PFMB.eng

Power is supplied S S S SET (S) button Press this button to change the mode and to set a value. L Press the S button for 2 seconds or longer. DOWN () button Selects the mode and decreases the ON/OFF set value. M Setting F0 Setting F1 Setting F99 N Indicates the unit currently selected. Unit display The output will not operate for 3 seconds after supplying power.

Prevents Micro-Bubbles

S) PB PA PB SMC B PA A A B SMC SMC (mm) Dimensions (Max.

Rotary Cylinder Series MRQ Size: 32, 40 1

of an isometric acceleration movement. 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Rotation time (s/90) Moment of inertia0.0025 kgm2 Rotation time0.7 s/90, size 40 will be selected.

Air Cylinder RSQ Series Stopper Cylinder

piLl lanp lighls wh6n hlo swilches a turned ON Eran0e P$s!

FSQ seies

piLl lanp lighls wh6n hlo swilches a turned ON Eran0e P$s!

Electric Slide Table / High Precision Type 《 AC servo motor 》

1.5 5 5 100 to 120 200 to 230 200 to 240 200 to 230 200 to 240 200 to 240 200 to 240 200 to 240 200 to 240 A1 LECSA1-S A 10 A2 LECSA2-S * The length of the encoder, motor and lock B2 LECSB2T cables are the same.

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

4-channel Flow Monitor ( compatible)

(When reversed output is selected, the main screen displays n1/n2) Please refer to the "List of output modes" on page 38 for the relationship between the set values and operation. -31No.PF-OMA1011-A Function Selection Mode Function selection mode After selecting the channel, in measurement mode, press the S button for 3 seconds or longer (but less than 5 seconds), to display [F 0].

LEKF-OMZ0035

GR-S-010 (10g) GR-S-020 (20g) -11- LEKFS Motor : Parallel (AC servo motor) Component Parts Description No. Description Material Note No.

MRQ

(rad/s) : Rotation angle.(rad) 180 = 3.14rad t: Rotation time.

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

Magnetically Coupled Rodless Cylinder O senbs NCY2S Sf ide Bearing Type: 06,01 O,O1 5,025,N2,t40 How to Order Xl16Ah Hydro Xl6lHlgh sp.d X!'1 l.

NCY2 series

Magnetically Coupled Rodless Cylinder O senbs NCY2S Sf ide Bearing Type: 06,01 O,O1 5,025,N2,t40 How to Order Xl16Ah Hydro Xl6lHlgh sp.d X!'1 l.

Smooth Vent Valve

mount 40 Holding screw for main air supply (M2.5) 16 Main air suppy flow adjustment screw Initial air supply flow adjustment nut 11 Holding screw for initial air supply (M5) 82.5 9 MODEL M port M5 x 0.8 PRESS. 0.2MPa~10Pa 0.4~0.7MPa OPERATING PRESS IN Main air supply valve port TEMP. 5~60C S port M5 x 0.8 Initial air supply valve port MADE IN JAPAN (32) M S 52 (Body dimension) 65.8 (XVD2-

Process Valve

VO307-1 (Refer to the table below.) 7 Note 1) In the case of body options S and L, the materials of the part nos. e and r are as follows: (Example): VN1-A3BA However all brackets of valve element VNB 1 to 4 are made of stainless steel. (No need to add options S and L.) Note 2) Please request a factory repair.

Compact Guide Cylinder

Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

Process Pump

P Panel mount union U Union Ordering Example OUT side Tube size 4 x 3 LQ1U22-S Union SMC PB1313AS-1S07 Process pump PB1313AS-1S07 1 LQ1E21-S (Union elbow) 1 LQ1U22-S (Union) 1 LQ1E21-S Union elbow Tube size 6 x 4 Note) Fittings ordered together with the process pump will be shipped in a separate package.

VNB

Note) In the case of body options S and L, the materials of the part nos. e and r are as follows: (Example): VN1-A3BA However all brackets of valve element VNB 1 to 4 are made of stainless steel. (No need to add options S and L.)

ZSE30/ISE30

-color display (Red and green) Sampling cycle: 5 times/s Display PF2 2% F .S. 2 digit (at 25C ambient temperature) 2% F .S. 1 digit (at 25C ambient temperature) Display accuracy IF Light up when output is ON (Green) 2% F .S. or less (based on 25C) IP40 Operating: 0 to 50C, Stored: 10 to 60C (No freezing or condensation) Operating and stored: 35 to 85% RH (No condensation) 1000 VAC for 1 min

MGC

MXP MG : Kinetic energy (J) : Weight of load (kg)+Weight of moving section (kg) : Piston speed (m/s) Ek = n2 M 2 EK M n MGP MGQ MGG OUT IN Theoretical Force Unit: N MGC Operating pressure (MPa) Bore size (mm) Piston rod dia.

70pvpump

When a lot of carbon dust is generated from a compressor, it can adhere to the interior of valves and cause malfunction. 5) If a pump is operated by dried air and N2 gas, etc., the deterioration of the gaskets inside the switching valve will be accelerated and may result in substantially shortening the life span of the product.