VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

100

Thread size Recommended tightening torque [Nm] 1/8 3 to 5 1/2 28 to 30 3/4 28 to 30 1 36 to 38 Vacuum port Vacuum pressure detection port Exhaust block surface to be held (Width across flats 40) Body surface to be held (Width across flats 40) Exhaust port Branch Port Warning 1.

Digital Pressure Switch

ZSE10F: 5.0 kPa -22No.PS-OMM0005-J [F 2] Setting of OUT2 Page 28 Same setting as [F 1] OUT1.

HRX-OM-K003

Pipe diameter Table 3-3 Pipe Diameter Pipe Diameter Recommended torque (Material: SS* vs SS) Facility water inlet Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Facility water outlet Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Circulating fluid supply Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Circulating fluid return Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Tank drain port Rc3/8 (with valve) Piping not necessary

90

L Dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ZK2 SE2 A 1 No.

AC Servo Motor Driver (SSCNET Type)

(SW2-2) 1 2 For the test operation select switchSW2-1, please refer to section 4 of LECSS Operation Manual (Simplified edition). -28- 6.4.1 JOG Mode In order to prevent accidental impact at the end of the stroke, test the actuator operation at low speed. (If motor speed configuration or Acceleration/deceleration time are required, change the value.)

ZL3-OM00601

Pipe tape Leave one thread Vacuum (2/V) port Vacuum pressure sensing port (G) Surface to fix the port block (Width across flats: 40mm) Surface to fix the body (Width across flats: 40mm) Exhaust (3/E) port Port type Thread size Recommended tightening torque (Nm) Pressure sensing port (G) Rc1/8,G1/8,NPT1/8 3-5 Rc1/2,G1/2,NPT1/2 28 to 30 Vacuum (2/V) port Rc3/4,G3/4,NPT3/4 28 to 30 Exhaust (

Vacuum Gripper

25 27 16 28 29.5 34 ZPG32B-7A-X2 32 34 18.9 37 34.5 39 14 -23No.

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

Recommended tightening torque Unit: N m Thread size 18 14 38 12 34 1 1 1/4 1 1/2 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 (4) Do not apply a spanner to the pressure switch body during piping. Otherwise, the product may be damaged. (5) Do not apply torsion or bending moment other than the weight of the product itself.

Speed Controller with One-touch Fittings

D5 Applicable series AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F 9.9 13.4 11 27.5 19.5 1 3.4 3.5 3.5 ASR ASQ 3.4 3.4 4.9 7.3 12 14.8 18.3 12.6 29 21 45 11.2 1.6 15.6 19.6 1.2 17 38 28 4.5 4.4 4.4 19.6 24.6 22 43 33 4.5 4.5 6.5 9.5 15.5 24.8 29.8 1.4 28 49 39 25.7

Series VS

Interface Speed Controls Cylinder speed can be controlled by throttling exhaust air. 20 Comforming to ISO 15407-2 Series VSR/VSS8-4 How to Order Manifold (ISO15407-2) 03 SDQ VV8 01 N 1 1 N 5 W1 Option Note 1) Size Nil None 01 Size 01 Special wiring specifications (Except double wiring) K Number of stations External pilot R 1 1 station Direct exhaust with built in silencer S 16 16 stations

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Recommended Tightening Torque (Nm) Air Supply Connection thread 1/8 1/4 3/8 1/2 Caution 7 to 9 12 to 14 22 to 24 28 to 30 Torque 1. Use clean air. If chemicals, organic solvents, synthetic oil or corrosive gases are included in the compressed air, parts could be damaged or they can cause a malfunction. 2.

Digital Flow Switch (Remote type monitor unit)

Colour of cover Insulator outside diameter ZS-28-CA-4 (option) Blue 1.15 to 1.35 ZS-28-C-1 Yellow 1.0 to 1.2 : The standard value of the insulation outside diameter of AWG No.23 is 1.14, but ZS-28-CA-4 is recommended as an applicable connector, taking outside diameter error into consideration. Do not cut the insulator.

Air Filter

How to Replace the Components 23-28 10-1. Bowl Assembly Replacement 23-25 10-2. Element Replacement 26-28 11. Disassembly Drawing 29 12. Dimensions 30 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Large Size Vacuum Module: Series ZR

Stations Port location R16 Arrangement (Right valve station which is looked from valve side is first station.) 01 1 Left side Right side R L B 06 6 Refer to (About individual spacer.)

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer