CP95

x 1 4 15 4 4 4 6.5 26 146 190 46 32.5 M12 x 1.25 40 6.5 16 105 24 13 35 16 27 G 1/4 14 M6 x 1 4 17 4 4 4 9 30 163 213 52 38 M16 x 1.5 50 8 16 106 32 16 40 20 31.5 G 1/4 15.5 M8 x 1.25 6 24 5 4 5 10.5 37 179 244 65 46.5 M16 x 1.5 63 8 16 121 32 45 16 20 31.5 G 3/8 16.5 M8 x 1.25 6 24 5 4 9 12 37 194 259 75 56.5 M20 x 1.5 80 10 16 128 40 45 21 38 25 G 3/8 19 M10 x 1.5 8 30 5 4 11.5 14 46 218

Table of Contents

22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 16.5 Note) 19 21.5 23 Without auto switch

MGQ

x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E 30 st or less Over 30 st A A Symbol Symbol DB DB Stroke Stroke Bore size (mm) 12 16 20 25 Bore size (mm) 12 16 20 25 50 st or less Over 50 Over 50 50 st or less 30 st or less Over 30 st 43 39 4 6 8 16 0 55 49 43 6 8 10 22 0 65 57 10 61.5 10 12 27 14.5 0 74

MLU

NG NH NH1 NI NJ NS NY P S ZZ ZZ1 NF Model 10 12 14 18 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M6 x 1 depth 12 49 57.5 60 72 5.5 5.5 6 7 14 14 15 18 MLUB25 MLUB32 MLUB40 MLUB50 14 15.5 16 21.5 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 4.3 5.1 6.9 8.7 6 6.5 8 10 30 35.5 37.5 44 19 22 22.5 28 3.5 3.5 3.5 3.5 6 6 9 9 76 87 87 102.5 26 28 36

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Maximum tightening torque (Nm) Maximum screw-in depth l (mm) Maximum tightening torque (Nm) 1.2 1.2 2.1 Maximum screw-in depth l (mm) Bolt Model Bolt Model 6 6 6 5 8 2.1 2.1 2.1 4.4 7.4 M4 x 0.7 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 MXPJ6 MXP6 MXP10 MXP12 MXP16 MXP10 MXP12 MXP16 3 4 6 M3 x 0.5 M3 x 0.5 M4 x 0.7 Caution Side mounting with shock absorber is not available. 8-8-4 4 Series MXP Specific

Floating Joint

Flange type Foot type Allowable Model Applicable bore size (mm) Rotating Ambient eccentricity U (mm) Operating pressure angle temperature Standard/Thread nominal size JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 6 10 10, 15 15 20 25, 32 40 50, 63 80 100 125, 140 160 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6

Industrial Filters

FGDT/F(L250) Replacement case assembly FGDT/F(L500) FGDC/E(L250) FGDC/E(L500) 25 A FGD Series Dimensions FGDA (1 element) FGDB (2 elements) 108 108 2 x Rc 2 x Rc AIR VENT M6 AIR VENT M6 OUT IN OUT IN B A FGDT FGDF B A DRAIN DRAIN G1/4 G1/4 Element removal dimension: 50 mm (mm) A B Model Element length Port size Rc 314 346 A (L250) FGDC FGDE 574 606 B (L500) 3/8, 1/2, 3/4 314 349 A (L250)

MHx-OMZ0005

JMHZ2-16D-X7400B-HC10-(*) P13P14P15 4 M6 31.5 2XM4x0.7 8 4 M6 108.8L 4 4 M4 4 M3 27 17 10 - JMHZ2-16D-X7400B-HC10DT-(*) 4 M6 32.5 8 4 M6 109.8L 4 4 M4 4 M3 27 17 11 - 3-6. M8 8 M8-Molex P .19 NPN PNP No. 1 +24V DC24V 2 GND DC0V 3 ON/OFF() 4 ON/OFF() 5 () 6 () 7 8 Molex (51227-0800) M8 8 12 - 3-7.

CG1

(102) 90 (102) 108 (122) 108 (122) 8 10 12 16 20 20 25 30 13 17 17 19 27 27 32 41 24 29 18 22 22 30 35 35 40 40 15.5 35 40 40 50 58 58 71 71 M4 X 0.7 Depth 7 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 11 11 11 12 13 13 201 to 350 10 (12) 19.5 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 301 to 400 10 (12) 19.5 27 32 32 37 37 M5 X 0.8 Depth 8 35.5 44 55 69 80 301 to 450 10 (13) M6

CU

Tightening torque Bore sizes (mm) Hexagon socket head cap screw (mm) Proper tightening torque (Nm) Piston rod lateral load (Graph 2) 20, 25 32 M5 M6 5.10 10% 8.04 10% 5.00 4.50 4.00 Selection Caution 3.50 Lateral load (N) 3.00 32 2.50 1. Operate the cylinder to the stroke end.

AC

#15 SAC5000, #15 B240 B340 B440 B540 B640 AF3000, AL3000 AFM3000, AFD3000 B340A 32 8 39 1.5 40 35 6.5 53 2.3 22.5 3.25 4.5 19 M5 X 10 l (Hexagon socket head cap screw) AF4000, AL4000 AFM4000, AFD4000 B440A 38 47 2 54 47 8.5 70 2.3 31.5 4.25 5.5 20 10.5 M5 X 10 l (Hexagon socket head cap screw) AF4000-06, AL4000-06 B540A 38 47 2 54 47 8.5 70 2.3 27.5 4.25 5.5 20 10.5 AFM4000-06, AFD4000-06 M6

MHL2

+0 052 0 Depth 1.5 M5 X 0.8 (Finger closing port) M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) G 65 28.2 4-M6 X 1 H (Piston rod and rack screw) 6.5 1 11 15 10 24 14 Width across flats 10 20 46 24 (4 locations) A (70) 30 24 24 10 30 12.5 12.5 Closed E 54 Open F 17 17 4-M6 X 1 through (Thread for mounting attachment) A B C D E F G H 54 96 116 J 120 195 235 Model

VM

N.C. common type (With VM430) X102 01 Port size Rc 1 8 NPT N01 1 8 G F01 1 8 Dimensions Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket mounted Panel mounted 2-6.5 hole Mounting screw M6 x 1 x 12 Rc 1/4 Spare tank connecting port processing possible 4-M6 thread

VM

N.C. common type (With VM430) X102 01 Port size Rc 1 8 NPT N01 1 8 G F01 1 8 Dimensions Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket mounted Panel mounted 2-6.5 hole Mounting screw M6 x 1 x 12 Rc 1/4 Spare tank connecting port processing possible 4-M6 thread

Profile Design ISO/VDMA Air Cylinder Series CP95

6 M10x1.25 10 27 16 94 40 24 35 16 G1/4 14 M6 6.5 M12x1.25 13 27 16 105 50 32 40 20 G1/4 15.5 M8 8 M16x1.5 16 31.5 16 106 63 32 45 20 G3/8 16.5 M8 8 M16x1.5 16 31.5 16 121 80 40 45 25 G3/8 19 M10 10 M20x1.5 21 38 16 128 100 40 55 30 G1/2 19 M10 10 M20x1.5 21 38 16 138 4 4 4 6.5 26 146 190 46 32.5 15 4 4 4 4 9 30 163 213 52 38 17 4 6 4 5 10.5 37 179 244 65 46.5 24 5 6 4 9 12 37 194 259 75

Smooth Cylinder Series CQSY

47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke. 3

Plate Cylinder with Lock Series MLU

KA H2 K MM MM1 NA NB NC ND NE NG NH NH1 NI NJ NS NY P S ZZ ZZ1 NF Model 10 12 14 18 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M6 x 1 depth 12 49 57.5 60 72 5.5 5.5 6 7 14 14 15 18 14 15.5 16 21.5 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 4.3 5.1 6.9 8.7 6 6.5 8 10 30 35.5 37.5 44 19 22 22.5 28 3.5 3.5 3.5 3.5 6 6 9 9 76 87 87 102.5 26 28 36

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

Compact Hydraulic Cylinder Series CH
KGB

x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 68 56 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40 79 65 14 22.4 19 16 M12 x 1.75 15 8 10 M10 x 1.5 20 50 85 70 15 28 24 21 M16 x 2 20 9.5 11.5 M12 x 1.75 24 63 95 77 18 35.5 31 27 M20 x 2.5 24 11.5 14 M16 x 2 24 80 109 88 21 45 39 36 M27 x 3 33 15 17 M18 x 2.5 27 100 132 106 26 56 48 41 M30 x 3.5 36 17.5 22

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

type) Bore size (mm) D Double acting 12 16 20 25 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa 1.0MPa 0.04MPa 0.035MPa Without auto switch: 10 to 70C With auto switch: 10 to 60C 1 to 200mm/s Specifications Ambient and fluid temperature Piston speed Piston rod diameter Bore size (mm) 10(Relieving type) 11(Vacuum type) 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6