Stroke Reading Cylinder and Counter Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BA D-F79F D-F7NT Auto switch model D-F7V D-F7WV D-F7BAV D-J79C D-A79W D-A9V D-M9V D-M9WV D-M9AV D-A7 D-A80 D-A73C D-A80C Bore size (mm) U 20.5 25.5 27 30.5 36.5 40 U 20.5 25.5 29 32.5 38.5 42 U 20.5 25.5 32.5 36 42 48.5 U 26.5 31.5 38.5 42 48 54.5 U 23 28 35 38.5 44.5 51 U 26 31 38 41.5 47.5 54 U 22 27 34 37.5 43.5
2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o
-7 Series VM100 P.3.5-11 Series VM200 P.3.5-19 Series VM400 P.3.5-25 Series VZM500P.3.5-40 Series VZM400P.3.5-34 Series VFM300P.3.5-47 Series VFM200P.3.5-53 Series VM800 P.3.5-31 Related Products Page Relay Valve P.3.5-59 Shuttle Valve P.3.5-62 Time Delay Valve P.3.5-61 Pneumatic-Electric Relay P.3.5-63 Pneumatic Indicator P.3.5-64 3.5-3 Series VM Precautions Be sure to read before handling
center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.
Note 2) The seal is for 40 m and 80 m elements. 784 Vacuum Filter AFJ20 to AFJ40 Series Dimensions AFJ20 N T J M D U Bracket (Option) S SP R ZCUK C B V Q IN OUT AMJ AFJ AFJ 2 x P (Port size) AMV ZH -X185 Related Products Clearance for maintenance G A AFJ30, AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications
Surface of panel Surface of panel OUT SMC MPa MPa MPa MPa MPa MPa K K K K K K P P P P P P C C C C C C U U U U U U O O O O O O S S S S S S L L L L L L H H H H H H to to to to to to IN 58 Bottom of panel Bottom of panel 45 1 I N 1 I N 1 I N C S M C S M C S M 1 I N 1 I N 1 I N 2 OUT 2 OUT 2 OUT C S M C S M C S M 2 OUT 2 OUT 2 OUT In case of ARG30, dimension in height can be reduced by approx
side, side port) End plate assembly (U side, side port) Aluminum Aluminum y y End plate assembly (U side, front port) End plate assembly (U side, front port) Note 2) O-ring e is included with manifold valve r.
for purge air discharge (Option: P) u t e q IN OUT i } r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.
For R and U, DC voltage is only available.
2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !
plate BP (Rc, NPT) Unlocking port GA GC GD Unlocked when pressurized GL GR U Plug cap with breathing hole GL (For spring locking) LOCK FREE With rod boot 4 x J P (Rc, NPT) Head side cylinder port Width across flats KA RR2 LZ PH PW GB PL PG Width across flats B1 MM 2 x Cushion valve Z + l + 1/2 stroke D E e C B AL H1 L RR1 B C CZ CX 10.2 f l F K A N BN Hole dia.: CDH10 h + l Shaft dia.: CDd9
keeper plate mounting screw J P H A B C D d K L L1 E Part no.
6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.
RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LF LP LG LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2
RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LP LG LF LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2
Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure P.398 AF Modular Type Air Filter P.402 AFM Modular Type Mist Separator P.402 AFD Modular Type Micro Mist Separator P.404 AR Modular Type Regulators P.412 AL Modular Type Lubricators P.420 AW Modular Type Filter Regulators P.431 ARG Modular Type Regulator with Built-in Pressure Gauge P.437 AWG Modular
Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure P.398 AF Modular Type Air Filter P.402 AFM Modular Type Mist Separator P.402 AFD Modular Type Micro Mist Separator P.404 AR Modular Type Regulators P.412 AL Modular Type Lubricators P.420 AW Modular Type Filter Regulators P.431 ARG Modular Type Regulator with Built-in Pressure Gauge P.437 AWG Modular
Total stroke time t Stroke L Stroke mm Speed d% d% Speed at the end Stroke Speed at the end u Time s SOL: ON (OFF) VI Table of Contents Series SV Manifold Variations P. 2 Valve Manifold Common Specifications Serial Wiring Manifold specifications Decentralized Serial Wiring P. 5 Cassette base manifold SV1000/SV2000 Tie-rod base manifold SV1000/SV2000/SV3000/SV4000 IP67 protection Applicable