Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation
resin) JIS Symbol Type Thread type Nil T Automatically operated type built-in pulsation attenuator Rc NPTF G NPT FLUID OUT AIR SUP 2 F N AIR EXH FLUID IN T, F, N are options.
I/O size of port 1 and 2: 16 byte/16 byte for each I/O size of port 3 and 4: 2 byte/2 byte for each Unit 16/16/2/2 byte I/O size of port 1: 32 byte/32 byte each I/O size of port 2 to 4: 2 byte/2 byte for each 32/2/2/2 byte direct Data order is not swapped.
P, R ports Stations Note 4) K 01 1 station N R S T Note 5) Note 6) The maximum number of stations differs depending on the electrical entry.
Body size Nil N Body only With silencer 3 5 3/8 standard 1/2 standard For AIR EXH: AN200-02 Liquid contact body material Connection port size 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Diaphragm material Thread type 1 2 PTFE NBR Nil T Rc NPTF G NPT F N T, F, N are order made specifications.
Body size Nil N Body only With silencer 3 5 3/8 standard 1/2 standard For AIR EXH: AN200-02 Liquid contact body material Connection port size 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Diaphragm material Thread type 1 2 PTFE NBR Nil T Rc NPTF G NPT F N T, F, N are order made specifications.
standard For AIR EXH: AN200-02 Liquid contact body material Connection port size 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Diaphragm material Thread type 1 2 PTFE NBR Nil T Rc NPTF G NPT F N T, F, N are order made specifications.
-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C.
ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.
Cylinder driving valve: OFF t Drain valve Open Close 1 2 3 4 5 Stops pressure feed. w Air supply valve: Close t Drain valve: Open r OUT side valve: Open e IN side valve: Open Back flushing switch OFF ON The M/C stop signal and a signal for element clogging (differential signal switch) are used to start back flushing.
Insert mounting screws into the switch body, then secure it with the mounting bracket. tube thoroughly before mounting. 2. Mount the cylinder so that any load applied to the 2.
How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported
D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)
D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8
2 3 M5 1/8 IN, OUT port applicable tubing O.D.
(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.
Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output
Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output
D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)
How to Order 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 3/8 1/2 Sealant Applicable tube O.D.