New

D-G

Plug-in Unit

U-side end plate assembly !8 U-side end plate assembly part no.

Electric Actuator

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Stroke (mm) Model 200 300 400 500 700 600 800 900 1000 1200 1500 2000 3000 LEJB40 LEJB63 D ) D D D ) ) D D D D ) ) D D ) ) D ) D D D D D 3: Strokes other than those shown above are produced as special order (1 mm increments). For auto switches, refer to pages 19, 20.

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

10

Auto Switch Proper Mounting Height (Standard type) [mm] Auto switch model D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-F5NT D-Y59l D-Y7P D-Y7lW D-Y7BA D-Z7l D-Z80 D-M9l D-M9lW D-M9lA D-A9l D-A9lV D-M9lV D-M9lWV D-M9lAV D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-G39 D-K39 D-A3l D-A44 Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23

CM2

/B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-C7/C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C D-B59W D-A3A D-G39A D-K39A D-A44A D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-A3A D-G39A D-K39A D-A44A D-G5NTL

AWG

B K P C C C U K P O A A S H L to C U S O H L to B D !

IIIIIII

T 4.41 lbs. (2 Ko) P T 0.06 in. (1.5 mm) o.T o.oE in (2.o mm) T.T. 0.14 in. (3.5 mm) '75 PSIG (5 Kgf/cm2) A B D E F a H b u 5 (153.7) 4.87 (123 7l 1.57 (40) 1 . 1 8 {30t ).87 t22l u.4i, ( 1 1 ) J.75 (i 9) ).12 (3) ).43 :1 1) Millimeters in Parenlheses r.u.F, 4.41 rbs {2 Ko} t ' l 0.06 in. (1 5 mm) O T 0 08 in. (2 0 mm) 0.14 4n. (3.5 mm) .75 PSIG (5 Kgl/cm2) A B C D E F G H o , t ( (1s6 7)

Mechanical Valves Series NVM, NVFM, NVZNI

T 4.41 lbs. (2 Ko) P T 0.06 in. (1.5 mm) o.T o.oE in (2.o mm) T.T. 0.14 in. (3.5 mm) '75 PSIG (5 Kgf/cm2) A B D E F a H b u 5 (153.7) 4.87 (123 7l 1.57 (40) 1 . 1 8 {30t ).87 t22l u.4i, ( 1 1 ) J.75 (i 9) ).12 (3) ).43 :1 1) Millimeters in Parenlheses r.u.F, 4.41 rbs {2 Ko} t ' l 0.06 in. (1 5 mm) O T 0 08 in. (2 0 mm) 0.14 4n. (3.5 mm) .75 PSIG (5 Kgl/cm2) A B C D E F G H o , t ( (1s6 7)

0.55

Conduit terminal: VP3185-T A B DIN terminal: VP3185-D A B Conduit terminal with indicator light (TL) Light Light position Max. 11 Applicable cable 6 to 12 [ ]: With indicator light (TL) 1500 Made to Order: Series VP3145/3165/3185 Main Valve Double Acting Type: -X80/X81 How to Order 1 D Z A N X 06 5 1 4 VP31 81 CE-compliant Body size CE-compliant Nil 4 6 8 1 2 Q Electrical entry: D/DO only

Compressed Air Preparation Filter

E G J M N Q R S T U V B AFF20-D/AM20-D/AMD20-D 1/8, 1/4 40 142.3 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 159.6 AFF30-D/AM30-D/AMD30-D 1/4, 3/8 53 178.1 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 219.8 AFF40-D/AM40-D/AMD40-D 1/4, 3/8, 1/2 70 223.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 263.3 AFF50-D/AM50-D/AMD50-D 3/4, 1 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5

Manifold Specifications

assembly DIN rail VZ5000-51A-1U e VFN For D side, set with w VZ5000-52A-2D r VZ5000-52A-1U For U side End block assembly t VZ5000-52A-1D For D side End block assembly y VZ5000-52A-2U End block assembly For U side, set with e u VZ5000-51A-1M Without D-sub connector, For indicated location P/R port with One-touch fitting for 10 SUP/EXH block assembly i To add a manifold block assembly, add

Manifold Specifications

1U For U side End block assembly t VZ3000-52A-1D For D side End block assembly y u VZ3000-52A-2U For U side, set with e End block assembly VZ3000-51A-1M Without D-sub connector For indicated location SUP/EXH block assembly i To add a manifold block assembly, add it to the U side so that the terminal number of the D-sub connector and the valve link position will be in accordance with the circuit

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

U Main circuit Main circuit Main circuit Main circuit Black OUT1 Black OUT1 Load U U + 12 to 24 VDC + Main circuit Main circuit Main circuit Main circuit Black OUT1 Black OUT1 Load Load Load 12 to 24 VDC U 12 to 24 VDC + 12 to 24 VDC + White OUT2 White OUT2 Load Load Load U White OUT2 White OUT2 Load Load U Blue DC () Blue DC () Load Load U Blue DC () Blue DC () Max. applied voltage:

Process Valve Series VNA

23 Q 5 D VO307 00 Q CE compliant CE compliant 5 D SF4 5 D 23 Note) Electrical entry: D or DZ only Note) Electrical entry: D or DZ only VO301 00 With surge voltage suppressor Manual override Coil rated voltage Coil rated voltage None Surge voltage suppressor (Except DZ, DL) Nil Non-locking push type Non-locking push type A (projecting) Nil 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

side U side 1 2 3 stations Valves are numbered from the D side.

Vacuum Manifold for fieldbus system

D side U side -22No. ZKJ-OM00201-D 7.5.

HEC_W-E

This item is applicable U n i t N u m b e r M O D E < 0 only when multiple units are used. 2. Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.

CG1

Mounting Position (mm) Mounting Height (mm) CP95 Auto switch model D-G5NTL D-G59F D-H7C D-G5BAL D-C7,C8 D-H7 D-H7W D-H7F D-H7BAL D-B5,B6 D-B59W D-G5, K5 D-G5W D-K59W D-B5,B6 D-C7,C8 D-C73C D-C80C D-H7W D-H7F D-H7BAL D-G5 D-K5 D-G5NTL D-B59W D-H7 D-H7C C95 D-C73C D-C80C D-G5W, K59W D-G59F D-G5BAL C92 Bore B 18 (26) 18 (26) 19 (27) 21.5 (30.5) 26 (38) 26 (38) B 19.5 (27.5) 19.5 (27.5) 20.5

Vacuum Unit Ejector / Vacuum Pump System

Exploded View of Manifold Individual wiring (3)Tension bolt (2) End plate U (1) End plate D (6) (4) (5) (7) U side Single unit for manifold (8) (Individual wiring specification) D side Common wiring (9) -37No. ZK2-OM01301 7.2. How to Increase Manifold Stations 7.2.1 Individual wiring specifications 1) Remove two tension bolts. 2) Remove the end plate U.