CL

16 90.5 14 15 10 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28 4 5 4 M8 x 1.25 41 5 15 30 24 20 M20 x 1.5 38 22 19.5 127 9 14 198 207 20 33.5 7 5.5 45 7 M10 x 1.25 6 15 30 30 24 27 M26 x 1.5 41 24 137 9 14 212 221 25 37.5 45 7 5.5 7 M10 x 1.25 6 15 30 34.5 27 24 M26 x 1.5 41 24 139 9 14 214 223 32

REA/REB

from cylinder shaft center Lo (cm) RZQ 25 15 40 500 500 MI W S 300 300 200 200 CEP1 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3

REA/REB

driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC

Series AP500

(0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) Code psig/bar unit MPa unit Code Range Standard Sub-atmospheric No code M V X No code No gauge port No pressure gauge (Connections: 1/4 inch face seal male) HR No code A 0 5) Not available with AP1402T and AP1406T. 1) Only available with AP1402T. -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160

C95

244 259 300 320 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 15 17 24 24 30 32 4 4 5 5 5 5 30 35 40 45 45 55 32 40 50 63 80 100 Refer to pages 6-12-8 to 6-12-11 for dimensions with mounting bracket and accessories. 6-12-15 16 Refer to page 6-16-1 for details on auto switches.

Applicable Auto Switch Model

DC() Blue(Black) Dimensions Operation Range ( l Dimension) (mm) Bore size 6 4 10 5 5 Actuator series 63 50 20 25 32 40 15 16 5 5 5 CDJ2 CDVJ3, 5 CDLJ2 CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, REC CDG1, MGG RSDG MGC RHC, MLGC 5 5 5.5 6 7.5 7 7 7 5 5 5.5 6 6 6 5 5 4 5 4 5.5 4.5 Note) Average value at normal temperature including hysteresis.

Slider Type Ball Screw Drive/11-LEFS Series

0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

IIIIIIIIII

F-4200-.5 F-4200-2 F-4200-5 F-4200-15 F-4200-30 F-4200-60 F-4200-100 .05 .2 .5 .5 .5 .5 1 .5 2 5 15 30 60 100 15 30 30 45 60 120 120 .05 .1 .4 1.0 1.8 3.5 3.5 .15 .3 .8 1.6 2.4 5.0 7.5 3A 10A 10A 10A 10A 10A 10A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4200BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID

MHZ

5@1@2@3 MHZ-A0603 MHZ2-6S MHZ-A0603C wio!0!2!3!5@0@2@3 MHZ2-6C 12-2-30 30 Parallel Style Air Gripper Standard Type Series MHZ2 Construction: MHZ2-10 to 40 Double acting/With fingers open Single acting/Normally open !1 e !9 w @0 @1 !4 MHZ MHF MHL i !7 !6 !5 !0 o q u !2 r t y !3 Single acting/Normally closed MHR !8 MHK MHS MHC Double acting/With fingers closed MHT MHY MHW MRHQ Misc.

MHZ

5@1@2@3 MHZ-A0603 MHZ2-6S MHZ-A0603C wio!0!2!3!5@0@2@3 MHZ2-6C 12-2-30 30 Parallel Style Air Gripper Standard Type Series MHZ2 Construction: MHZ2-10 to 40 Double acting/With fingers open Single acting/Normally open !1 e !9 w @0 @1 !4 MHZ MHF MHL i !7 !6 !5 !0 o q u !2 r t y !3 Single acting/Normally closed MHR !

C85

4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 10 13 38 26 4 20 6 40 30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 12 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 16 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 20 20 66 46 6 32 8 66 50 6.6 40 42 17 19 40 5 25 19 6.6 36 54 5 8 25 24 66 46 6 32 8 66 50 6.6 40 42 17 23 40 5 25 23 6.6 40 54 5 8

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

5 !6 !7 !

7ND9071en

Input: Ui 30 V. Output: Ui 30 V.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30 L/min 1.5 to 31.5 L/min 5 V 20 mA 30% 70% PF2M750 92% 8% 1 to 100 L/min 5 to 105 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 1 to 60 L/min 3 to 63 L/min 5 V 20 mA 30% 70% PF2M711 * When changing the max. analog output, use the analog free span function on page 28

MXS Series Air Slide Table

(With stroke adjuster at retraction end) 6 6-M5 X 0.8 thread 8 deep 2 (With stroke adjuster at extension end) 30 30 76 46 58 FF 22.5 F 25 5H9 5 deep +0.030 0 N -1 x F 2 5H9 5 deep +0.030 0 27 2-M6 X 1 thread 13 deep 13 M 0.5 45.5 50 Z ZZ (NN-1) X H G H 29 11.5 29 11.5 A B 9.5 5.1 11 11 30 1.5 A B 5H9 5 deep +0.030 0 6 NN-M6 X 1 thread 12 deep 5H9 5 deep +0.030 0 HA GA Cross section AA Cross

Air Fittings & Tubing

5 32 19 19.5 3 16 3.5 16.5 10 11.4 4.6 1 4 17 10 20.5 13.2 6 27.5 18.5 5 16 12 23.5 15.2 21 17 25.5 7 3 8 17.9 30 Note1) D1: max. diameter Extended male elbow: KQ2W Tube O.D.

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

HRX-OM-S004

10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-5 Cooling capacity(HRS100-A-20/40/46-) 8.4.2 HRS150-A-20/40/46: Ambient temperature: 32 oC : Ambient temperature: 40oC : Ambient temperature: 45 oC 18 18 16 16 14 14 Cooling capacity [kW] Cooling capacity [kW] 12 12 10 10 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10

Environment

Nil Without cable 2 2 5 5 A 10 !

VM

Metal Spool Dimensions Side piping: 30 x 53 x 91 Bottom piping: 30 x 48 x 91 VR4152 INDEX Mechanical Valves Page Series VM1000 P . 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle