C95

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IDX-OM-W093

IDX-OM-W093-B / Series IDF60-20-A,C,L,R,T,V IDF60-30-A,C,L,R,T,V IDF70-20-A,C,L,R,T,V IDF70-30-A,C,L,R,T,V IDF80-20-A,C,L,R,T,V IDF80-30-A,C,L,R,T,V IDF90-20-A,C,L,R,T,V IDF90-30-A,C,L,R,T,V URLhttp://www.smcworld.com/ English instruction manual can be downloaded from our URLhttp://www.smcworld.com/ SMC *1) JIS B8370 *2) ISO4414 *1) ISO4414Pneumatic fluid power Recommendations for the application

ZB-OM00301

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

A( ) A 24V 12V 100V SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 24V DC 12V DC 100V AC SOL SOL C(+) C ZNR Light DIN connector circuit with light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resistor LED: Emitting diode R: Resistor 4.3-2 Series VQ20/30 Manifold Caution Caution Valve Mounting How to Mount/Remove from DIN Rail After confirming the gasket is correctly placed under

E-P HYREG ® Series VY1 1

R port: 2-Rc 3/8, 1/2 Exhaust from the both sides for 4 stations or more. A port: n-Rc 1/4, 3/8 Note for P1 Confirm internal pilot or common external pilot by checking whether P1 has a M5 screw or not. Internal pilotP1 has no M5 screw. Common external pilotP1 has an M5 screw. Stations Dimension 2 3 4 5 6 123 169 215 261 307 107 153 199 245 291 L1 L2 14-10-17

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

(mm) Note) Type 04 06 08 10 12 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Made to Order (For details, refer to page 659.) Control type Note) For applicable tubing O.D. selection, refer to the Model.

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AC Servo Motor Driver (SSCNET Type)

[1] Power supply input terminals, L1, L2: Provide specified power supply to input terminals L1 and L2. [2] Connect the motor input terminal (U, V, W) to the driver power terminal (U, V, W).

Speed Controller with Uni One-touch Fitting AS Series

H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

Rotary One-touch Fittings Manifold Series KM

D2 L1 L2 L3 P Q1 Q2 A MB MA tube O.D.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC

C95

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AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

AS-FPQ/AS-FPG

T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Pin Clamp Cylinders

CKQ CLKQ Round type Diamond type R D CK CLK CK CLK CKQ Table 1.

Ejector Valve Unit Series ZYY/ZYX 1

Note 2) V, S and R specifications are 45T, 45T1.

1

VX021S-1-16FB 12 VDC 100 VAC 110 VAC 200 VAC C18312G6GCU None 220 VAC 230 VAC 240 VAC 24 VAC 48 VAC 24 VDC GDM2A-L5 12 VDC GDM2A-L6 100 VAC GDM2A-L1 110 VAC GDM2A-L1 200 VAC GDM2A-L2 220 VAC GDM2A-L2 230 VAC GDM2A-L2 240 VAC GDM2A-L2 24 VAC GDM2A-L5 48 VAC GDM2A-L15 With light * Select an appropriate DIN connector suitable for the coil insulation type. 7 XSA Series Specific Product Precautions