Thermo-chiller/Rack Mount Type

) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 wParticle Filter Element for Replacement p. 36 Specifications eDI Filter Replacement Cartridge p. 36 Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 15 rAnti-quake Bracket p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 16 tPiping Conversion Fitting (For

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Note 3) When two or more symbols are specified, indicate them alphabetically. 2-3-7 8 Series SQ1000 Manifold Option Blanking plate SSQ1000-10A-3 Individual SUP/EXH spacer SSQ1000-PR1-3Name plate (-N) SSQ1000-N3-n External pilot specifications (-R) P. 2-3-44 P. 2-3-45 P. 2-3-47 P. 2-3-48 C6 L6 External pilot port SUP/EXH block SSQ1000-PR-3-C8 (-S) SUP block plate SSQ1000-B-P Blanking plug

MY2

(Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5

Title not found

:..1 : 4 0 0 . 1 > -90 . : : , ' : r ' ] t r , , l L : l l . l l P N 1 N E G c o P 1 2 Maximum number ot stations 20 Also available SY manifold with gateway type Sl unit and is capable to handle 128 UO points.

LEC-OM07605CN

D() P+DP+C P+CD 11.2 L11L21 LECSS2-T5 L11L21 LECSS2-T9 AC200V240V L11L21 UVW (UVW)(UVW) N(PE) ((PE) 3 9 3. 3.3.2 (1) 1)3.1 (L1/L2/L3/L1/L3) PLC OFF 2)(L11L21) ON [AL.

Cylinder with Lock Series CNS

(same side) (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 BT-12 BT-12 BT-16 F5W/J59W/ F5BAL/F5F n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs.(different side, same side), 1 pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 155 35 145 D-A3/A4/G39/K39 BS1-125 BS1-140 BS1-160 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

HB HC N X W K H 2-P (Piping port) HA CB 4-J x E T 4-counter bore dia.

Digital Flow Switches, Series PF2A, Series PF2W

ON "P" OFF P-3 Error Correction High flow rate LED display Contents Solution OUT1 Output mode Note 1) A current of more than 80mA is flowing to OUT1 Check the load and wiring for OUT1. Note 2) ON A current of more than 80mA is flowing to OUT2. Check the load and wiring for OUT2. Note 1) OFF n-3 Note 1) "n" High flow rate The setting data has changed for whatever reasons.

MGG

M N 4-O T Q 2-P AH AG S K W U L B AL I 4-AK hole R AA AP J X AB A Y + Stroke V AI Z + Stroke AJ For 4-AO AG AN AI Cutout window 100 piston rod end connection AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P A 75, 100 125, 150 200, 250 300 63 80 100 M12 x 1.75 depth 23 100 66 180 135 117 65 228 60 M12 234

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

(Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C

RHC

MVGQ CC RB J D-X 20Data 10-6-11 11 Series RHC Dimensions: Basic Style 20 to 40 Rc P Rc P GA H2 NN NN GB I H1 MM D NB ND NE C Effective thread E E NF 10 N JD N JC 10 A K F NA S + Stroke F H WH B ZZ + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B C D E

PA300/500/700

2(A) 2(A) 47.5 VHS 13.5 (A port) Rc 3/8 Individual exhaust: VV3PA5-42Station 3-03 28.5 3(R) 3(R) (R port) Rc 3/8 PA NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (P port) Rc 3/8 (Pitch) 88 31 33 7.5 L2 L1 (PA port) Rc 1/8 PA 61.5 66 2(A) 2(A) 47.5 13.5 (A port) Rc 3/8 n: Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

E-P HYREG

IRV 2 VEX 1(P) 3(R) 2(A) Simplified main circuit n SRH SRP 1 SRF 3(R) 2 ITV Simplified pilot circuit 1(P) 2(A) P2 P1 3(R) 1(P) IC 1(P) 2(A) n E-P HYREG Ease of handling ITVH Having the amplifier built into the electro-pneumatic pilot valve, only an external power supply and signal (voltage, current) need to be connected.

125

66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P): 1/4 L1 L2 67.5 Supply from both ends when there are 5 stations or more. 71.6 82.9 (Station n) (Station 1) VVEX2-1 (Internal pilot) 67.5 51.5 A A 37.5 VEX VEX 11 P=31 30 n x Port 2(A): 1/4 R P L Dimensions Formula: L1=31n+29, L2=31n+14 n: Stations Station L dimension 2 3 4 5 6 7 8 L1 91 122 153 184 215 246 277 L2 76 107 138 169 200 231 262 1735

Sine Rodless Cylinder Series REBR Direct Mount Type

(mm) Mode of operation Inclined operation Vertical operation Horizontal operation Review of load weight and operating pressure Fn W Lo Guide First tentative bore size determination First tentative bore size determination First tentative bore size determination F2 D 1.6 x P F1 D 1.6 x P F3 D 1.6 x P WB Inclined operation Allowable driving force (Fn) (n = 1, 2, 3) W + WB WV P PV W

Basic Type/Direct Mount Type

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB 4 x counter bore dia.

Digital Flow Switches

ON "P" OFF P-3 Error Correction High flow rate LED display Contents Solution OUT1 Output mode Note 1) A current of more than 80mA is flowing to OUT1 Check the load and wiring for OUT1. Note 2) ON A current of more than 80mA is flowing to OUT2. Check the load and wiring for OUT2. Note 1) OFF n-3 Note 1) "n" High flow rate The setting data has changed for whatever reasons.

Vacuum System Peripherals:

ZZYX3 45 P J Ejector mounting positions Common specifications U side D side U D Positive common Negative common Nil N SUP/EXH block assembly specifications Standard, Internal pilot specifications External pilot specifications Internal pilot, Built-in silencer External pilot, Built-in silencer RS Nil R Number of ejectors 1 to 10 stations Mounting position of connector S Voltage specifications