Process Pump

(Inch) 1/8" x 0.086" 1/8" 1/8" x 1/16" 3/16" 3/16" x 1/8" 1/2" 1/2" x 3/8" 3/8" 3/8" x 1/4" 1/4" 1/4" x 5/32" Refer to Best Pneumatics No. 7 for further details. 13 Series PB Applicable Fluids Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers.

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

double (Latching) VQC (A) 4 (B) 2 (A) 4 (B) 2 SQ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Metal seal Rubber seal 2 VQ0 2 position double (Double solenoid) (1) Lead wire is not included.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

15

5 !1 @4 !2 !3 @1 !8 !7 !6 $4 !9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !0 @8 @6 #5 #3 @5 $2 #7 #6 With bumper bolt CY1SG/Centralized piping type For 6 For 6 $0 #9 23b 29b $0 #9 #4 $1 $3 With bumper bolt With shock absorber 1502 Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing CY1S Series Component Parts No. No.

PA3000/5000/PAX1000

1/4 5 Process Pump Air Operated Type (External Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F, N are order

Dedicated Controller

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

MGP

4 q@5 @3 !9!2@5 !1 !7 i @6 !0 r @4 e o t w @7 !0 y CL 16: 25 stroke 20, 25: Under 75 stroke MLGC !8 CNA !3 16: Over 50 stroke CB 25 stroke CV/MVG 20, 25: Over 100 stroke @1 @0 @2 20, 25: Over 50 stroke CXW CXS Cushion valve section CXT MGPM32 to 100 MGPL32 to 100 MX @5 i !6 !5 u q !4 !2 @3 !9 !1 !7 MXU @6 !0 t @4 @7 @5 @8 !

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 1/8 88 64 62 62 143 113 111 107 42.5 34.5 30 24 13.5 10.5 10.5 10.5 47.3 37 37 30 M26 x 1.5 M26 x 1.5 M20 x 1.5 21 19.5 19.5 15.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 26-0.033 0 32-0.039 0 82 36 10 8 M32 x 2 The bracket is shipped together.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Applicable auto switch model No. of auto switches mounted D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 1 pc. 5 2 pcs. 5 5 5 10 10 8-8-9 9 Series MXP Table Deflection Table Displacement due to Pitch Moment Load Amount of displacement on A when load is applied on F . Table Displacement due to Yaw Moment Load Amount of displacement on A when load is applied on F .

Modular Type Filter Regulator Series AW

Environment Ambient temperature Fluid temperature X430 Low temperature 30 to 60C 5 to 60C (with no freezing) Special NBR Aluminum die-cast FPM 5 to 60C (with no freezing) Rubber parts Main parts Material Applicable models Applicable models AW40 AW40-06 AW30 Model Model Port size AW20 AW30 AW40 AW40-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Port size 1/4, 3/8, 1/2 3/4 1/4, 3/8 How to Order How

3

Note 9) Setting is only possible for models with the unit selection function. 5 min interval: life is calculated as 5 min x 1 million = 5 million min = 9.5 years 2 min interval: life is calculated as 2 min x 1 million = 2 million min = 3.8 years If the accumulated flow external reset is repeatedly used, the product life will be shorter than calculated life.

CJ2X/CUX/CQSX/CQ2X/CM2X

REC 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 7 12 Air flow (l/min (ANR)) 38 Controlled flow CX 0.1 0.2 Effective area (mm2) 0.6 CY 100 180 230 260 390 460 Flow rate (l/min (ANR)) Free flow 1.5 2.7 3.5 4 6 7 Effective area (mm2) MQQ M Note) Supply pressure: 0.5 MPa, Temperature: 20C In-line Type RHC Air Flow/Effective Area MK(2) AS2001FM

CJ2X/CUX/CQSX/CQ2X/CM2X

REC 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 12 7 Air flow (l/min (ANR)) 38 Controlled flow CX 0.2 0.1 Effective area (mm2) 0.6 CY 100 180 230 260 390 460 Flow rate (l/min (ANR)) Free flow 1.5 2.7 3.5 4 6 7 Effective area (mm2) MQQ M Note) Supply pressure: 0.5 MPa, Temperature: 20C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

LV50-OMQ0002

The minimum electrical conductivity for fluids for this sensor is 5uS/cm. Conductivity of tap water is 100 to 200S/cm. E Electric conductivity This means "full span" or "full scale", and indicates varied analogue output range at rated value.For example, when analogue output is 1 to 5 V, F.S.=5[V] 1[V]=4[V]. (Reference: 1%F.S. = 4[V] 1% = 0.04[V]) F F.S.

Serial Transmission System Series EX250 Series EX500

(SD0) Without input block With 1 input block 0 1 Ports 2, 4 size (inch) Ports 2, 4 Symbol N7 N9 N11 NM Ports 1, 3, 5 1/4" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting Mixed 8 With 8 input blocks 1: 1/2 3, 5: 3/4 Note) When an AS-i compatible S kit is used, there is a limit on the maximum number of stations.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage. 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 3 position pressure center 3 position pressure center (B) 2 (A) 4 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) Made to Order (For details, refer to pages 79 through 80.) 47 Series SYJ7000 Flow Characteristics/Weight Flow characteristics Note 1) Weight (g) Note 2,