Model: Side Ported, Type: None, Valve Stations: 10 Stations, P,E Port Entry: Both Sides, SUP/EXH Block Assembly: Internal Pilot, A,B Port Size: ø10 One-touch Fitting, Straight, Metric, Mounting: -, DIN Rail Option: -

Enclosure: IP67, SI Unit: EtherCAT - 32 Outputs - Connector M12, SI Unit Output Polarity: -COM, Stations: 10 Stations, P, E Port Entry: Both Sides 2~16 Stations, SUP/EXH Block Assembly: Internal Pilot, A, B Port: ø10 One-touch Fitting, Mounting: -, DIN Rail Option: -

Enclosure: IP67, SI Unit: EtherNet/IPâ„¢ - 32 Outputs - Connector M12, SI Unit Output Polarity: -COM, Stations: 10 Stations, P, E Port Entry: Both Sides 2~16 Stations, SUP/EXH Block Assembly: Internal Pilot, A, B Port: ø10 One-touch Fitting, Mounting: -, DIN Rail Option: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 10 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: ø10 One-touch Fitting, Mounting Method: -

Model: 10S (Side Ported), SI Unit: ZE (EtherNet/IPâ„¢, Negative Common), Input Block Stations: None, Input Block Type: w/o Input Block, Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: B (Both Sides, 2 to 24 Stations, Internal Pilot), A,B Port Size: C10 (ø10 One-touch Fitting, Straight, Metric)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C10 (ø10 One-touch Fitting)

SI Unit: 1A3N (32 Outputs, 1 to 16 Stations), Stations: 10 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: C10 (ø10 One-touch Fitting)

Enclosure: W (IP67), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 10 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: C10 (ø10 One-touch Fitting)

Model: 10 (Side Ported), Connector Type: FW (D-sub Connector, IP67, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C10 (ø10 One-touch Fitting)

Table of Contents

VFS C8, C10 2-Rc 1/8 (PE port) VS4 VQ7 EVS C8: Max. 6.5 C10: Max. 7 6-Rc 1/2 (P, EA, EB port) For wiring specifications, refer to page 3-5-8.

VQZ1000/2000/3000

P 3 5 1 PE port 2-Rc 1/8 3(R2), 5(R1) port 22.2 die-cast hole (For manifold gasket positioning) Rc 1/4 1(P) port L plug connector (L): VQZ3120 1(R)-L-C6/C8/C10/02 DIN terminal (Y): VQZ3120 1(R)-Y-C6/C8/C10/02 300 108.5 (Lead wire length) 72 Indicator light 111.5 MAX. 10 30.5 <35.5> Applicable cable O.D.

VFR

VFS C8, C10 2-Rc 1/8 (PE port) VS4 VQ7 EVS C8: Max. 6.5 C10: Max. 7 6-Rc 1/2 (P, EA, EB port) For wiring specifications, refer to page 3-5-8.

SV

Manifold Specifications SV1000 SV2000 SV3000 SV4000 Applicable series Manifold type 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) Max. number of solenoids Tie-rod base manifold Common SUP, EXH 20 stations 32 points 1(P), 3/5(E) port C8, N9 C3, C4, C6 N1, N3, N7 C10, N11 C4, C6, C8 N3, N7, N9 C12, N11 C6, C8, C10 N7, N9, N11 C12, N11, 03 C8, C10, C12 N9, N11, 02, 03 Port size 4(A)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

10.5 24 (58) VZ (C10) (02) VF VFR 38.5 31.5 24.5 2.5 VP7 3 7 23.4 Mounting holes 48 VP4 45.5 10.5 (58) Foot bracket 15 15 1.5 1.5 P 3 VQ 5 1 PE port 2-Rc(PT)1/8 R port VQ4 22.2 Die cast hole For manifold gasket positioning Rc(PT)1/4 P port VQZ VQD 0 1 0 1 DIN connector (Y): VQZ312 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ312 (R)wLwC6, C8, C10, 02 VZS 107.5 <108.5> 300 VFS (Lead wire

Fieldbus System

10 13.5 (7.5) 25 C10: 10 One-touch fitting C10 [1(P) SUP port] 45 P = 16 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting L2 = L1 10.5 L3 = 16 x n1 + 73.8 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 57 L7 = 47 x n2 + 85.8 C10 [1(P) SUP port] (Double sided type: C12) C10: 10 One-touch fitting (C12: 12 One-touch fitting) L1:

V100

/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3 28.6 7.1 Manual override (For C6, C8) M5 X 0.8 external pilot port 10.5 (Only external pilot style (R)) (For C10) (For 02

CATALOG

ANA1-C08 8 11 5 58 16 ANA1-C10 10 15 13 76 22 ANA1-C12 12 33 19 95 25 ANB1-C06 6 8 5 52 16 ANB1-C08 8 13 12 73 22 Notes: To install threaded versions screw in hand tight then wrench tighten 1/ 4 turn only.

0.01

(C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02) SFD100SFD200326 Related Products Mist Separator AM Series Refer to pages 223 to 230 for details.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3 28.6 7.1 Manual override (For C6, C8) M5 X 0.8 external pilot port 10.5 (Only external pilot style (R)) (For C10) (For 02

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.