Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Dimensions 1 2 3 4 5 6 7 8 (mm) K J 5 6 E F n L1 L2 Note 2) The above dimensions are for ZQ1 3M2 .

Secondary Batteries

Example) 90-AW30K-03B-1N q w e r t y Series compatible with secondary batteries 90 Material restriction q Symbol Body size Description 30 40 60 w K With backflow function With backflow function + Nil N F Thread type Rc NPT G e + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 r Port size + Nil B Note 2) Note 1) Mounting Without mounting option With bracket With set nut (for panel fitting) a Option t H +

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

CM2

, #3 SCM225A, #3, #19 CM2L32SCM232A, #3 SCM232A, #3, #19 CM2L40SCM240A, #3 SCM240A, #3, #19 The data shows auto switch equipped styles.

VCL

K L A B C D E F M N Grommet: G Conduit: C Conduit terminal: T Model Q R Q R Q R S U 13.5 28 64 12.5 31 6.5 M4 27 14 12.8 4.5 22 59 44 50 99 50 66 83 VCB21 18 36 67.5 1/4 31 8.5 12.5 M4 27 18 12.8 6 22 62 44 53 99 53 66 86 22 40 81.5 1/4, 3/8 11 15 36.5 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 86 30 50 1/2 15 13.5 36.5 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 17 41

MHZ

6 r t u q @3 !3 @0 !9 !8 y Single acting/Normally closed @1 Double acting/With fingers closed Replacement Parts Description Material Note Component Parts Description MHZJ2-6 Main parts No. Hard anodized Seal kit @2@3@4@5 MHZJ6-PS Aluminum alloy Body q CR MHZJ2-J6 Stainless steel Piston w Material FKM Heat treated Dust cover !

MHZ

9@0@1 Seal kit MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ2-D MHZ2-S MHZ2-C MHZ2-DW MHZ2-K MHZ2-M MHZ2-E rty!1!3 Mounting screw MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MHZ-A4003 MHZ-A3203 MHZ-A1003 MHZ-A1603 MHZ-A2003 MHZ-A2503 Piston assembly wo!0!

Dual Rod Cylinder Series CXSJ/CXS

3 !0 @2 ut !5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

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NPT, G) ,'" r .r "'" ',.. 1-::' : H I-::' r-Q Q , .J w =i" ~ I ~ ~ K F H -NJ ..!L M Stroke S + Stroke ZZ + Stroke (mmJ oS~((lr.;~ r;ilMg9 ' .:a6ra'~~ FT FZ 'AL QIl B E F FD FX FY G J 11 Ii. DC 0 " : '(mm~ .

Air Cylinder

3 !1 K !6 K !7 e !5 o !0 i !2 !8 u w @0 !9 t !4 y Rod end lock K @1 K With auto switch Component Parts No. Description Material Note No.

Modular Type Regulator Series AR

Specifications Applicable models X465 ISE30---L 0.1 to 1 0.001 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Part number suffix Model Set pressure range (MPa) Model AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K)AR60(K) 3/4, 1 1 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 1/8, 1/4 Port sizes Pressure switch Set and display resolution (MPa) Power supply voltage