HRX-OM-W032

the piping: Circulating fluid temperature: 30 This product Users equipment Serial communication Fluid discharge temperature: 30 Heat dissipation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 When only the "set circulating fluid temperature" needs to be the same as the circulating temperature supplied to the user's equipment: Use "MODE 1" of the

Free Mount Cylinder

(assuming approximately 30% dispersion.)

PFxx-OMJ0005CN

L/min [F 2] 27 [ ] 3% [H_2] (OUT2) PFM7100.3 L/minPFM7250.8 L/min PFM7501.5 L/minPFM7113 L/min [F 3] [FLU] [Air] N2 28 [F 4] [rEF] [Anr] 29 [F 5] [rES] [1 . 00] 1 s 30 [F 6] [dSP] [inS] 31 [F 7] [inP] [r_r] 32 [F 8] [drE] [1E2] 100 35 [F 9] [PrS] [oFF] 36 [F10] [EEP] [oFF] OFF 38 [F11] [AFL] [ on] 39 [F12] [Eco] [oFF] 40 [F13] [Pin] [oFF] 41 [F98] [ALL] [oFF] 42 [F99]

SX

Nil Rc Blanking plate assembly G F N NPT NPTF T C 51 80.8 97 B 26 53.8 70 A Effective area 14 mm2 Series SX3000 (8) Model AN203-KM8 AN200-KM10 AN300-KM10 16 26 mm2 22 SX5000 (10) 30 mm2 25 Series Assembly part no. SX3000-75-1A SX5000-76-1A SX3000 SX5000 Plug These are inserted in cylinder ports or SUP/EXH ports which are not being used.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A Groove Cover For 200 VAC: SY100 30 2A Pin Cover Groove For other voltages of AC: SY100 30 3A DC polar indication Lever Pin Without lead wire: SY100 30 A -+ Socket Lead wire length Nil 6 10 15 20 25 30 50 (with connector and 2 of sockets only) 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lead wire

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

For detailed specifications, refer to page 8-30-1.

RSQ

Rod end configuration Bore size (mm) Symbol Specifications Round bar, Chamfered type Roller type Lever type with shock absorber -XA Change of rod end shape 12 10 10 -XC3 Special port location 16 10, 15 10, 15 -XC18 NPT finish piping port 20 10, 15, 20 10, 15, 20 32 10, 15, 20 40 20, 25, 30 20, 25, 30 20, 25, 30 50 Auto Switch Mounting Bracket Part No.

MQQ

Action D Double acting Cylinder stroke Bore size (mm) Standard stroke (mm) Mounting Bore size 10, 20, 30, 40 10 Through hole & double end tapped (standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) 10 16 20 25 28 10mm 16mm 20mm 25mm 28mm 10, 20, 30, 40, 50, 60 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 28 Note

VFR

Note 2) Min. operating frequency is once in 30 days.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) A a B C d E F G GA J K M MA MM NA P R S T V W H ZZ D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 23 10 60 44 18 45 25 14 17.5 M8 x 1.25 18 13 20 M14 x 1.5 30 1/4 37 114 11 7.5 8 66 246 17 50 25 9 73 53 20 50 28 17 17 M10 x 1.5

Wedge Cam Operation Gripper Series MHK2

Holding Force MHK2-12D MHK2-12D 25 20 Pressure 0.6MPa Pressure 0.6MPa 20 Holding force N Holding force N 15 0.5MPa 0.5MPa 15 0.4MPa 10 0.4MPa 10 0.3MPa F F 0.3MPa 5 5 0.2MPa 0.2MPa 0 0 1N = 0.2248 lbf = 0.102 kgf 1MPa = 145 psi = 10.2 kgf/cm2 10 20 30 40 10 20 30 40 50 50 Holding point L mm Holding point L mm O. D. holding MHK2 series I.

4-channel Flow Monitor ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.

VQ7-6/7-8

) 38(53) 32(42) 1 23(30) 2-3/8, 1/2, 3/4 30(42) 30(42) X(PE) port 1/8 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 3/8, 1/2, 3/4 R1, R2 port P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-25 26 Series VQ7-8 Construction DIN Terminal Type Metal seal Rubber seal type VQ7-8-FG-SVQ7-8-FG-S-R !

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

External force F applied in axial direction of the cylinder at the cushion seal contact point F = Mg sin = 50 x 9.8 x sin 30 = 245N 30 Mg 5.

CS1

60 20 29 56 49 60 86 25 to 1200 1 M64 X 2 140 330 330 270 400 212 475 23 M30 X 1.5 76 80 30 33 70 96 60 20 30 65 49 to 1200 With auto switch/125 to 200 only (mm) (mm) W/o rod boot W/ rod boot W/o rod boot W/ rod boot Style Bore (mm) Stroke range (mm) Style Bore (mm) S S ZZ e f h ZZ1 H ZZ ZZ1 l 125 140 160 180 200 125 140 160 180 200 250 300 to 1000 98 75 40 110 222 133 0.2 Stroke 245 98

Series SV

5 50 l 31.3 14.9 30 5 34 50 48 l 5 1 2 1 2 5 4 3 4 3 Socket connector pin arrangement Socket connector pin arrangement Terminal no.

Modular Type Regulator Series AR

BG F 1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04

15

Model LEY25 (Top/Parallel) LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250 300, 350, 400 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 LEF Note 2) Horizontal 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Work load [kg] LEJ Force [N] Note 3) (Set value: Rated torque

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

51

64 74 16 20 22 30 36 46 28 28 28 30 36 46 43.4 48 59.4 71.4 86 105.4 CS1 Up to 300 Up to 300 Up to 300 CS2 Up to 300 Up to 300 Use a thin wrench when tightening the piston rod.