Operation Manual + Calibration Certificate

Pressure Range: 0 to 5 MPa, Piping: G 1/4, ISO 1179-1 Compliant, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: Bracket B, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 5 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: None, Operation Manual/Calibration Certificate: Operation Manual + Calibration Certificate

Pressure Range: 0 to 5 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 5 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: Bracket A, Interchangeable with ISE75[H], Operation Manual/Calibration Certificate: -

S Couplers

Width across flats Min. bore size Model T Connection port size Weight g Effective area mm2 L2 L1 KKA3P-01F-1 Rc 1/8 23.2 9.6 14 -02F-1 1/8 T Rc 1/4 6.0 22.6 16.0 30.3 20.2 17 -03F-1 Rc 3/8 32.0 26.2 19 KKA4P-02F-1 Rc 1/4 29.7 20.0 17 -03F-1 1/4 Rc 3/8 8.0 40.2 18.9 34.0 25.8 19 -04F-1 Rc 1/2 39.4 46.1 24 L2 H KKA6P-03F-1 Rc 3/8 30.9 34.3 22 L1 -04F-1 1/2 Rc 1/2 11.0 76.0 20.4 39.6 50.0 24

90

Common PS port q Stations Note 1) Symbol w System (Port combination) Note 2) Stations Symbol Standard Port System 01 02 1 station Common PV port 2 stations Vacuum pump system Common PV: 8, Common PS: 6 Note 3) P P 10 10 stations Metric size Note 1) In case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SS3Y1 31 05 Stations 02 2 stations P R 20 20 stations R port M5 x 0.8 P port M5 x 0.8 Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

VT307

= 26 x n + 12 2 76 64 3 102 90 4 128 116 5 154 142 6 180 168 7 206 194 8 232 220 9 258 246 10 284 272 L L1 L2 [ ]: With light/surge voltage suppressor 4-7-8