SMC Corporation of America
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Maximum load current 800 mA AC/DC or less1 Contact output signal 1, 2, 3, 4, 5, 6 Minimum load current 5 VDC 10 mA Output voltage range 0 to +10 V Analog output signal 1, 2 Maximum output current 10 mA Output accuracy 0.4% F.S. or less Output voltage 24 VDC 10% 200 mA MAX1 (No inductive load) When using this products power supply, connect pin 1 to pin 2 and the COM side of each contact input

1 t q r e A A B !6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46

E D C ZL 3 2 ZY Dimensions: 10 mm Stroke A B (mm) J H F D C E A B I Model ZQ ZPR10F10-0-A10 10 12.5 39.5 10 12 23.4 50.5 84.5 With a stroke of 10 mm ZPR13F10-0-A10 13 15 23 ZF 10.5 13 40 23.9 51 85 ZPR16F10-0-A10 16 18 ZP S (mm) M14 x 1 ZCU Q: 4 Q: 6 Y Model R S R S Hexagon width across flats 19 AMJ ZPR10F10-0-A10 1.5 I 5 ZPR13F10-0-A10 10.4 20.6 12.8 21.6 Misc. 2 ZPR16F10-0-A10 Additional

Nil Without cable 1 1.5 3 3 5 5 8 8* A 10* B 15* C 20* LEPY LEPS LER *1 The standard cable should be used on fixed parts.

Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Bronze, Brass, Ceramic, Carbon, PP , PE, POM, EPDM, PVC Power supply Single-phase 100 VAC 50/60 Hz Allowable voltage range 10% Fuse A 15 Power cable size Note 10) 3 cores x 14 AWG (2.0 mm2), 3 m Electrical system Applicable earth leakage breaker capacity Note 7) A 15 Rated operating current (50/60 Hz) Note 3) A 7.1/

Bolt 14.50.1 14.50.1 Manually unlocking Lock ring 1) Remove the dustproof cover. 2) Screw the commercially available bolt (M3 x 25 L or more) into the lock ring shown on the left and raise the lock ring toward the head side. 3) The lock ring and piston rod form a right angle, and the lock is released. (29) LOCK 27 Head side 70 D d 0 0.05 Q Q K SR C 120 45 15.5 14.5 26 (4) MK 8 to 10 14 14

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C HEB Cooling

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2

50 30 20 20 Usable range 10 10 10 Usable range Usable range 5 5 5 1 0 1 2 3 4 5 6 10 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 1 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 80 REAR40 50 40 30 REAR32 REAR25 20 Load weight

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

45 (n=2, 4, 6) Note 3) 10 60 15 (n=2, 3, 4, 5) D-C73C D-C80C D-H7C D-B5/B64 D-G5NT (n-2) 2 65 + 50 (n-2) 15 + 50 (n=2, 4, 6) Note 3) 10 65 15 (n=2, 3, 4, 5) (n-2) 2 75 + 55 (n-2) 15 + 50 (n=2, 4, 6) Note 3) 10 75 15 (n=2, 3, 4, 5) (n-2) 2 75 + 55 (n-2) 20 + 50 (n=2, 4, 6) Note 3) D-B59W 15 75 20 (n=2, 3, 4, 5) 35 + 30 (n-2) 100 + 100 (n-2) D-A3A/G39A D-K39A/A44A 10 100 35 (n=2, 3, 4, 5) (

Q Q Q Q Q Q Q Q Q Q Q Q Q Q MXH Series 6, 10, 16, 20 The use of a recirculating linear guide produces a slide table with excellent rigidity, linearity and non-rotating accuracy.

3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Kit no. 10 CU10S-PS 16 CU16S-PS 20 CU20S-PS Seal kit includes @3, @4.

0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !0 3 position pressure center (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i Parts list Material Description No.

Example) 90-AW30K-03B-1N q w e r t y Series compatible with secondary batteries 90 Material restriction q Symbol Body size Description 30 40 60 w K With backflow function With backflow function + Nil N F Thread type Rc NPT G e + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 r Port size + Nil B Note 2) Note 1) Mounting Without mounting option With bracket With set nut (for panel fitting) a Option t H +