Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 100mm, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: 3m, Number: -

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 150mm, First Stroke: 100mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 3 pcs.

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 80mm, Auto Switch: M9PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: 1.0m Cord Length, M8-4 Pin Connector, Number: -

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 150mm, First Stroke: 100mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 70mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 150mm, First Stroke: 100mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 50mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector), Number: 3 pcs.

Table of Contents

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

ZP

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

MY1

100) (80 and 100) (80 and 100) Black zinc chromated Seal list No.

MY1

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

ZP

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

C95

80 200 200 63 100 80 100 100 50 40 100 100 Load weight: m [kg] Load weight: m [kg] CJ1 63 50 40 30 50 40 30 32 50 40 CJP 20 20 32 CJ2 10 10 CM2 5 4 3 5 4 3 C85 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 C76 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ CG1 Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa MB 1000 1000 100 80 MB1 500 400 300 500 400 300 63 63 63 100 80 CP95

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

Compact Cylinder with Air Cushion

73 55 30 to 100 M FV 80 11 11 99 116 134 20 53.5 77 83.5 63.5 40 to 100 100 11 11 117 136 154 22 53.5 94 98 76 40 to 100 4-FD FT L FX FZ B + Stroke A + Stroke Rod end male threads Rod end nut L1 Rear flange type/RQG, RDQG Rear flange type mm Bore size (mm) Stroke range (mm) L1 L A FV M 33.5 8 63 72 30 to 100 43.5 10 80 84.5 40 to 100 B + Stroke 4-FD 43.5 12 100 99 40 to 100 L FT FX FZ A +

RQ

15, 20, 25, 30, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 RQ MU DManufacture of Intermediate Stroke -X Description Part no.

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 9kg Positioning time (sec) Positioning time (sec) 150 100 50 10 1 150 100 50 10 1 Positioning distance (mm) Positioning distance (mm) 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 50 50 3.1 2.1 1.1 0.3 0.1 3.1 2.1 1.1 0.3 0.1 100 100 1.6 1.1 0.6 0.2 0.1 1.6 1.1 0.6 0.2

Series AP500

psig (0.69 MPa) 60 psig (0.41 MPa) Inlet pressure: 80 psig (0.55 MPa) 100 0.69 60 0.41 90 0.62 50 0.34 80 0.55 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 70 0.48 40 0.28 60 0.41 50 0.34 30 0.21 40 0.28 20 0.14 30 0.21 20 0.14 10 0.07 0 10 0.00 0.07 0 0.00 0 100 200 300 400 500 600 Flow rate (slpm, N2) 0 50 100 150 Flow rate (slpm, N2

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

ISO Standard Hydraulic Cylinder

32 40 50 63 80 100 Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100.