Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1 402 338 352 430 448 VVX21 VVX22 VVX23 (mm) Grommet Conduit DIN terminal Electrical entry Conduit terminal (B) Individual SUP type A B C D E F H J K M N Model Q 49 58 63 R S 42 51 56 T U 58 62 64.5 V X 62 65 68 W Y 95 98 101 VVX21 VVX22 VVX23 38 49 49 20.5 26.5 26.5 17.5 22.5 22.5 10.5 13 13 11 13 13 25 30 30 32 40 40 36 46 46 12 15 15 7 9 9 6.5 8.5 8.5 57 (65) 66 (74) 71 (79) 19.5 22.5 25
500st 300st 400st 1 1 0.5 400st 300st 200st 300st 0.5 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 20 40 60 80 100 10 20 30 40 50 60 70 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGM 40Stroke 3 (Slide bearing type) 2.5 Deflection Y (mm) 800st 2 700st 600st 1.5 500st 1 300st 400st st: Stroke (mm) 0.5 100st 200st 0 0 20 40 60 80 100
28 28 28 28 (5.5) (5.5) (5.5) (5.5) 47.6 47.6 47.6 47.6 Note) Refer to the page 226 for dimensions of connector types. 13 SY3000/5000/7000/9000 Body Ported Dimensions: Series SY7000 [ ]: AC 2 position double Grommet (G), (H): SY7220(-F2) G H C8, N9 C10, N11 SY7220-02(-F2) G H 20 (A, B port) 1/4 (For mounting bracket) 2-M4 x 0.7 depth 6.5 20 7 31.5 [38.5] 40 24.5 One-touch fitting (A, B
B2 G F K A REB F AL NA 2 x NN Plugged (M5 x 0.8) Width across flats B1 H2 H1 I REC CY D C B 4 x LD LH CX MM N N 2 x 4 Width across flats KA 3.2 MQ S + Stroke Y X LZ LX Y X Z ZZ + Stroke LS + Stroke RHC (mm) RZQ A AL B B2 F G H H1 H2 I K KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5
B2 G F K A REB F AL NA 2 x NN Plugged (M5 x 0.8) Width across flats B1 H2 H1 I REC CY D C B 4 x LD LH CX MM N N 2 x 4 Width across flats KA 3.2 MQ S + Stroke Y X LZ LX Y X Z ZZ + Stroke LS + Stroke RHC (mm) RZQ A AL B B2 F G H H1 H2 I K KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5
, 0.7MPa 0.6MPa, 0.7MPa 20 20 MHZ2/Standard 10 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm H H MHZ 2-20 MHZ 2-20 Gripping point 100 L 80 Pressure 0.2MPa 80 Pressure 0.2MPa Overhang H mm Overhang H mm 60 MHZJ2/With dust cover 60 0.6MPa 0.3MPa 0.7MPa 40 0.4MPa 0.5MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.7MPa 40 20 20 0 20 40 60 80 0 20 40 60 80 100 Gripping point
S + Stroke M H ZZ + Stroke With rod boot 75 15 40 l h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J 125 140 160 to 1000 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 16 155 23 25 30 M14 x 1.5 to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 to 1200 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 18.5 215
port Nil TN 90 G 105 NPT 120 135 A015 C S CKZT Clamp Arm 40 Mounting hole Bore size 40 80 Equivalent Power clamp cylinder European type D1 H D2 D1 D2 H symbol S B 6 7 16 6 9 25 8 20 8 10.2 10.2 25 Bore size Only S type is available for A015 of 40. 40 80 40 Arm mounting position 80 Equivalent Right D1 D2 Offset H R A015 A045 Offset 15 Offset 45 Center D1 D2 C H Left D1 D2 L H Cylinder Specifications
VA BN N N 4-J M H S + Stroke (For NPT port) ZZ + Stroke With rod boot 75 15 40 l h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J 125 140 160 16 Up to 1000 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 155 23 25 30 M14 x 1.5 16 Up to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30 M14 x 1.5 18.5 Up to 1200 56 53 182 290
(For F, L, S, T kit) VVQ4000 2A 1 Thread type Electrical entry VVQ4000 3A 1 Thread type Electrical entry Nil Rc N NPT T NPTF F G Nil Rc N NPT T NPTF F G L F , L, S, T kit F Note 1) F kit (Connector location on U side) C C kit (Plug lead type) L F, L, S, T kit F Note 1) F kit (Connector location on D side) C C kit (Plug lead type) SV SYJ Option Option Nil Standard W Note 2) IP65 enclosure
25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69
Y RS Q G RS H A T D RZQ W U MI W S 20 (22) V M 10 (11) H + Stroke A + 2 stroke B + Stroke CEP1 CE1 RSQB Bore size: 32, 40, 50 32 40 50 2 Stroke F Q 2-P CE2 Z J ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings (20 to 50) Tubing O.D.
6H9 +0.03 depth 5.5 0 41 160 Taper thread plug with hexagonal hole 10.5 Operation direction B A 9.5 11 24 24 16 12.5 A 30.5 60 50 32.5 A Cross section AA (scale 40%) Z 5-M6 x 1 thread depth 12 4 x H G H 7 depth 5.5 6H9 +0.03 Bottom through hole 5.1 0 F E 6H9 +0.03depth 5.5 0 Model E F G H Z 87 168 75 48 337 MXW20-100 91 185 79.5 52 362 MXW20-125 Note) Adjuster bolt Y shown in the section
thread size 40-150 M40 x 1.5 45-150 M45 x 1.5 Basic Type: JA JA180 200--X530 Center of sphere M M U U D Width across flats F 60 B E H G P A R Dimensions (mm) DMaximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B D E F G H Weight (kg) Nominal size Pitch -X 180 JA180-40-150-X530 40 1.5 191 61
Note) ( ): Denotes the dimensions for long stroke. 726 Air Cylinder CG1-Z 2122CG1-Z/ 1011Rod Flange (F): CG1F, CG1F 10112122With rubber bumper FT F 4 x FD FX0.15 E 0 0.05 B FX0.15 H B (mm) FT 6 7 7 8 50 63 80 100 FD 5.5 5.5 6.6 6.6 FX 28 32 38 46 F 2 2 2 2 E 12 14 18 25 B 40 44 53 61 Bore size 20 25 32 40 30 32 2 2 58 70 9 11 9 9 40 3 82 11 11 50 3 100 14 14 76 92 104 128 Note) End boss is
40 40 (Y) (Y) 10 Operating direction (B) 6H9 +0.030 depth 5.5 0 41 160 (Hexagon socket head taper thread plug) 10.5 Operating direction (B) (A) 9.5 11 24 24 16 12.5 A 30.5 60 50 32.5 A Cross section AA Z 5-M6 x 1 thread depth 12 4 x H G depth 5.5 6H9 +0.030 H 7 Bottom through-hole 5.1 0 F E 6H9 +0.030 depth 5.5 0 (mm) Z H G F E Model MXW20-100 337 48 75 168 87 MXW20-125 362 52 79.5 185 91
LEC-CSS-L 11 13 11 11.2 (1) [W] LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] LECSS-S5 30 LECSS-S7 10 30 100 LECSS-S8 10 30 100 (2) No.PA02 No.PA02 PA02 0 0 00 100W 0.2k7kW 11k22kW 30kWMR-J3-CR55K(4) (30kWMR-J3-CR55K(4) ) 01FR-BU2-(H)FR-RC-(H)FR-CV-(H) 02MR-RB032 03MR-RB12 04MR-RB32 05MR-RB30 06MR-RB50() 08MR-RB31 09MR-RB51() 80MR-RB1H-4 81MR-RB3M-4() 82MR-RB3G-4() 83MR-RB5G-4() 84MR-RB34-
Basic style: CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G RE A B REC CX D E CY H1 MQQ M AL B1 K A N F N B C M S + Stroke H RHC ZZ + Stroke MK(2) RS Q G (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92
500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22
VQ131 (H) (Y) Voltage1 to 6 Pilot valve assembly Pilot valve assembly t t Note 1) (Y): 0.5W (H): 1.5W Note 1) (Y): 0.5W (H): 1.5W 1.10-207 Exploded View of Manifold Plug-in Unit/VQ1000 (F, P, L, S kit) Manifold block ass'y D side end plate ass'y U side end plate ass'y Housing ass'y and SI unit S kit P kit F kit L kit 1.10-208 Exploded View of Manifold Plug-in Unit/VQ2000 (F, P, L, G, S kit