Micro Mechanical Valve Series VM1000

Red VM131-01-35RA VM151-01-35RA VM131U-01-35RA VM151U-01-35RA VM133-M5-35RA VM153-M5-35RA Black VM131-01-35BA VM151-01-35BA VM131U-01-35BA VM151U-01-35BA VM133-M5-35BA VM153-M5-35BA Green VM131-01-35GA VM151-01-35GA VM131U-01-35GA VM151U-01-35GA VM133-M5-35GA VM153-M5-35GA Yellow VM131-01-35YA VM151-01-35YA VM131U-01-35YA VM151U-01-35YA VM133-M5-35YA VM153-M5-35YA Note 1) It is possible

Modular Design with Uniform Body Style

MPa V V V V V 6*1 0.1 to 0.6 MPa v v v v v + Port size IN OUT OUT q e Semi-standard Nil 0.5 m V V V V V b Lead wire length r L 3 m V V V V V Z 5 m V V V V V + c Pressure unit of the scale plate Nil MPa V V V V V V: Without restrictions v: With restrictions (Refer to *1 and *2.)

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

on option V, M (non-leak, medium vacuum) Note) Dew point temperature: 10C or less 15 16 Direct Operated 2 Port Solenoid Valve Series VX21/22/23 For Air/Single Unit How to Order (Single Unit) VX 2 0 21 01 VX 2 2 21 01 1 G 1 G 1 1 Normally Closed (N.C.)

reduces flow setting time

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2

SQ1000/2000

SSQ2000 1A 3 F0 01 !3 Includes gaskets.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS22l1FG-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS22l1FG-01-03(S)A 5/32" 8.2 AS22l1FG-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS22l1FG-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS22l1FG-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 17 (18)

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

SMC Electronic Switch Series Variations

ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

HRX-OM-X071

AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

KJ

K Reducer Elbow: KQ2L M Applicable fitting size d (inch) Model L2 A M Min. port size Applicable tubing O.D.

HRX-OM-X084

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

HRX-OM-W002

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L4 L1 L2 L3 M d O.D.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS2200M-01-X214 Note) Throttle valve is only compatible with the part no. of the meter-out type. 721 AS-M Series Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.