AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Note 1) Body size AS-F AS-F With indicator Metric size Inch size 2 1/8, 1/4 3 3/8 4 1/2 Type Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" TMH 2 Elbow 04 4 06 6 08 8 10 10 12 12 16 16 ASD Control type Note) AS 0 Meter-out 1 Meter-in Indicator window direction AS-FE Note) Meter-out and meter-in types can be visually identified by color of the knob

Compact

Origin Note 2) Origin Note 2) When LECP2 is used.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Mounting hole 13-5-1 2 Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH How to Order Note Refer to Table (1) and (2) for the combination available for SUP , VAC and EXH port connection.

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

LECP6_C

C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5 6 17.7 2 1 18 A6 B6 (6.3) 15 16 11 30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18

Wedge Cam Operation Gripper Series MHK2

P3318113-2 P3318105 P3318105-1 P3318105-2 Note 2) 20 Dust cover Note 2) Note 2) Note 1) No. 16 to 19 is supplied in one unit for KT-packing set.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 6 6 7 12 12 15 15 7 10 12 14 17 20 26 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1W63 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4

Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

model S D-Y7W(V) D-Y59 D-Y69 D-Y7P(V) 1 Red light at ON Greeen light at ON MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 4 13 4 4 10 2 2 7 2 2 5 2 2 4 12-10-24

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

model S D-Y7W(V) D-Y59 D-Y69 D-Y7P(V) 1 Red light at ON Greeen light at ON MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 4 13 4 4 10 2 2 7 2 2 5 2 2 4 12-10-24

MHK2

MHF Note) Auto switch (Option) Solid state switch (3-wire, 2-wire) Note) Refer to page 12-13-1 for further information on auto switches.

MHK2

MHF Note) Auto switch (Option) Solid state switch (3-wire, 2-wire) Note) Refer to page 12-13-1 for further information on auto switches.

Suction cups with flange

ZXP7-PFL1 20 X1 1) Cup series 2) Cup diameter 3) Cup form 4) Cup material 5) Attachment *2 Symbol Cup Series Symbol Cup Symbol Cup form Symbol Material Symbol Attachment diameter ZP Basic 08 8 Flat Nil With (guide) attachment Bellows type for film 10 10 Flat with rib S Silicone rubber (White) *1 M With mesh attachment ZP3P packaging *2 Only applicable to the cup 13 13 B Bellows Urethane

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150

Thermo-chiller

-W-m +HRL-JK001 G1/2 G1/2 G1/2 G1/4 G3/8 G3/4 HRL-EP018 NPT thread conversion fitting set NPT1/2 NPT1/2 NPT1/2 NPT1/4 NPT3/8 NPT3/4 HRL-EP011 G thread conversion fitting set HRLE090-A-m +HRL-JK001 G1 G1/2 G1/4 G3/8 G3/4 HRL-EP012 NPT thread conversion fitting set NPT1 NPT1/2 NPT1/4 NPT3/8 NPT3/4 HRL-EP013 G thread conversion fitting set HRLE090-W-m +HRL-JK001 G1 G1/2 G1/2 G1/4 G3/8 G3/4

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

CEx-OMG0106

Data Classification & Content 45 11-1-2. Input Method 4548 11-1-3. Confirmation of Set Data 48 11-2. Program Setting 11-2-1. Input Method 4952 11-2-2. Confirmation of Input Data 52 11-3. Selection of Dip Switch 53 Chapter 12: Driving 12-1. Setting of Origin Direction 54 12-2. Adjustment of Air Balance 54 Chapter 13: Error Messages & Countermeasures 13-1. Controller 5557 13-2.