ISA2

36 n Stations 1 Left Right 1 46 2 84 38 3 122 38 76 4 160 76 114 5 198 114 152 6 236 152 190 Stations L1 L2 L3 63(Max. 65) 34 5 17 Detection port 19 For the bracket attachment position, refer to page 16-8-16.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

VEX1

Refer to p.5.3-1 for details. 5.1-36

VFA3000

(2) 02 03 VFA5420 -X1 3 position exhaustcenter 0.43 1 8 32.4 (1.8) 41.4 (2.3) 02 03 VFA5520 -X1 3 position pressuretcenter 0.43 1 8 32 (1.8) 14.8 (0.8) 36 (2) 15.3 (0.85) 02 03 VFA5144 2 position single : 0.51 02 03 04: 0.56 34.2 (1.9) 34.2 (1.9) 33 (1.8) 36 (2) 45 (2.5) 52 (2.9) 02 03 04 1 8 3 8 1 2 1 4 , , : 0.52 02 03 04: 0.57 1 8 45 (2.5) 52 (2.9) VFA5244 2 position double 02 03 04 3

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Using other combinations could lead to bumed coils or other types of malfunctions. 3A 36 VJ10 ZP (Applicable to 110 VAC only) ZCU 4A 20 VJ10 (Applicable to DC only) AMJ Lead wire length Note) If ordering a valve with 600 mm or longer lead wire, indicate the valve without connector and connector assembly. Ex.) Lead wire length: 1000 mm ZM-K1LO . 1 pc. VJ10-36-1A-10 . 2 pcs.

ZR

Vacuum release Vacuum valve/Release valve SOL.a ON OFF SOL.b OFF ON When power supply is stopped vacuum valve/vacuum release valve will hold the operation. 13-3-36 36 Series ZR Large Size Vacuum Module: Vacuum Pump System Function Plate: ZR1-RV3 A function plate is used when each connecting port for the valve unit is common.

Direct Solenoid

D ENSIONS A B c D E F 2.66 (67.5) 2.42 (61.5) (14) 0.28 17', 0.16 (4) 1.42 (36) ,ltrF-l rD C Solsnoid DIN "Electricrl Connector" 'AC" Vottage only ml--l l "*---l-l I .f;T.

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 3 5 5.5 6.5 8.5 9.5 19 22 36 38 42 44 76 82 Model D1 Applicable tubing O.D. d AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 D2 D3 D4 L1 L2 L3 L5 L6 L7 L8 M1 MIN. 18.4 21 21.7 22.7 25.4 26.5 28.2 29.5 33.6 34.4 36 37.1 44.1 45.1 3.2 5 6 25.4 36 37 39.5 40.7 42.5 53.2

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

25.1 8 33.8 10-32 UNF 16.5 26.1 21.3 11.4 3/16" 11.7 13.5 23.1 18.3 12 1/4" 16 1/8" 27.5 20.4 9.3 12.7 5/32" 17 13.4 12.7 NPT 1/8 16.5 14.2 31.1 24 30.2 32.1 27.1 13.2 3/16" 35.2 19 17 31 23.9 13.2 1/4" 21 18.5 32.4 13.4 25.3 15.2 5/16" 16 34.4 25.2 10.4 5/32" 32 16.5 34.5 17.7 25.2 12.8 3/16" 17.5 NPT 1/4 34 17 18.5 34.5 25.2 13.2 34.9 34.4 29.4 1/4" 39.9 18.5 36.4 27.2 17.7 15.2 5/16" 36

CLA

i.\4 L, Material: Free cutting sulfer sleel Malenal: Cast lion -NX A 1 ~ 1-05 50-63 74 27 28 60 M18X 1.5 15.5 2Q 121'0711 1 ~ Y-04d 40 22 24 55 M1 4X 1.S 13 25 12171) 1 6'j-~ 38 p .OS 80 91 37 36 71 M22Xl.5 225 26 18,&070 281l V. SO-63 27 28 60 M' 8Xl .5 15 27 12'870 1 6 ~f 38 ~10 100 105 37 40 83 M26Xl .S 24.5 28 20-8-08< 3():gJ Y-08d 80 37 36 71 M22Xl .S 19 28 181. 010 28!

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1 21.3 18.3 11.7 16 27.5 20.4 9.3 12.7 17 14.3 32.1 31.1 27.1 16.5 18.5 21 16 17 18.5 30.2 31 32.4 34.4 34.2 34.5 36.4 43.2 23.1 23.9 25.3 25.2 24.9 25.2 27.2 33.9 14.2 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 36.1 12.7 NPT 1/8 19 21 15 32 18.2 34 34.4 35.4 29.4 18.5 40.4 17.5 NPT 1/4 36

Compact Hydraulic Cylinder

8 36 20 14 50 + Stroke 55 + Stroke 5 47 CH2 2 x Rc 1/8 (port size) CHA Related Products 32 to 100 D2 x P (port size) H with effective thread depth C 4 x N through hole 8 x O counter bore F F I D M E Z K M E J B + Stroke A + Stroke L Note) The auto switches above are shown for a D-M9(W) solid state auto switch.

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knuckle joint Press-fit spring pin 3 x 22 L 10 +0.022 H8 0 13 Press-fit spring pin 3 x 22 L Shaft: 10 Hole: 10 13 0.040 d9 0.076 +0.022 H8 0 24 24 C7 C7 30 +0.5 +0.2 12 0.1 0.3 12 41.2 26 24 18 36 36 D48 48 Please contact SMC for details of the CKGA32 series.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5 38 43.5 50.5 59 69.5 Hs 24.5 27 30.5 35 40.5 47.5 20 25 32 40 50 63 80 100 Note 1) Values in parentheses are for the long stroke

SMC Pneumatic Clean Series

31.5]<40.5> 27.5[39.5]<51.5> 27.5[39.5]<51.5> Hs 24.5 27 30.5 35 40.5 47.5 B 20.5[36.5] 20.5[36.5] 21.5[37.5] 23.5[32.5]<41.5> 28.5[40.5]<52.5> 28.5[40.5]<52.5> Hs 24.5 27 30.5 35 40.5 47.5 20 25 32 40 50 63 80 100 (mm) D-K59 /G59 A 33 33 34 31(40) 38(50) 38(50) 48 48 D-B54 A 31.5 31.5 32.5 29.5(38.5) 36.5(48.5) 36.5(48.5) 46.5 46.5 Bore size B 16[32] 16[32] 17[33] 19[28]<37> 24[36

42

Note 4) When multiple symbols are specified, indicate them alphabetically. 3m 499 B VQ5000 Series Kit (D-sub connector kit) F Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) 107.8 83 29.5 29.5 1/8" PE. port 12 21 36 47.5 PE R2 5 R1 3 1 P SMC 3/4" 1(P), 5(R1), 3(R2) port 179 106 61 83.5 For U side mounting (FU) 9 9 55.5 M5 x 0.8 Ground screw U side 34.5 n 12 X 3/8",

7

VX3 Tightening Torque for Piping VXA Connection thread Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 Recommended Unacceptable 28 to 30 Fig. 2 Binding tubes with bands 36 to 38 Wiring 4. When connecting piping to a product Avoid mistakes regarding the supply port etc. Warning 5.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

CQM

HS A B Reed switch D-A7H D-A80H Solid state switch D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL 32/40/50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs 32 40 50 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore size (mm) Solid state switch D-P5DW A B HS (mm) D-P5DW

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,