VQ4000 Nil N T F Rc NPT NPTF G Combination of manifold options shown below and external pilot specification is not possible.
h 9 l 16 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot In the case of w/o air cushion, it comes with rubber bumper.
h 9 l 16 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot In the case of w/o air cushion, it comes with rubber bumper.
Seal kits consist of items 12, 13, 14 and 16 contained in one kit, and can be ordered using the order number for each respective tube bore size. 13 Series MB1W Standard Type MM MM G VW 2-Rc(PT)P G Cushion valve Port Basic type/(B) E D D E e MB Effective thread Effective thread 13 f 16 h 9 2 x 4-J N F l H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot MM 2-Rc(PT)P G G
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
X Tank capacity 1000 Relief time that is read t = 2000 1000 = X 23 = 46 The result is 46S. From the above, the relief time is 263=23S 5.1-5 VEX1 Construction/Operation Principles/Component Parts [1] When A port pressure is high. [3] When A port pressure is low.
FOOl alldilional options F Flan e T, Center trunnion Applicable auto swnch J32 32mm 40 40mm 50mm 63mm BOmm "so , 63' * Re!el lO tabIt be!o'lr fo, se!
Guide shaft mounting surface n = 1 + 2 + 3 + 4 = 0.20 + 0.24 + 0.13 + 0.16 = 0.73 n = 0.73 1 Therefore it can be used. 8-17-5 5 Series CYP Model Selection 3 Caution on Design (2) Table Deflection Note) Table deflection due to pitch moment load Table deflection due to yaw moment load Table deflection due to roll moment load Guide central axis F A F F L L A L Guide central axis A M1 = F x
a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP
G, C and D [First angle projection] Mounting style (L) XA + Stroke SA + Stroke Mounting style (F, G) Head side mounting (G) ZF + Stroke Rod side mounting (F) Mounting style (C) Mounting style (D) XD + Stroke Bore size (mm) E1 R W MF ZF FB CD EB L XD UB CB EW MR TR AO AT XA SA AH AB TF UF E2 32 32 16 10 130 10 12 142 26 48 7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145 12
G, C and D [First angle projection] Mounting style (L) XA + Stroke SA + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting style (F, G) Head side mounting (G) ZF + Stroke Rod side mounting (F) Mounting style (C) Mounting style (D) XD + Stroke Bore size
DataA: Inlet Air Temperature F 80 90 100 110 120 130 140 149 C 27 32 37.8 43 49 54 60 65 IDFB60/IDFB70 1.33 1.21 1.00 0.78 0.61 0.48 0.38 0.28 IDFB80/IDFB90 1.38 1.38 1.00 0.83 0.63 0.50 0.45 0.37 DataB: Ambient Temperature F 80 90 100 110 113 C 27 32 37.8 43 45 IDFB60/IDFB70 1.16 1.11 1.00 0.78 0.71 IDFB80/IDFB90 1.40 1.22 1.00 0.88 0.83 DataC: Inlet Air Pressure psi 50 60 70 80 90 100 120
Wiring : Arbitrary display Analogue output: 1 to 5 V/4 to 20 mA External input: Accumulated value reset [F 5] FUNC terminal function setting 2 [F 0] Setting of the switching function of the flow range, display unit and switch output specifications is completed.
Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 compatible U0 U1 U2 U3 U side D0 D1 D2 D3 D side Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Kit F Kit F U0 U1 U2 D0 D1 D2 1 to 12 stations Cable length 0.6 m Cable length 1.5 m Cable length 3 m Kit L Kit L 1 to 12 stations Type of connection T1 S kit (Serial transmission
N AIR EXH FLUID IN T, F, N are options.
Note 3) It describes the grade of compressed air quality based on ISO8573-1: 1991 and JIS B 8392-1: 2000. (Refer to table on top in following page.) Mist Separator Series AM Heatless Dryer Series ID Micro Mist Separator Series AMD Application without refrigerated air dryer (Series IDF/IDU) on main line.
Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and deenergized states to the axis and right angle directions of the main valve and armature. (Value in the initial stage.) Note 2) At the rated voltage.
(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. The test was performed in both an energized and deenergized state in the axial direction and at a right angle to both the main valve and the armature. (Values at the initial period) 4 Only applicable to the power-saving circuit specification.
For VQC1000/2000 series valves, install valves with the same common specification as the common specification of your protocol.
③ Manifolds with kits other than the serial transmission kit (“S”), which includes options “F,” “L,” “M,” “P,” and “T,” do not have common polarity. Therefore, it is acceptable to mount either VQC1000/2000 positive common or negative common valves.
24 V F Black 0 V -X G Shield 649 CEP1 Series Construction 12, 20 !