PFxx-OMJ0005CN

F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02

JXCx-OMU0004

RESET B 8.3 P.41 RESET C OFF I/O STOP OFF OFF 8.5 ONP.44 RESET C D RESET C RESET D 66 No.JXC-OMU0004-A (M24V) RESET D RESET D 3.4 P.14 (C24V) RESET D RESET D ( E ) 67 No.JXC-OMU0004-A E ON E BK RLS E EEPROM EEPROM E 10 CPU CPU E 68 No.JXC-OMU0004-A 13. / 50mm ( ) 5m 5m 10% 15m 20% 69 No.JXC-OMU0004-A 14. / 14.1.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 707 Series ARP20/30/40 Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 765 ARP20/30/40 Series Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

3 Way,3 Port Solenoid Valve NVZ Series

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

(V), D-A93(V), D-A96(V) Auto Switch Specifications D-A96 D-A90 D-A90V D-A93 D-A93V In-line D-A96V Auto switch part no.

LG1H

D: Resting time (0.4sec.)

PF-OMN0009_C

A B C D E F Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008-2014 SMC Corporation All Rights Reserved No.PF-OMN0009CN-F

Gun Type Ionizer

Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 9 Direct Operated Precision Regulator/Modular Style Series ARP20/30/40 Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K V P2 Pressure gauge port size B R Bleed port F S D U N Bracket (Option) J M T Panel fitting dimension Y The dimensions for special applications (not including

Ejector Valve Unit, Series ZYY/ZYX

Note 2) V, S and R specifications are 45T or 45T1 only.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

R.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

R.

XL-OMV0002

Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

R.

Series 12-REA Sine rodless cylinder

1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x

Digital Gap Checker

.: 600 kPa 1: Compared with the ISA2 with 0.2 MPa pressure gauge.

Precision Regulator

0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.