1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !9 @2 @6 $4 A section B section (Release piston bushing) (Piston guide bushing) 100 80 63 50 40 50, 63, 80, 100 @9 !2 !2 Description Material Note Component Parts Description Material Note No. No.
MGC Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGF D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C CY1 BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MY1 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order
Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08 8
R ZZM 06 06 R Multi-ejecter Common SUP port location Port and silencer location Series ZM Manifold Nil Both sides Number of stations R Right side L Left side B Both sides Right side Left side R L 01 1 station Right or left to the VAC port Right or left to the VAC port 05 5 stations Common EXH port size 10 10 stations (Max.) 04 06 1 2 3 4 Thread type S Silencer for ZZM (ZZM-SA) Nil Rc NPTF
3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
DC (+) 1 NC 2 Flow direction DC () 3 OUT 4 8 Digital Flow Switch for Water Series PFW How to order 20 03 27 PFW7 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Wiring specifications 1l/min=0.0353SCFM 3m lead wire with connector Without lead wire Nil N Thread type Rc NPT G Nil N F Output specifications 27 67 NPN (2 outputs) PNP (2 outputs) Piping port size 03 04 06 3/8 1
Thread type Common EXH port size 04 1/2 Nil T F Rc NPTF G 06 3/4 S Silencer dedicated for ZZMA (ZZM-SA) Indicate the ejector model no. below the manifold base no. Example) Manifold model no.: ZZMA04-SR (1 pc.)
AC220V 220V DXT170-176-2-04 (+) () AC240V 240V DXT170-176-2-07 NO.2 (-) DC6V 6VD DXT170-176-3-51 AC DC12V 12VD DXT170-176-3-06 NO.1 DC24V 24VD DXT170-176-3-05 DC48V 48VD DXT170-176-3-53 () NO.2 DC AC DC NO.1 (+) NO.2 (-) 9 No.VEX-OMY0001 VEX3 VEX3 50,70,90 DIN DIN 1) DIN DIN () 2) 3) 4) No. 1 2 1) DIN + 2) 1) 0.5Nm15% 2) 68mm 3) Y 68 () 1) () AC100V AC200V 2)
Nil N Port size Size Applicable model Flow rate (l/min) Symbol Output specification 40 4 16 3/8 1/2 3/4 PFW704, PFW720 PFW720, PFW740 PFW740 03 04 06 NPN open collector 2 outputs PNP open collector 2 outputs 27 67 Specifications PFW720 PFW704 PFW740 Model Measured fluid Water Karman vortex Detection type 2 to16l/min 0.5 to 4 (setting is 0.6 to 4) l/min 5 to 40l/min Flow rate measurement
Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.
1 3 Port Air Operated Valve Series VGA342 How to Order SA 04 VGA342 A VA Port size Passage A Normally closed (N.C.) B Normally open (N.O.) Thread type Nil Rc F G N NPT T NPTF 04 1/2 06 3/4 10 1 SA VA JIS Symbol VM N.C. N.O.
Refer to back page 50 for Safety Instructions and pages 543 to 546 for Flow Control Equipment Precautions. 603 AS Series How to Order 2 2 0 01 06 W2 AS 1F Body size 2 1 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard 3 4 Metric size Applicable tubing O.D.
6 Body size If more than one option is required, write option part numbers in the order of K, N. 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size (1) 4 6 8 10 12 04 06 08 10 12 Electroless nickel plated (3) Brass PBT PBT/Stainless steel NBR NBR NBR NBR NBR NBR NBR/Stainless steel Electroless nickel plated Elbow type Control method Meter-out Meter-in 0 With One-touch fitting
Description ARJM104, 6, 10 Manifold base How to Order ARJ1020F-M5-06 ARJ1020F-M5-04 M5 ARJ 20 10 F 04 1 Option Miniature regulator 1 Set at 0.2MPa Port size Only the adjusting spring is different from standard.
How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.
(mm) Note) Type 04 06 08 10 12 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Made to Order (For details, refer to page 659.) Control type Note) For applicable tubing O.D. selection, refer to the Model.
port) (257) 112 Rc 1/4 56 165 56 Reset button RESET FLUID OUT PROCESS PUMP 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (Pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 17-5-152 13 Process Pump Air Operated Type (External Switching Type) Series PA3000/5000 How to Order VC 1 1 PA 3 03 3 PA3000 VDW VQ Port size Body size VX2 3 5 03 04 06 3/8 standard
1/4 5 Process Pump Air Operated Type (External Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F, N are order