SI Unit: 0 (w/o SI Unit), Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: C10 (ø10 One-touch Fitting)

Model: Side Ported, SI Unit Specification: w/o SI Unit, SI Unit Ouput Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 16 Stations, P,E Port Entry: Both Sides, 2 to 16 Stations, SUP/EXH Block: Internal Pilot, A,B Port Size: ø10 One-touch Fitting, Straight, Metric, Mounting: -, DIN Rail Option: -

Model: Side Ported, SI Unit Specification: EtherNet/IPâ„¢ - 32 Outputs - Connector M12, SI Unit Ouput Polarity: Negative Common, PNP, Valve Stations: 16 Stations, P,E Port Entry: Both Sides, 2 to 16 Stations, SUP/EXH Block: Internal Pilot, A,B Port Size: ø10 One-touch Fitting, Straight, Metric, Mounting: -, DIN Rail Option: -

Model: Side Ported, SI Unit Specification: EtherNet/IPâ„¢, 2 Port, SI Unit Output Polarity, End Plate: SI Unit Negative Common, M12 Connector, I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Block: Both Sides, 2 to 24 Stations, Internal Pilot, A,B Port Size: ø10 One-touch Fitting, Straight, Metric, Mounting: -, DIN Rail Option: -

Enclosure: IP67, SI Unit: EtherCAT - 32 Outputs - Connector M12, SI Unit Output Polarity: -COM, Stations: 16 Stations, P, E Port Entry: Both Sides 2~16 Stations, SUP/EXH Block Assembly: Internal Pilot, A, B Port: ø10 One-touch Fitting, Mounting: -, DIN Rail Option: -

Enclosure: W (IP67), SI Unit: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 16 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: C10 (ø10 One-touch Fitting)

V100

/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3 28.6 7.1 Manual override (For C6, C8) M5 X 0.8 external pilot port 10.5 (Only external pilot style (R)) (For C10) (For 02

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

CATALOG

ANA1-C08 8 11 5 58 16 ANA1-C10 10 15 13 76 22 ANA1-C12 12 33 19 95 25 ANB1-C06 6 8 5 52 16 ANB1-C08 8 13 12 73 22 Notes: To install threaded versions screw in hand tight then wrench tighten 1/ 4 turn only.

0.01

(C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02) SFD100SFD200326 Related Products Mist Separator AM Series Refer to pages 223 to 230 for details.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3 28.6 7.1 Manual override (For C6, C8) M5 X 0.8 external pilot port 10.5 (Only external pilot style (R)) (For C10) (For 02

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.

New

C10, C12 Replacement Parts DIN Connector Part No.

Intrinsically Safe Valve

/N.O. 0.39 0.46 1.4 0.28 0.40 Double 1/4 Note) [ ]: Indicates normal position C10 10 Onetouch fitting Single 53-SY9 20-C10 2position 6.1 1.9 0.28 0.33 1.4 7.9 Double C12 12 Onetouch fitting Single 2position 53-SY9 20-C12 7.0 2.2 0.25 0.41 1.6 8.6 Double 4 Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position single L-type plug connector (L) 53-SY5120-L-01 (-F2) With foot bracket 53-

V

A D W I R E SY3/5/7000 SY 20 B R A C K E T S E R I E S Without Bracket F1 With Foot Bracket F2 With Side Bracket 3 SY3000 5 SY5000 7 SY7000 A, B P O R T S I Z E C O N F I G U R AT I O N Symbol Port Size Applicable Series Metric (mm) M5 M5x0.8 SY3000 C4 One Touch Fitting 4 SY3000 C6 One Touch Fitting 6 SY3000, SY5000 01 PT 1/8 SY5000 C8 One Touch Fitting 8 SY5000, SY7000 02 PT 1/4 SY7000 C10

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

VVQ2000-51A-C8 VVQ2000-51A-C10 Note) When replacing a pilot valve assembly only, note that SY114 (G, H, L, M) cannot replace SY115 (DIN terminal) or vice versa.

5 Port Solenoid Valve Series SV

Specification SV2000 SV1000 SV4000 SV3000 Applicable series Manifold type Tie-rod base manifold 1(P: SUP)/3, 5(E: EXH) type Common SUP, EXH Valve stations (maximum) 20 stations Max. number of solenoids 32 points Port size 1(P)/3, 5(E) port C10, N11 C8, N9 C12, N11, 03 C12, N11 C4, C6, C8 N3, N7, N9 C3, C4, C6 N1, N3, N7 C8, C10, C12 N9, N11, 02, 03 C6, C8, C10 N7, N9, N11 4(A)/2(B) port Flow

VDW30/40-XF

Rz 3.2 or less for sheet surface 500 Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Dimensions VDW30-G--C4 C6 /One-touch fitting for 4, 6 VDW40-G-/One-touch fitting for 8, 10 C8 C10 36 30 21 23 Approx. 300 32 17.5 20 Approx. 300 27 56 48 10 9 18 21 3 3 21 23 26 A A C4, C6 1 (IN) port C4, C6 2 (OUT) port C8, C10 1 (IN) port C8, C10 2 (OUT) port Dimentions A 3

5 Port Air Operated Valve Series SYA3000/5000/7000 1

0.82 3.8 0.26 0.86 3.2 0.34 C10 ( ) 0.70 [0.56] 0.59 0.25 0.27 0.59 0.67 2.7 [2.0] 2.4 0.38 [0.38] 0.21 2.8 One-touch 3 position 189 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 0.61 0.25 [0.31] 0.89 [0.61] 2.3 0.38 Note) [ ]: Denotes normal position.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

0.82 3.8 0.26 0.86 3.2 0.34 C10 ( ) 0.70 [0.56] 0.59 0.25 0.27 0.59 0.67 2.7 [2.0] 2.4 0.38 [0.38] 0.21 2.8 One-touch 3 position 189 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 0.61 0.25 [0.31] 0.89 [0.61] 2.3 0.38 Note) [ ]: Denotes normal position.