SYJ300/500/700

M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

VQ7-6/7-8

Rubber seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

180

10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time (s/90) 703 180 Angular Type Air Gripper Cam Type MHY2 Series 10, 16, 20, 25 How to Order MHY 2 16 2 D M9BW Made to Order Refer to page 705 for details.

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

1.0 1.1 2.2 1.3 2.5 4.6 3.2 MY2H MTS For 100 mm stroke cylinder MY CY1H Available bore sizes 10, 15, 25 CY CY1H CY1F MG Standard stroke (mm) Maximum stroke Cushion Piping directions Bore size (mm) Model Height Overall length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated piping on right 28 34 46 46 63 198 225 205 294 260 DBuilt-in shock absorber 39.5 CY1F 15 750 Concentrated piping on left -X 25 1200 Overall length reduced by 22% compared to Series MY2H 20Magnetically coupled rodless

MHY2/MHW2

2.7 X 10-6 Calculation of weight m2 = d X e X f X Specific gravity = 0.002(kg) Iz2 = {0.002 X (52 + 102)/12} X 10-6 Moment of inertia around Z2 axis = 0.02 X 10-6 (kgm 2) IB = 0.02 X 10-6 + 0.002 X 472 X 10-6 Iz2 = {m2(d 2 + e2)/12} x 10-6 Moment of inertia around Z axis IB = IZ2 + m2r22 x 10-6 = 4.4 X 10-6 (kgm2) I = 9.0 X 10-6 + 4.4 X 10-6 Total moment of inertia I = IA + IB = 13.4 X

Series MXP Precision Air Slide Table

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Process Pump

SUP = 0.2 MPa 0.2 0.2 0.1 0.1 0 0 5 0 10 15 20 25 10 0 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (4 Hz) PAF5413 Air Consumption (3 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) SUP = 0.5 MPa 300 SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10

Series LX Acceleration Time Guide

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

VZS

79 With light/surge voltage suppressor Pg7 103 95.4 PE P EB EA n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 16 341 350 17 361 370 18 381 390 19 401 410 20 421 430 21 441 450 22 461 470 23 481 490 24 501 510 L1 L2 3-7-34 35 5 Port Pilot Operated

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

10

Symbol O.D. thread size Stroke 0805 1006 1410 8 mm 5 mm 2 pcs. 1 pc. 10 mm 6 mm 3 pcs. 1 pc. 14 mm 10 mm 1 pc.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting B L F D Basic type Axial foot type Front flange type Double clevis type CJ5 L 16 S R 60 Without Auto Switch CDJ5 L