Pneumatic Purification

512 5.5 6.0 23.6 78.7 55.1 19.7 19.7 460/3/60 2-1/2 NPT 174 R134a 680 3 1/2 PDE180-S 654 5.7 6.2 23.6 78.7 55.1 19.7 19.7 460/3/60 2-1/2 NPT 174 R134a 790 3 1/2 PDE200-S 742 6.2 7.0 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE 3 150 174 R134a 890 3 3/4 PDE260-S 1007 7.5 8.5 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE 3 150 174 R134a 990 5 PDE310-S 1200 7.8 8.8 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

O

N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P11) ( current ) pressure di spl ay Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Press key Current Vol t age i nput t ype Preset i nput t ype i s di spl ayed i s di spl ayed Press key Press key i s di spl ayed i s di spl ayed r e f e r

O

N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P11) ( current ) pressure di spl ay Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Press key Current Vol t age i nput t ype Preset i nput t ype i s di spl ayed i s di spl ayed Press key Press key i s di spl ayed i s di spl ayed r e f e r

ITV-E

N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P11) ( current ) pressure di spl ay Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Press key Current Vol t age i nput t ype Preset i nput t ype i s di spl ayed i s di spl ayed Press key Press key i s di spl ayed i s di spl ayed r e f e r

CC-Link-E

RW w 1 U nused RW r1 U nused RW w 2 U nused RW r2 U nused RW w 3 U nused RW r3 U nused O ut put dat a occupi es 4 w ords, but uses onl y t he 1st w ord act ual l y. The pressure i s set by b15, b1, b0 dat a. ( b11 b0 cover 100% F. S. ) The l i m i t i s 1198h, dat a of 110% , but t he guarant eed accuracy i s up t o 100% F. S.

TABLE OF CONTENTS

U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Compact manifold regulator ARM5 Series

side OUT side Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y 4, 5/32 2.5 6 11 35.5 2.5 6 11 35.5 4, 5/32 2.5 6 11 37.5 2.5 6 11 37.5 6 3 6.5 11 36 3 6.5 11 36 6 3 6.5 11 38 3 6.5 11 38 1/4 6.5 6 11.5 38.5 6.5 6 11.5 38.5 1/4 6.5 6 11.5 40.5 6.5 6 11.5 40.5 710 Regulator/

CQS

3 Single acting Spring return Single acting Spring extend CQSB20-S-PS CQSB20-T-PS 20 20 from the table above. CQSB25-S-PS CQSB25-T-PS 25 25 Seal kits consist of item !3 contained in one kit, and can be ordered using the kit number for each respective tube bore size. Seal kits consist of items !2, !3 and !

RSQ

3 !2 !1 w o @0 !7 i !9 !

ZP

Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Stroke length tolerance 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed +1.4 0 Mounting Basic/Axial foot/Flange 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Refer to page 889 for the applicable auto switch list.

Model Selection 1

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

Vacuum Pad: Ball Joint Type

width across flats 3 E D C 3 2 A B Stroke: 20 to 50 mm Dimensions: 10 mm Stroke A (mm) B C D E F H I J Model ZPR20F10-0-A14 20 22 12.5 15.5 29.3 58.5 46.5 126.5 ZPR25F10-0-A14 25 28 50 ZPR32F10-0-A14 13 16 29.8 59 47 32 35 127 Additional Dimensions by Stroke (mm) (mm) Q: 6 Q: 8 Model H I J R S R S Stroke ZPR20F10-0-A14 20 +10 3 0 ZPR25F10-0-A14 30 +20 +7 12.8 24.3 15.2 26.2 ZPR32F10-0-A14

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Application Example qBlow off valve (SYJ llR) 3 5 7 wValve for vacuum control eOperation of a single acting cylinder rDivider valve (SYJ llR) tSelector valve (SYJ llR) yPressure release Valve (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ ll/SYJ ll R) X port X port X port X port X port Tank Tank 0.2MPa (R)3 2(A) (R)3 2(A) 2(A) (R)3 2(A) 2(A) 2(A) (R)3 (P)1 (R)3 (R)3 (P)1 Plug

Lightweight and Compact

20 s Max.

MQQ

10 to 80C Cushion Rubber bumper (Standard) Lubrication (2) Not required (Non-lube) Rod end thread tolerance JIS Class 2 +1.0 0 Stroke length tolerance Standard type 0.5 mm/s to 1000 mm/s (Refer to page 10-5-7.) (3) Piston speed H (High speed/High frequency type) 5 mm/s to 3000 mm/s (Refer to page 10-5-7.)

MQQ

10 to 80C Cushion Rubber bumper (Standard) Lubrication (2) Not required (Non-lube) Rod end thread tolerance JIS Class 2 +1.0 0 Stroke length tolerance Standard type 0.5 mm/s to 1000 mm/s (Refer to page 10-5-7.) (3) Piston speed H (High speed/High frequency type) 5 mm/s to 3000 mm/s (Refer to page 10-5-7.)

Cylinder with Lock Series CLS

(Example) CDLSL140-100 3 wire (NPN equiv.)

Low Profile Guide Type

Find the value of m max at 300 mm/s in Graph (7) for m4. M1 = m x g x L1 = 3 x 9.8 x 0.05 = 1.47 [Nm] 2. Static moment Investigate M1. Find the value of M1 max at 300 mm/s in Graph (1). 2a =M1/M1 max =1.47/14 =0.105 M1 L1 M3 = m x g x L2 = 3 x 9.8 x 0.04 = 1.176 [Nm] m x g Investigate M3. M3 Find the value of M3 max at 300 mm/s in Graph (3). 2b = M3/M3 max = 1.176/14 = 0.084 L2 m x g 3.