Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Inch sizes 1/4", 5/16" 3/16" 5/32" 3/16", 1/4" 1/8", 5/32", 3/16", 1/4" l/min (ANR) {Nl/min} Flow rate 12 38 7 Controlled flow Effective area mm 0.2 0.6 0.1 l/min (ANR) {Nl/min} Flow rate 460 100 290 130 230 Free flow Effective area mm 7 1.5 4.5 2 3.5 Note) Flow rates are values measured with pressure at 0.5MPa and temperature at 20C.

Capacity: 2kVA (IDF22E-20, IDF37E-20), Inlet Voltage: 11 (1-phase: 440, 460VAC, 50Hz; 440-460, 460-500VAC, 60Hz)

Air Preparation Equipment

AL-7S AL-6S AL-8S AL-9S AL-7S AL-6S AL-8S AL-9S A T N V 2 (Size 65 x L250) 257 A Industrial Filter Series FGD P.460 1 Replacement Procedure is Replacement Parts and Seal List How to Order FGD C A 03 B B N 002 Made to Order Symbol Nil Description None With differential pressure indicator With differential pressure indication switch Symbol Element length Element length L250 L500 (L250 x 2)

Industrial Filters Replacement Procedure

Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure P.460 FGD Vessel Series P.461 FGE Vessel Series P.463 FGET Vessel Series P.466 FGG Vessel Series P.468 FGA Vessel Series P.472 FGB Vessel Series P.476 FGC Vessel Series P.478 FGF Bag Filter P.480 FGH High Precision Filter for Liquids P.482 FQ1 Filter for Cleaning Fluid/Quick Change Filter P.483 FN1FN4

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Integral mounting of other electric parts is possible, too. 10-SY340 10-SY540 10-SY340 10-SY540 Type 45 P.460 Stacking type/DIN rail mounted Connector box Stations can be increased on the DIN rail. The provided connector box permits one-touch connection of electric cables.

80

Step 1 Item Selection item Symbol Page VQ Page 456 Air 0 LVM Page 458 VDW 0 A A 1 2 Page 460 Select the fluid. Water 2 Medium vacuum 4 Select Body material, Port size and Orifice diameter from Flow rate Pressure of each fluid. Step 2 Item Selection item Symbol Size 1 Size 1 Select from Flow rate Pressure.

Capacity: 2kVA (IDF22E-20, IDF37E-20), Inlet Voltage: 1-phase: 440, 460VAC, 50Hz; 440-460, 460-500VAC, 60Hz

Title not found

.& Canadian Sales Offices Northeast Region Midwest Region SMC Canada Houston,TX T el: (713) 460-0762 FAX: (713) 460-1510 Boston, MA Tel: (978) 326-3600 FAX: (978) 326-3700 Chicago, IL T el: (630) 393-0080 FAX: (630) 393-0084 Kingston Tel: (613) 389-6553 FAX: (613) 389-6815 Nashville,TN T el: (615) 331-0020 FAX: (615) 331-9950 Cleveland, OH Tel: (330) 963-2727 FAX: (330) 963-2730 Detroit,

Title not found

Louis, MO Tel: (314) 209.0080 FAX: (314) 209.0085 Milwaukee, WI Tel: (414) 827-0080 FAX: (414) 827-0092 Southwest Region Austin, TX Tel: (512) 926-2646 FAX: (512) 926-7055 Dallas, TX Tel: (972) 406-0082 FAX: (972) 406-9904 Houston, TX Tel: (713) 460-0762 FAX: (713) 460-1510 Tulsa, OK Tel: (918) 252-7820 FAX: (918) 252-9511 Nashville, TN Tel: (615) 331-0020 FAX: (615) 331-9950 West Region

PFA/PFW

(Houston) 9001 Jameel, Suite 180 Houston, TX 77040 Tel: (713) 460-0762 FAX: (713) 460-1510 SMC Pneumatics Inc. (S.F.) 85 Nicholson Lane San Jose, CA 95134 Tel: (408) 943-9600 FAX: (408) 943-9111 SMC Pneumatics Inc. (Binghamton) 27 Link Drive Binghamton, NY 13904 Tel: (607) 773-1300 Fax: (607) 773-8008 SMC Pneumatics Inc.

Serial Network

-0762 Fax: (713) 460-1510 St.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

Table of Contents

2 to 16 l/min 0.1 l/min 0.1 l/pulse 3% F .S. or less 2% F .S. or less 0.35 to 4.5 l/min 0.35 to 4.5 l/min 0.5 to 4 l/min 0.05 l/min 0.05 l/pulse 3.5 to 45 l/min 3.5 to 45 l/min 5 to 40 l/min 0.5 l/min 0.5 l/pulse 7 to 110 l/min 7 to 110 l/min 10 to 100 l/min 1 l/min 1 l/pulse IF Data 5% F .S. or less 3% F .S. or less 5% F .S. or less (0 to 50C, based on 25C) 70 mA or less 80 mA or less 460

ZFC Series

(Houston) 9001 Jameel, Suite 180 Houston, TX 77040 Tel: (713) 460-0762 FAX: (713) 460-1510 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (Cincinnati) 4598 Olympic Blvd. Erlanger, KY 41018 Tel: (606) 647-5600 FAX: (606) 647-5609 SMC Pneumatics Inc.

Series DXT474

SMC Corporation of America (Houston) 9001 Jameel, Suite 180 Houston, TX 77040 TEL: (713) 460-0762 FAX: (713) 460-1510 SMC Corporation of America (S.F.) 85 Nicholson Lane San Jose, CA 95134 TEL: (408) 943-9600 FAX: (408) 943-9111 CHILE SMC Pneumatics (Chile) Ltda. Oceania AUSTRALIA SMC Pneumatics (Australia) Pty. Ltd. NEW ZEALAND SMC Pneumatics (N.Z.) Ltd.

SQ1000/2000

12 stations 420 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 threads) 1 to 12 stations 26P C8 (for 8) Side P kit: Flat ribbon cable 20 420 20P 1 to 9 stations SS5Q13-SQ130 SQ131 J kit: Flat ribbon cable PC Wiring System compatible Option Direct outlet with built-in silencer 1 to 8 stations 20 420 L3 (for 3.2) L4 (for 4) L6 (for 6) L5 (M5 threads) Note 2) L kit: Lead wire 1 to 12 stations 35 460

Series VCL

(Houston) 9001 Jameel, Suite 180 Houston, TX 77040 Tel: (713) 460-0762 FAX: (713) 460-1510 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (Cincinnati) 4598 Olympic Blvd. Erlanger, KY 41018 Tel: (606) 647-5600 FAX: (606) 647-5609 SMC Pneumatics Inc.

Series VCS

(Houston) 9001 Jameel, Suite 180 Houston, TX 77040 Tel: (713) 460-0762 FAX: (713) 460-1510 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (Cincinnati) 4598 Olympic Blvd. Erlanger, KY 41018 Tel: (606) 647-5600 FAX: (606) 647-5609 SMC Pneumatics Inc.

VDW Series

(Houston) 9001 Jameel, Suite 180 Houston, TX 77040 Tel: (713) 460-0762 FAX: (713) 460-1510 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (Cincinnati) 4598 Olympic Blvd. Erlanger, KY 41018 Tel: (606) 647-5600 FAX: (606) 647-5609 SMC Pneumatics Inc.

VQ5000

(Houston) 9001 Jameel, Suite 180 Houston, TX 77040 Tel: (713) 460-0762 FAX: (713) 460-1510 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (Cincinnati) 4598 Olympic Blvd. Erlanger, KY 41018 Tel: (606) 647-5600 FAX: (606) 647-5609 SMC Pneumatics Inc.