ZPT/ZPX

Y 3.5 80 ZPT80H-A16 82 16.5 28 4.5 B 65 C 14.5 D 26 E 56 58 80 ZPT80H-B12 82 16.5 28 M12 x 1.75 4.5 80 ZPT80H-B16 82 16.5 28 M16 x 1.5 4.5 13-11-73 6 Series ZPT ZPT H-A16 (Male thread) 100 125 ZPT H-B (Female thread) 100 125 Hexagon width across flats 22 Width across flats 60 Width across flats 60 70 Hexagon width across flats 24 10 A B 8 A B Courtesy of Steven Engineering, Inc.-230 Ryan

ZR

(Individual spacer) Fill the number With reference from valve side, the third station from right side 13-3-28 28 Series ZR Large Size Vacuum Module: Ejector System Manifold/System Circuit Example When not using individual air pressure supply When using indivisual air pressure supply Ejector 1 Ejector 2 ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

C95Series

VDG) (4.5-28 voq Currenlconaump~on lOrnA .or less 12mA or less -Load vottaae 28 VOC --24 VOC (10-28 VDe) 24 v o e (1028 VDC) Max. load current or load current range 80mA SOmA 5-40 mA 5-40 mA I' Response time 1 mS or less 1 mS or less 1 mS or less I mS or less Output response -OffDefay lime -Internal voltage d~ 0.8 V or less 0.8 V or less 4 V or less 4 V or less Leak current 24 YDC: 10)l.A

7

BA8-032 MK2T CK1 CK1 Dimensions CLK2 CLKG 28 25 5 6 12 3 x Rc1/8 (Piping port) 3 x Rc1/8 (Piping port) CKQ CLKQ 20 4 9.5 Speed controller valve Cushion valve 4 32 CK CLK 12 4 45 45 M10 x 1.25 Max. 26.5 CKQ 12 40 26 41.5 12 Width across flats 36 R12 +0.5 +0.2 12 0.040 d9 0.076 Shaft: 10 Hole: 10 28 26 +0.022 H8 0 41.2 38 5 20 34 + Stroke 70 + Stroke 55 137 + Stroke Double knuckle joint Single

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Applicable bore size [mm] A1 D1 E1 L L1 MM ND NX NZ R1 U1 Split pin size Flat washer size Flat washer: Polished round MM Y-04D 40 22 10 24 55.5 55 M14 x 1.5 12 16+0.3 +0.1 38 13 25 3 x 18l Polished round 12 E1 NX NZ L Y-05D 50, 63 27 14 28 55.5 60 M18 x 1.5 12 16+0.3 +0.1 38 15 27 3 x 18l Polished round 12 D1 Y-08D 80 37 18 36 76.5 71 M22 x 1.5 18 28+0.3 +0.1 55 19 28 4 x 25l Polished round

CNA

Part no. 0.1 0.3 +0.070 0 12 I-04 I-05 I-08 I-10 40 50, 63 80 100 NT-04 NT-05 NT-08 NT-10 40 50, 63 80 100 16 15.5 20 69 22 24 55 M14 x 1.5 M14 x 1.5 8 22 25.4 21 0.1 0.3 +0.070 0 12 74 27 28 15.5 20 11 60 M18 x 1.5 M18 x 1.5 27 31.2 26 16 0.1 0.3 +0.070 0 18 36 22.5 26 91 37 71 M22 x 1.5 M22 x 1.5 13 32 37.0 31 28 0.1 0.3 +0.084 0 20 28 37 40 24.5 105 83 M26 x 1.5 M26 x 1.5 16 41 47.3 39

Compact Cylinder with Air Cushion

28 56 18 40 16 20 20 40 16 20 44 50.6 Y-G05 14 22 50, 63 56 0.3 0.5 +0.5 +0.3 18 IY-G08 28 80 I-G08 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 +0.070 0 Y-G08 18 28 80 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 22 IY-G10 32 100 I-G10 M26 x 1.5 M26 x 1.5 44 44 79 21 55 24 31 24 55 24 31 64 72 Y-G10 22 32 100 79 Knuckle pin and snap ring are included.

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DR1 U1 NZ NX NDH10 NL NL NO U1 NO NX R1 Part no. Applicable pin Part no.

RQ

28 56 18 40 16 20 20 40 16 20 44 50.6 14 22 56 0.3 0.5 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 IY-G08 28 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10 100 22 IY-G10 32 M26 x 1.5 M26 x 1.5 44 44 79 21 55 24 31 24 55 24 31 64 72 22 32 79 Knuckle pin and snap ring are included.

CNA

Material: Cast iron ND H10 d9 Cotter pin Applicable bore size (mm) E1 L1 MM RR1 U1 ND NX NZ L Cotter pin size Flat washer size Flat washer MM A1 Part no. 3 x 18l Y-04C 40 +0.3 +0.1 16 22 M14 x 1.5 24 55 13 25 12 38 55.5 Polished round 12 NX NZ E1 L 3 x 18l +0.3 +0.1 16 50, 63 Y-05C 27 M18 x 1.5 28 60 15 27 12 38 55.5 Polished round 12 4 x 25l +0.3 +0.1 28 80 Y-08C 37 M22 x 1.5 36 71 19 28

MTS

28 (43) 18 18 (33) 0 (15) 12 D-M9, D-M9V 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55)

HRX-OM-R005

Piping port size Table 3-5 Piping port size Name Port size1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more Faiclity water inlet3 Rc1/2 28 to 30Nm 1.0MPa more (Facility water pressure 0.3 to 0.5 MPa) Faiclity water outlet3 Rc1/2 28 to 30Nm 1.0MPa more Automatic water-fill

HRX-OM-Q026

(Supply puressure: 0.3 to 0.5 MPa) Facility water outlet port *1 Rc1 36 to 38Nm 1.0 MPa or more Automatic fluid fill port Rc3/8 28 to 30Nm (Automatic fluid fill pressure: 0.2 to 0.5 MPa Overflow port Rc1 36 to 38Nm ID 25 mm or more Length 5m or less Tank drain port Rc3/4 28 to 30Nm ID 19 mm or more *1: Water cooled type only.

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DU1 R1 NZ NX NDH10 NL NL NO U1 NO NX R1 Applicable pin Part no. Part no.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

2–4

D-F9PW D-F9PWV D-F9BW D-F9BWV D-F9NW D-F9NWV Electrical entry direction Perpendicular In-line Perpendicular In-line Perpendicular In-line 2-wire Wiring type 3-wire Output type NPN PNP 24 VDC relay, PLC Applicable load IC circuit, Relay IC, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less Caution

Compact Type

V) Power supply voltage 10 mA or less Current consumption 24 VDC (10 to 28 VDC) 28 VDC or less Load voltage 5 to 40 mA 40 mA or less 80 mA or less Load current 1.5 V or less (0.8 V or less at 10 mA load current) 4 V or less 0.8 V or less Internal voltage drop Leakage current 100 A or less at 24 VDC 0.8 mA or less Operating position Red LED lights up Optimum operating position Green LED

Clamp Cylinder with Lock Series CLK1

Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx. Ht 26 26 26 16 Series CLK1 Clamp Cylinder with Lock Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards.

Stainless Steel One-touch Fittings Series KG

17.2 10.0 5 17 10 21 27.5 3 8 KGS10-03 21 19 39.0 26.6 8 1 2 KGS10-04 28 22 20 35 23 18 1 4 3 8 KGS12-02 KGS12-03 8 27.5 22.5 33.5 29 28 46.0 19 12 22 44.5 1 2 KGS12-04 20 10 30 60.0 22 Reference dimensions after R(PT) thread installation. 122 Stainless Steel One-touch Fittings Series KG Female union: KGF Effective orifice(mm 2) Applicable tube O.D.

Series KG Stainless Steel One-touch Fittings

17.2 10.0 5 17 10 21 27.5 3 8 KGS10-03 21 19 39.0 26.6 8 1 2 KGS10-04 28 22 20 35 23 18 1 4 3 8 KGS12-02 KGS12-03 8 27.5 22.5 33.5 29 28 46.0 19 12 22 44.5 1 2 KGS12-04 20 10 30 60.0 22 Reference dimensions after R(PT) thread installation. 122 Stainless Steel One-touch Fittings Series KG Female union: KGF Effective orifice(mm 2) Applicable tube O.D.